• KIEE International Transactions on Electrophysics and Applications
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• 제4C권4호
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• pp.149-154
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• 2004

This paper presents a silicon probe tip for vertical probe card application. The silicon probe tip was fabricated using MEMS technology such as porous silicon micromachining and deep- RIE (reactive ion etching). The thickness of the silicon epitaxial layers was 5 ${\mu}{\textrm}{m}$ and 7 ${\mu}{\textrm}{m}$, respectively. The width and length were 40 ${\mu}{\textrm}{m}$ and 600 ${\mu}{\textrm}{m}$, respectively. The probe structure was a multilayered structure and was composed of Au/Ni-Cr/Si$_3$N$_4$/n-epi layers. The height of the curled probe tip was measured as a function of the annealing temperature and time. Resistance characteristics of the probe tip were measured using a touchdown test.

• ETRI Journal
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• 제27권4호
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• pp.433-438
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• 2005

We present a new type of silicon micro-probe card using a three-dimensional probe beam of the cantilever type. It was fabricated using KOH and dry etching, a porous silicon micromachining technique, and an Au electroplating process. The cantilever-type probe beam had a thickness of $5 {\mu}m$, and a width of $50{\mu}$ and a length of $800 {\mu}m$. The probe beam for pad contact was formed by the thermal expansion coefficient difference between the films. The maximum height of the curled probe beam was $170 {\mu}m$, and an annealing process was performed for 20 min at $500^{\circ}C$. The contact resistance of the newly fabricated probe card was less than $2{\Omega}$, and its lifetime was more than 20,000 turns.

• Journal of Biosystems Engineering
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• 제22권1호
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• pp.59-67
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• 1997

An experimental apparatus was developed for the rapid determination of thermal conductivity by transient probe method. The theoretical basis for transient probe method has been investigated. The mathematical model for this method is the Carslaw and Jaeger model which is used perfect line source theory. The small needle probe which is equipped with thermocouple and heating element is constructed. A software that performs data analysis and acquisition is programmed. The influence of the power dissipated per unit length of the probe has been assessed for glycerin. The result showed no significant correlation between thermal conductivity and power input. Determination made with this experimental apparatus were found to agree well with the recommended thermal conductivity data.

• 한국잠사곤충학회지
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• 제37권1호
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• pp.16-26
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• 1995

RFLP법에 의한 누에품종의 계통분류를 목적으로 유용 probe의 선발 실험을 행하여, 얻어진 2개의 probe SP1-13, SP1-28과 외부에서 분양 받은 probe10-42를 사용하여 22개 현 장려 누에품종과 멧누에 대한 DNA 다형성을 조사하였다. 조사결과 이들 probe들 중 SP1-28에서 품종간의 다형성을 나타내는 수종의 band가 검출되었고, SP1-13 에서도 다형성을 보이는 소수의 band가 인정되었으나, 10-42으로부터는 모든 품종에서 monomorphic한 한개의 band만이 검출되었다.

• Journal of Astronomy and Space Sciences
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• 제14권2호
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• pp.269-274
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• 1997

Langmuir probe was housed in the sounding rocket to test the probe's performance and to find the environmental parameters at the F layer of the ionosphere. The gold plated cylindrical probe had a length of 14㎝ and a diameter of 0.096 ㎝. The applied voltage to the probe consisted of 0.9 sec fixed positive bias followed by 0.1 sec of down/up sweep. This ensured that the probe swept through the probe's current-voltage characteristic at least once during 1 second quiescent periods enabling the electron temperature to be measured during the undisturbed times of the flight. The experimental results showed good agreement of the temperature distribution with IRI model at the lower F layer. In the upper layer, the experimental temperatures were 100-200K lower than the IRI model's because of the different geomagnetic conditions: averaged conditions were used in IRI model and specific conditions were reflected in the experiment.

• Journal of Welding and Joining
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• 제14권6호
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• pp.37-47
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• 1996

An ultrasonic testing uses the directivity of the ultrasonic wave which propagates in one direction. The directivity is expressed as the relationship between the propagate direction and its sound pressure. The directivity of ultrasonic wave is related to determination of testing sensitivity, scanning pitch and defect location. This paper investigated the directivity of ultrasonic wave, which scattered from slit defect located in heat-affected zone (HAZ) in butt joint using visualization method. The directivity of shear waves scattered from slit defect were different according to probe direction (far defect, near defect) and probe position (forward movement, maximum echo position, backward movement). The difference of directivity of reflection wave was existed between 2 MHz and 4 MHz angle probes. In the case of 2 MHz angle probe, the directivity of reflection wave was appeared sharp form because of the relation wave length and defect size.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.181-181
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• 2012

The microwave probe for measuring plasma density is widely used for its advantages: First, it is not affected by the reactive gas. Second, it can measure local plasma parameters such as plasma density, plasma potential and plasma temperature. Third, it is simple and robust. A cut-off probe is the one of the most promising microwave probe. Recently, Kim et al. reveals the physics of the cut-off probe but the effect of the sheath on the determination of the plasma density is not explained. In this presentation, for taking account of sheath effects on determination of plasma density from the cut-off peak, a simplified circuit modeling and an E/M simulation are conducted. The results show that occupation ratio of sheath volume between two tips of the cut-off probe and subsequence pressure condition mainly change position of the cut-off peak with respect to plasma frequency. Magnitude of relative voltage taken on the impedance of sheath and the impedance of bulk plasma can explain this effect. Furthermore, effects of gap size, tip radius, and tip length ware revealed based on above analysis.

• 센서학회지
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• 제8권2호
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• pp.133-138
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• 1999

In this pager, the authors have implemented a blood flow simulator and a LDF(laser Doppler flowmeter) probe using self-mixing effect of the laser diode. The purpose of the blood flow simulator is to simulate microvascular blood flow in tissue. It consists of melinex film (thickness = $123\;{\mu}m$) which has similar optical characteristics to epidermis and porous polyethylene filter (Vyon, porosity 35%, mean pore size $50\;{\mu}m$, thickness=1 mm) which has similar optical characteristics to dermis. The blood flowmeter probe consists of laser diode(5 mW, 780 nm wavelength), CD lens(focal length 12 mm). current-to-voltage converter, highpass filter, and premplifier. It doesn't need optical fiber, therefore, implementation of the probe is simpler than conventional probe using optical fiber.

• 한국전자파학회논문지
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• 제13권2호
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• pp.164-169
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• 2002

본 논문에서는 300~3000 MHz 의 주파수 영역에서 동작하는 근역장 측정 프로브를 설계하여 제작하였다. 설계 파라미터는 프로브에 대한 등가회로를 이용하여 추출하였으며 S파라미터를 이용한 수치해석을 통해 그 특성을 예측하였다. 제작된 프로브는 3.25 mm 길이의 다이폴 안테나와 제로 바이어스 쇼트키 다이오드, 고저항 전송 선으로 구성되어 있으며 TEM 셀을 이용하여 성능을 확인하였다.

• Food Science and Biotechnology
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• 제14권3호
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• pp.334-339
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• 2005

An instrument using thermal probe method was designed to measure thermal conductivity of liquid and solid foods. Thermal conductivity probe was designed with diameter to length ratio of 100 and diameter of 0.51 mm to minimize axial flow effect on thermal conductivity measurement. Thermal conductivities of distilled/deionized water, glycerin, and beef frankfurter meat were measured at $20-80^{\circ}C$. Mean thermal conductivity values of water showed less than 2.0% difference from several reference values without using time correction factor or probe calibration constant. For glycerin, difference was less than 0.7% from reference values at $20-50^{\circ}C$. Mean values of thermal conductivity for beef frankfurter meat ranged from 0.389 to $0.350\;W/m{\cdot}K$ at $20-80^{\circ}C$.