• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.166-173
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• 2006

In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than $3{\mu}m$ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. Poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 nm because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 kHz and 16.7 nm/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.173-181
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• 2005

We report on the design and fabrication of an electrostatic 2-axis MEMS stage possessing a platform with a size of $5{times}5mm^2$. The stage, as a key component, would be used in developing probe-based storage devices in the future. It was fabricated by forming numerous $5{\times}5{\mu}m^2$ etching holes in the central platform, as a result, reducing the total number of masks to 1, thereby simplifying the whole fabrication process. Experimental results show that the driving range of the stage was $32{\mu}m$ at the supplied voltage of 20V and the natural frequency was approximately 300Hz. The mechanical coupling between x- and y-motion was also measured and verified to be $25\%$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.411-415
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• 2002

In this paper, a mechanical probe for CMM (Coordinate Measuring Machine) with a three-axis force-sensing unit is proposed, which is capable of measuring an actual contact position without the lobbing effect and the pre-travel error. The force-sensing unit detects the external force, which is act on the stylus of CMM during the measuring process. Thus, the contact point of the stylus of CMM can be estimated ken the direction of measured force components. Based on the structural analysis of the proposed CMM probe, the transformation matrix is derived and calibrated so that it shows linear relationships between the estimated force components from the output voltages and the real input forces. And, the relationships are verified through the computer simulation. The results show that the proposed mechanical probe is very useful fur detecting the contacting force components on measuring process of CMM.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.546-550
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• 2002

This paper proposes an error compensation method that improves accuracy with geometry information of injection molding parts. Geometric information can give an improved accuracy in reverse engineering. Measuring data can not lead to get accurate geometric model, including errors of physical parts and measuring machines. Measuring data include errors which can be classified into two types. One is molding error in product, the other is measuring error. Measuring error includes optical error of laser scanner, deformation by probe forces of CMM and machine error. It is important to compensate these in reverse engineering. Least square method(LSM) provides the cloud data with a geometry compensation, improving accuracy of geometry. Also, the functional shape of a part and design concept can be reconstructed by error compensation using geometry information.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.641-644
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• 2005

The study on the interaction forces of some biological materials is important to understanding biological phenomena and their application to practical purpose. This paper introduces a measuring technique for biological adhesive forces using the AFM(Atomic Force Microscope). Since no standardized thesis on adhesive forces exist, the adhesive forces is defined as adhesive forces against a hardened surface of biological materials. To grant the results are meaningful, which is based on the understanding the surface characteristics of biological materials using the AFM, a nominal value of average adhesive force per unit area should be measured. Therefore the modified AFM probe with small micro glass bead was proposed so that it can guarantee the required contact area for measuring the average adhesive forces. A pyrex glass substrate with circular patterns, which was fabricated by micromachining technique, is introduced in order to controll the contact area. The two types of mussel adhesive proteins, Celltak and recombinant-MGFP5, were tested by the proposed measuring method. The test results show that the adhesive force of the mussel adhesive proteins can be reliably measured by use of this method.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.402.1-402.1
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• 2014

Photonic force microscopy (PFM) is an optical tweezers-based scanning probe microscopy, which measures the forces in the range of fN to pN. The low stiffness leads proper to measure single molecular interaction. We introduce a novel photonic force microscopy to stably map various chemical properties as well as topographic information, utilizing weak molecular bond between probe and object's surface. First, we installed stable optical tweezers instrument, where an IR laser with 1064 nm wavelength was used as trapping source to reduce damage to biological sample. To manipulate trapped material, electric driven two-axis mirrors were used for x, y directional probe scanning and a piezo stage for z directional probe scanning. For resolution test, probe scans with vertical direction repeatedly at the same lateral position, where the vertical resolution is ~25 nm. To obtain the topography of surface which is etched glass, trapped bead scans 3-dimensionally and measures the contact position in each cycle. To acquire the chemical mapping, we design the DNA oligonucleotide pairs combining as a zipping structure, where one is attached at the surface of bead and other is arranged on surface. We measured the rupture force of molecular bonding to investigate chemical properties on the surface with various loading rate. We expect this system can realize a high-resolution multi-functional imaging technique able to acquire topographic map of objects and to distinguish difference of chemical properties between these objects simultaneously.

• Tribology and Lubricants
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• v.28 no.2
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• pp.62-69
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• 2012

Atomic force microscopy (AFM) has been widely utilized as a versatile tool not only for imaging surfaces but also for understanding nano-scale interfacial phenomena. By measuring the responses of the photo detector due to bending and torsion of the cantilever, which are caused by the interactions between the probe and the sample surface, various interfacial phenomena and properties can be explored. One of the challenges faced by AFM researchers originates in the physics of measuring the small forces that act between the probe of a force sensing cantilever and the sample. To understand the interactions between the probe and the sample quantitatively, the force calibration is essential. In this work, the procedures used to calibrate AFM instrumentation for nano-scale force measurement in normal and lateral directions are reviewed.

• Tribology and Lubricants
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• v.21 no.1
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• pp.1-7
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• 2005

Effect of Surface roughness on nanoscale adhesion was studied experimentally by using colloidal probe technique. Glass micro balls having the radius of $3.3\~17.4{\mu}m$ were glued at the end of AFM cantilevers to prepare colloidal probes. Adhesion force between the colloidal probe and Si-wafer was measured using pull-off force measuring method. Results showed that the measured adhesion forces are not the function of the radius of the glued balls because the ball surfaces are rough. It is also found that roughness parameters such as $R_a,\;R_q\;and\;R_{max}$ do not have important role on nanoscale adhesion. In order to find the effect of surface roughness on nanoscale adhesion, the bearing areas were extracted from the measured topography of glued balls. After normalizing the measured adhesion force with the bearing area, it was found that the normalized adhesion force kept constant as function of the radius of glued ball.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1018-1021
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• 2003

A scratch tester was developed to evaluate the adhesive strength at interface between thin film and substrate(silicon wafer). Under force control, the scratch tester can measure the normal and the horizontal forces simultaneously as the probe tip of the equipment approaches to the interface between thin film and substrate of wafer. The capacity of each component of force sensor is 0.1 N ∼ 100 N. In addition, the tester can detect the signal of elastic wave from AE sensor(frequency range of 900 kHz) attached to the probe tip and evaluate the bonding strength of interface. Using the developed scratch tester. the feasibility test was performed to evaluate the adhesive strength of semiconductor wafer.

• Archives of Pharmacal Research
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• v.4 no.2
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• pp.99-107
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• 1981

To investigate the protein binding characteristics of ibuprofenlysine, the effects of drub conentration, pH, ionic strength and protein concentration on the binding of drug to protein concentration on the binding of drug to protein were studied by fluorescence probe method. The conformational change of protein was investigated by circular dichroism (CD) measurement. As the concentration of drug increases, the association constant decreases. These may be due to complex formation of the probe and drug, or the interaction of the protein-probe complex and drug. The association constant for ibuprofenlysine increased with increasing protein concentration. These finding suggest a sharing of one ibuprofenlysine molecule by more than one protein molecule in the binding. The binding between ibuprofenlysine and protein was dependent on pH and ionic strength. It seems that both hydrophobic binding and some electrostatic forces are involved in the binding of ibuprofenlysing to protein.