• 대한기계학회논문집B
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• 제27권12호
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• pp.1750-1757
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• 2003

This paper describes the flow measurements inside the blade passage of an axial flow fan by using a rotating hot-wire probe sensor from a relative flame of reference fixed to the rotor blades. The validity of fan rotor designed by a streamline curvature equation was performed by the measurement of the three-dimensional flow upstream and downstream of the fan rotor using a 5-hole pitot tube. The vortical flow structure near the rotor tip can be clearly observed by the measurements of a relative velocity and its fluctuation on quasi-orthogonal planes to a tip leakage vortex. Larger vortical flow, which results in higher blockage in the main flow, is formed according to decrease a flow rate. The vortical flow spreads out to the 30 percent span from the rotor tip at near stall condition. In the design operating condition, the tip leakage vortex is moved downstream while the center of the vortex keeps constant in the spanwise direction. Detailed characteristics of a velocity fluctuation with relation to the vortex were also analyzed.

• 전자공학회논문지SC
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• 제45권6호
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• pp.16-25
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• 2008

미세 탐침이란 프로브 카드(Probe Card)를 구성하는 초미세탐침을 의미한다. 이러한 미세 탐침은 그 크기가 상당히 미세하기 때문에 외관 이상 유무를 사람의 눈으로 검사하기가 상당히 어렵다. 반면, 프로브카드를 구성하는 미세 탐침의 이상 유무는 상당히 중요한 요소라고 볼 수 있다. 이에 본 연구에서는 사람의 눈으로 검사하기 어려운 미세 탐침의 불량 상태를 자동화된 비전 시스템으로 검사할 수 있는 방법을 개발하였다. 즉 탐침의 구부러진 각도, Tip Length, 종단 직경을 고속으로 자동 검사할 수 있는 비전 기술을 개발한 것이다 제안한 방법에 의한 실험결과, 사람의 육안에 위한 검사보다 검사의 정확도와 속도가 향상되었으며, 또한 조명환경에 대해서도 강건성(robustness)이 향상되었음을 알 수 있었다.

• 한국신뢰성학회지:신뢰성응용연구
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• 제7권1호
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• pp.23-29
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• 2007

Probe card is a test component which is to classify the known good die with electrical contact before the packaging in the ATE (automatic testing equipment). Conventional probe tip was mostly needle type, it has been difficult to meet with conventional type, because of decreasing chip size, pad to pad pitch and pads size increasingly. For that reason, probe cards using MEMS (micro electro mechanical system) technology have been developed for various semiconductor chips. In this paper, Area Array type MEMS Probe tip was designed,, fabricated, and characterized its mechanical and electrical properties. The authors found that good electrical characteristics under $1{\Omega}$ were acquired with gold (Au) and aluminium (Al) pad contact test over 0.5gf and 4gf respectively. And, contact resistance variation under $0.1{\Omega}$ were achieved with 100,000 times of repetition test. And, insertion loss (IS) for high frequency operation was ascertained over 300MHz at -3dB loss.

• 제어로봇시스템학회논문지
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• 제14권4호
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• pp.361-364
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• 2008

Tips of probe card were fabricated using MEMS technology. P-type silicon wafer with $SiO_2$ layer was used as a substrate for fabricating the probe card. Ni-Cr and Au used as seed layer for electroplating Ni were deposited on the silicon wafer. Line patterns for probing devices were formed on silicon wafer by electroplating Ni through mold which formed by MEMS technology. Bridge structure was formed by wet-etching the silicon substrate. AZ-1512 photoresist was used for protection layer of back side and DNB-H100PL-40 photoresist was used for patterning of the front side. The mold with the thickness of $60{\mu}m$ was also formed using THB-120N photoresist and probe tip with thickness of $50{\mu}m$ was fabricated by electroplating process.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1018-1021
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• 2003

A scratch tester was developed to evaluate the adhesive strength at interface between thin film and substrate(silicon wafer). Under force control, the scratch tester can measure the normal and the horizontal forces simultaneously as the probe tip of the equipment approaches to the interface between thin film and substrate of wafer. The capacity of each component of force sensor is 0.1 N ∼ 100 N. In addition, the tester can detect the signal of elastic wave from AE sensor(frequency range of 900 kHz) attached to the probe tip and evaluate the bonding strength of interface. Using the developed scratch tester. the feasibility test was performed to evaluate the adhesive strength of semiconductor wafer.

• 대한기계학회논문집B
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• 제30권1호
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• pp.41-47
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• 2006

High resolution dopant profiling in semiconductor devices has been an intense research topic because of its practical importance in semiconductor industry. Although several techniques have already been developed. it still requires very expensive tools to achieve nanometer scale resolution. In this study we demonstrated a novel dopant profiling technique with nanometer resolution using very simple setup. The newly developed technique measures the thermoelectric voltage generated in the contact point of the SPM probe tip and MOSFET surface instead of electrical signals widely adopted in previous techniques like Scanning Capacitance Microscopy. The spatial resolution of our measurement technique is limited by the size of contact size between SPM probe tip and MOSFET surface and is estimated to be about 10 nm in this experiment.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1888-1891
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• 2003

In this paper, we proposed a new method to control the length of carbon nano tube in the single CNT probe. A single CNT probe was composed of a tungsten tip made by the electrochemical etching and carbon nano tube which was grown by CVD and prepared through the sonication. The two components were attached with the carbon tape. Since the length of CNT can not be controlled during the manufacturing, the post process is needed to shorten the CNT. In this paper, we proposed the method of electrochemical process. The process was done under the optical microscope and the results were checked by SEM. The diameter of the carbon nano tube used in this paper was about 130nm because the above process had to be done with the optical microscope. Using the method proposed in this paper, we can control the length of the nano tube tip.

• KSBB Journal
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• 제21권5호
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• pp.347-352
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• 2006

본 연구에서는 sonificator를 장착하여 세포막을 파쇄하고 현장에서 형광을 이용하여 조작이 간편하고 단시간에 DNA를 측정할 수 있는 자동화된 형광기를 개발하기 위하여 그람 양성균으로 간균인 Bacillus globigii와 구균인 Streptococcus epidermidis를 대상으로 최적의 세포 파쇄조건을 확립하고자 하였다. Sonificator probe 직경에 따라 세포의 파쇄 효과가 큰 차이를 보였으며 13 mm probe로 20초동안 sonification시키는 것이 가장 효율적인 것으로 나타났으며 간균인 Bacillus globigii가 구균인 Streptococcus epidermidis보다 더 파쇄가 잘 되는 것으로 나타났다. 시료에 잠긴 Sonificator probe tip 깊이에 따라서도 세포의 파쇄 효과가 크게 나타났는데 시료에 잠긴 probe tip의 깊이가 깊을수록 큰 파쇄 효과를 발휘하였다. 선정된 최적의 파쇄 조건에서 최저 탐지농도는 Bacillus globigii, Streptococcus epidermidis 모두 $5{\times}10^5CFU/m{\ell}$의 농도를 탐지 가능한 것으로 나타났다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.181-181
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• 2012

The microwave probe for measuring plasma density is widely used for its advantages: First, it is not affected by the reactive gas. Second, it can measure local plasma parameters such as plasma density, plasma potential and plasma temperature. Third, it is simple and robust. A cut-off probe is the one of the most promising microwave probe. Recently, Kim et al. reveals the physics of the cut-off probe but the effect of the sheath on the determination of the plasma density is not explained. In this presentation, for taking account of sheath effects on determination of plasma density from the cut-off peak, a simplified circuit modeling and an E/M simulation are conducted. The results show that occupation ratio of sheath volume between two tips of the cut-off probe and subsequence pressure condition mainly change position of the cut-off peak with respect to plasma frequency. Magnitude of relative voltage taken on the impedance of sheath and the impedance of bulk plasma can explain this effect. Furthermore, effects of gap size, tip radius, and tip length ware revealed based on above analysis.

• 한국유체기계학회 논문집
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• 제13권6호
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• pp.5-12
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• 2010

Comparative study on the flow measurement by 5-hole and 7-hole probes was conducted in a linear cascade with tip clearances of 2.3%, 3.1%, and 4.4% of the blade span. Calibration range of the 5-hole and the 7-hole probes were ${\pm}25$ and ${\pm}50$ degrees, respectively. Results show that the secondary flow and total pressure loss measured by the 5e-hole and 7-hole probes were similar at small tip clearance cases. However, at the tip clearance of 3.1% and 4.4% of the blade span cases, flow angles exceeding the calibration range of the 5-hole probe were observed. Because of the wider calibration range, larger flow angle by strong leakage vortex could be measured by the 7-hole probe.