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Development of Automatic Visual Inspection System for Micro Needle  

Kang, Su-Min (Dept. of Electronic computer Eng., Dankook University)
Han, Kwang-Hee (Dept. of Electronic computer Eng., Dankook University)
Huh, Kyung-Moo (Dept. of Electronic Eng., Dankook University)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SC / v.45, no.6, 2008 , pp. 16-25 More about this Journal
Abstract
The micro needle means the ultrafine probe of 'Probe Card'. The size of micro needle is so minute that it is difficult to minute that it is difficult to inspect it with eyes. On the other hand it is very critical if there is a defect in micro needle of probe card. In this study, we developed an automatic visual inspection system for finding defect status in probe angle, tip length and diameter. Through the experimental results, we could find that our proposed method is better than human-eyes inspection method in accuracy and inspection speed, and also in robustness to lighting circumstances.
Keywords
Inspection; Needle; Vision; Angle; Tip length; Diameter;
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