• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.888-891
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• 2003

This paper describes on the fabrication and characteristics of micro ceramic thin-film type pressure sensors based on Ta-N strain-gauges for high-temperature applications. The Ta-N thin-film strain-gauges are deposited onto thermally oxidized Si diaphragms by RF sputtering in an argon-nitrogen atmosphere($N_2$ gas ratio: 8 %, annealing condition: $900^{\circ}C$, 1 hr.), Patterned on a wheatstone bridge configuration, and use as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is $1.097{\sim}1.21mV/V.kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS. The fabricated pressure sensor presents a lower TCR, non-linearity than existing Si piezoresistive pressure sensors. The fabricated micro ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that is operable under high-temperature environments.

• 상하수도학회지
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• 제30권5호
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• pp.491-500
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• 2016

Pressure monitoring is expected to be expanded in a water distribution system according to accelerated development of smart water network management technologies caused by appearances of affordable digital infrastructures like computing, storage and bandwidth. However, the placement of pressure sensors has been determined by engineer's technical decisions since there is no well-defined criteria for deciding a suitable location of pressure sensor. This study presents a placement method of pressure sensors based on the consideration of allowable error in calibrating water network analysis modeling. The proposed method is to find a minimum set of pressure sensors for achieving a reliable management of water transmissions main and increasing the efficiency of their real-time operation. In the case study in Y area's transmission main, the proposed method shows equally distributed pressure sensors in terms of hydraulics. It is expected that the proposed method can be used to manage transmission mains stably and construct a robust real-time network analysis system as a minimal criteria.

• 대한기계학회논문집A
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• 제31권4호
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• pp.417-424
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• 2007

This paper reports fabrication and characterization of a pressure sensor using a pitch-based carbon fiber. Pitch-based carbon fibers have been shown to exhibit the piezoresistive effect, in which the electric resistance of the carbon fiber changes under mechanical deformation. The main structure of pressure sensors was built by performing backside etching on a SOI wafer and creating a suspended square membrane on the front side. An AC electric field which causes dielectrophoresis was used for the alignment and deposition of a carbon fiber across the microscale gap between two electrodes on the membrane. The fabricated pressure sensors were tested by applying static pressure to the membrane and measuring the resistance change of the carbon fiber. The resistance change of carbon fibers clearly shows linear response to the applied pressure and the calculated sensitivities of pressure sensors are $0.25{\sim}0.35 and 61.8 ${\Omega}/k{\Omega}{\cdot}bar$ for thicker and thinner membrane, respectively. All these observations demonstrated the possibilities of carbon fiber-based pressure sensors.

• Composites Research
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• 제18권5호
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• pp.1-8
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• 2005

여러 복합재료 제작기법 중에서 필라멘트 와인딩 제작 기법은 압력탱크, 파이프 등과 같은 실린더 형태의 축대칭 구조물의 제작에 가장 효율적인 방법이다. 또한, 필라멘트 와인딩으로 제작된 복합재료 압력탱크는 운용 중 큰 내압을 받게 되며 복잡한 손상 메커니즘과 파손 모드를 가지고 있다. 그러므로, 필라멘트 와인딩으로 제작된 복합재료 압력탱크는 탱크의 제작 과정과 제작 후 전 과정 동안의 탱크에 대한 건전성 모니터링이 필요하며 이를 위해 탱크의 제작 시부터 탱크 내부의 여러 지점에 센서가 삽입 적용되어야 한다. 여러 센서 중에서 광섬유 센서는 복합재료 내부에 삽입이용이한 센서이며 특히, 광섬유 브래그 격자 센서(fiber Bragg grating Sensors, FBG센서)는 다중화(multiplexing)가 용이한 것을 큰 장점으로 가장 많이 채택되고 있다. 하지만, FBG 센서를 필라멘트 와인딩된 복합재료 압력탱크에 성공적으로 삽입 적용하기 위해서는 극심한 탱크의 삽입 환경에 대한 센서의 삽입 기법의 개발이 선행되어야 한다. 본 연구에서는 필라멘트 와인딩된 복합재료 압력탱크의 제작 시 FBG 센서를 탱크 내부에 다중화하여 삽입적용하기 위한 기법에 대하여 연구하였다.

• 센서학회지
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• 제32권6호
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• pp.340-351
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• 2023

Wearable sensors designed for strain, pressure, and temperature measurements are essential for monitoring human movements, health status, physiological data, and responses to external stimuli. Notably, recent research has led to the development of high-performance wearable sensors using innovative materials and device structures that exhibit ultra-high sensitivity compared with their commercial counterparts. However, the quest for accurate sensing has identified a critical challenge. Specifically, the mechanical flexibility of the substrates in wearable sensors can introduce interference signals, particularly when subjected to varying external stimuli and environmental conditions, potentially resulting in signal crosstalk and compromised data fidelity. Consequently, the pursuit of non-interference sensing technology is pivotal for enabling independent measurements of concurrent input signals related to strain, pressure, and temperature, ensuring precise signal acquisition. In this comprehensive review, we present an overview of the recent advances in noninterference sensing strategies. We explore various fabrication methods for sensing strain, pressure, and temperature, emphasizing the use of hybrid composite materials with distinct mechanical properties. This review contributes to the understanding of critical developments in wearable sensor technology that are vital for their ongoing application and evolution in numerous fields.

• 센서학회지
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• 제3권1호
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• pp.5-11
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• 1994

본 논문은 실리콘기판 직접접합기술과 에피택샬 성장법으로 각각 형성한 SOI구조, 즉 Si/$SiO_{2}$/Si 및 Si/$Al_{2}O_{3}$/Si 상에 제작한 압저항형 압력센서의 특성을 기술한다. SOI구조의 절연층을 압저항의 유전체 분리막으로 이용한 압력센서는 $300^{\circ}C$ 까지 사용 가능했다. SOI구조의 절연층을 박막 실리콘 다아어프램 형성시 에칭 중지막으로 이용한 경우, 제작된 압력센서의 200개 소자들에 대한 압력감도의 변화는 ${\pm}2.3%$ 이내로 제어 가능했다. 더구나 실리콘 기판 직접접합기술과 에피택샬 성장법의 결합으로 형성한 더불 SOI구조($Si/Al_{2}O_{3}/Si/SiO_{2}/Si$)상에 제작된 압력센서는 고온분위기에서 사용 가능할 뿐만 아니라 고분해 능력을 갖는 특성을 보였다.

• 제어로봇시스템학회논문지
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• 제8권12호
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• pp.1061-1065
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• 2002

Sensors need to be implanted to obtain necessary information for LVAS (Left Ventricular Assist System) operations. Size of the sensors can prevent them from being implanted in a patient and reliabilities of the sensors are questionable for a long term use. In this wort we utilize a developed pump model to estimate flow and pressure difference across the pump without implanted sensors and present a method to obtain the physiological variables as aorta pressure and left ventricle pressure from the pump model and pulsatility of flow estimate or pressure difference estimate. These estimated variables can be used for LVAS control as an index or indices.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.587-590
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• 2000

This paper presents the characteristics of metal thin-film pressure sensors. The micro pressure sensors consists of a chrom thin-film, patterned on a Wheatstone bridge configuration, sputter-deposited onto thermally oxidized Si wafer an aluminium interconnection layer. The fabricated micro pressure sensors shows a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.16~1.21 mV/V.kgf/$\textrm{cm}^2$ in the temperature range of 25~l0$0^{\circ}C$ and the maximum non-linearity is 0.21 %FS.

• 제어로봇시스템학회논문지
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• 제3권4호
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• pp.357-362
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• 1997

This paper suggests an automatic calibration technique for piezoelectric low pressure transducer measuring a pressure blow 500psi. The present calibration system embedded with error correction algorithm generates it's best you don't cut parts of wards like so dynamic pressure and compensates offset voltage and pressure error. It is shown via experimental results that the instrumentation accuracy has been improved and mean time between calibrations has been shortened.

• Journal of Advanced Marine Engineering and Technology
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• 제31권6호
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• pp.761-767
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• 2007

We have developed novel optical-fiber sensors based on strain-induced long-period fiber gratings for monitoring the deformation of a hull. They have no external pressure for sustaining the mechanical formed gratings. The pressure, which provides a force to form the periodic grating along the single mode fiber, was realized by the bonding strength of a photopolymer. To reduce the polarization dependency of the sensors caused by the asymmetry structure of gratings, a Faraday Rotator Mirror (FRM) was utilized in this experiment. We have realized the polarization-insensitive function of the proposed sensors. The change of an external strain are measured by an optical spectrum analyzer. When the external stain increases. the attenuation at the resonant wavelength decreases and the loss peak was slightly shifted to the shorter wavelength.