Journal of Sensor Science and Technology (센서학회지)
- Volume 3 Issue 1
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- Pages.5-11
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- 1994
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
SOl Pressure Sensors
SOI 압력(壓力)센서
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Chung, Gwiy-Sang
(Dept. of Electronics, Dongseo Univ. of Technology) ;
- Ishida, Makoto (Dept. of Electrical and Electronic Eng., Toyohashi Univ. of Technology) ;
- Nakamura, Tetsuro (Dept. of Electrical and Electronic Eng., Toyohashi Univ. of Technology)
- Published : 1994.02.28
Abstract
This paper describes the characteristics of a piezoresistive pressure sensor fabricated on a SOI (Si-on-insulator) structure, in which the SOI structures of Si/
본 논문은 실리콘기판 직접접합기술과 에피택샬 성장법으로 각각 형성한 SOI구조, 즉 Si/
Keywords