Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
권호 표지
DOI QR코드

DOI QR Code

Fabrication and Characterization of a Pressure Sensor using a Pitch-based Carbon Fiber

탄소섬유를 이용한 압력센터 제작 및 특성평가

  • 박창신 (전남대학교 기계공학과 대학원) ;
  • 이동원 (전남대학교 기계시스템공학부) ;
  • 강보선 (전남대학교 기계시스템공학부)
  • Published : 2007.04.01
Download PDF
⟨ Previous Next ⟩

Abstract

This paper reports fabrication and characterization of a pressure sensor using a pitch-based carbon fiber. Pitch-based carbon fibers have been shown to exhibit the piezoresistive effect, in which the electric resistance of the carbon fiber changes under mechanical deformation. The main structure of pressure sensors was built by performing backside etching on a SOI wafer and creating a suspended square membrane on the front side. An AC electric field which causes dielectrophoresis was used for the alignment and deposition of a carbon fiber across the microscale gap between two electrodes on the membrane. The fabricated pressure sensors were tested by applying static pressure to the membrane and measuring the resistance change of the carbon fiber. The resistance change of carbon fibers clearly shows linear response to the applied pressure and the calculated sensitivities of pressure sensors are $0.25{\sim}0.35 and 61.8 ${\Omega}/k{\Omega}{\cdot}bar$ for thicker and thinner membrane, respectively. All these observations demonstrated the possibilities of carbon fiber-based pressure sensors.

Keywords

References

  1. Sze, S. M., 1994, 'Semiconductor Sensors,' John Wiley & Sons, Inc., New York, USA
  2. Carr, J. J., 1997, 'Sensors and Circuits,' Prentice- Hall, Inc., New Jersey, USA
  3. Obieta,I. and Gracia, F. J., 1994, 'Sputtered Silicon Thin Film for Piezoresistive Pressure Microsensors,' Sensor & Actuators A, Vol. 41, pp. 521-528
  4. Singh, R., Ngo, L. L., Seng, H. S. and Mok, F. N. C., 2002, 'A Silicon Piezoresistive Pressure Sensor,' The 1st IEEE Int. Workshop on Electronic Design, Test and Applications (DELTA '02), p. 181
  5. Ishihara, T., Suzaki, K., Suwazono, S., Hirata, M. and Tanigawa, H., 1987, 'CMOS Integrated Silicon Pressure Sensor,' J. Solid-state Circuit, Vol. SC-22, pp. 151-156 https://doi.org/10.1109/JSSC.1987.1052696
  6. Kuzumaki, T. and Mitsuda, Y., 2004, 'Dynamic Measurement of Electrical Conductivity of Carbon Nanotubes during Mechanical Deformation by Nanoprobe Manipulation in Transmission Electron Microscopy,' Applied Physics Letters, Vol. 85, pp. 1250-1252 https://doi.org/10.1063/1.1784536
  7. Stampfer, C., Hebling, T., Obergfell, D., Schoberle, B., Tripp, M. K., Jungen, A., Roth, S., Bright, V. M. and Hierold, C., 2006, 'Fabrication of Single-Walled Carbon-Nanotube-Based Pressure Sensors,' Nano Letters, Vol. 6, No. 2, pp. 233-237 https://doi.org/10.1021/nl052171dS1530-6984(05)02171-5
  8. Chen, P. W. and Chung, D.D.L., 1995, 'Concrete as a New Strain/stress Sensor,' Carbon, Vol. 27B, pp. 11-23 https://doi.org/10.1016/1359-8368(95)00002-X
  9. Takahashi, T., Mureyama, T., Higuchi, A., Awano, H. and Yonetake, K., 2005, 'Aligning Vapor-grown Carbon Fibers in Polydimethylsiloxane using DC Electric or Magnetic Field,' Carbon, Vol. 44. pp. 1180-1188 https://doi.org/10.1016/j.carbon.2005.10.055
  10. Chung, J. H. and Lee, J. H., 2003, 'Nanoscale Gap Fabrication and Integration of Carbon Nanotubes by Micromachining,' Sensor & Actuators A, Vol. 104, pp. 229-235 https://doi.org/10.1016/S0924-4247(03)00025-6
  11. Chung, J. H., Hoon, K. and Lee, J. H., 2004, 'Toward Large-scale Integration of Carbon Nanotubes,' Langmuir, Vol. 20, pp. 3011-3017 https://doi.org/10.1021/la035726yS0743-7463(03)05726-3
  12. Melvas, P., Kalvesten, E. and Stemme, G., 2002, 'A Temperature Compensated Dual Beam Pressure Sensor,' Sensors and Actuators A, Vol. 100, pp. 46-53 https://doi.org/10.1016/S0924-4247(02)00147-4
  13. Lee, B. N., Kim, K. N., Park, H. D. and Shin, S. M., 1999, 'Calibration and Temperature Compensation of Silicon Pressure Sensors using Ion-implanted Trimming Resistors,' Sensors and Actuators A, Vol. 72, pp. 148-152 https://doi.org/10.1016/S0924-4247(98)00214-3
  14. Lee, Y. T., Seo, H. D., Takano, R., Matsumoto, Y., Ishida, M. and Nakamura, T., 1995, 'Design Consideration for Silicon Rectangular Diaphragm Pressure Sensor with Single-element Four-terminal Strain Gauge,' Sensors and Materials, Vol. 7, pp. 53-63

Cited by

  1. Ring-Shaped Inductive Sensor Design and Application to Pressure Sensing vol.39, pp.10, 2015, https://doi.org/10.3795/KSME-A.2015.39.10.995