• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.888-891
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• 2003

This paper describes on the fabrication and characteristics of micro ceramic thin-film type pressure sensors based on Ta-N strain-gauges for high-temperature applications. The Ta-N thin-film strain-gauges are deposited onto thermally oxidized Si diaphragms by RF sputtering in an argon-nitrogen atmosphere($N_2$ gas ratio: 8 %, annealing condition: $900^{\circ}C$, 1 hr.), Patterned on a wheatstone bridge configuration, and use as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is $1.097{\sim}1.21mV/V.kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS. The fabricated pressure sensor presents a lower TCR, non-linearity than existing Si piezoresistive pressure sensors. The fabricated micro ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that is operable under high-temperature environments.

• Journal of Korean Society of Water and Wastewater
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• v.30 no.5
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• pp.491-500
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• 2016

Pressure monitoring is expected to be expanded in a water distribution system according to accelerated development of smart water network management technologies caused by appearances of affordable digital infrastructures like computing, storage and bandwidth. However, the placement of pressure sensors has been determined by engineer's technical decisions since there is no well-defined criteria for deciding a suitable location of pressure sensor. This study presents a placement method of pressure sensors based on the consideration of allowable error in calibrating water network analysis modeling. The proposed method is to find a minimum set of pressure sensors for achieving a reliable management of water transmissions main and increasing the efficiency of their real-time operation. In the case study in Y area's transmission main, the proposed method shows equally distributed pressure sensors in terms of hydraulics. It is expected that the proposed method can be used to manage transmission mains stably and construct a robust real-time network analysis system as a minimal criteria.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.4
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• pp.417-424
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• 2007

This paper reports fabrication and characterization of a pressure sensor using a pitch-based carbon fiber. Pitch-based carbon fibers have been shown to exhibit the piezoresistive effect, in which the electric resistance of the carbon fiber changes under mechanical deformation. The main structure of pressure sensors was built by performing backside etching on a SOI wafer and creating a suspended square membrane on the front side. An AC electric field which causes dielectrophoresis was used for the alignment and deposition of a carbon fiber across the microscale gap between two electrodes on the membrane. The fabricated pressure sensors were tested by applying static pressure to the membrane and measuring the resistance change of the carbon fiber. The resistance change of carbon fibers clearly shows linear response to the applied pressure and the calculated sensitivities of pressure sensors are $0.25{\sim}0.35 and 61.8 ${\Omega}/k{\Omega}{\cdot}bar$ for thicker and thinner membrane, respectively. All these observations demonstrated the possibilities of carbon fiber-based pressure sensors.

• Composites Research
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• v.18 no.5
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• pp.1-8
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• 2005

Among many fabrication methods of composite materials, filament winding is the most effective method for fabricating axis-symmetric structures such as pressure tanks and pipes. Filament wound pressure tanks are under high internal pressure during the operation and it has the complexity in damage mechanisms and failure modes. For this reason, it is necessary to monitor the tank through its operation as well as whole fabrication process. A large number of sensors must be embedded into multi points of the tank from its fabrication step for monitoring the whole tank. Fiber optic sensors, especially fiber Bragg grating(FBG) sensors are widely used for various applications because of good multiplexing capabilities. However, we need to develop the embedding technique of FBG sensors into harsh inner environment of the tank far the successful embedment. In this paper, we studied the embedding technique of a number of FBG sensors into filament wound pressure tanks considering multiplexing.

• Journal of Sensor Science and Technology
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• v.32 no.6
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• pp.340-351
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• 2023

Wearable sensors designed for strain, pressure, and temperature measurements are essential for monitoring human movements, health status, physiological data, and responses to external stimuli. Notably, recent research has led to the development of high-performance wearable sensors using innovative materials and device structures that exhibit ultra-high sensitivity compared with their commercial counterparts. However, the quest for accurate sensing has identified a critical challenge. Specifically, the mechanical flexibility of the substrates in wearable sensors can introduce interference signals, particularly when subjected to varying external stimuli and environmental conditions, potentially resulting in signal crosstalk and compromised data fidelity. Consequently, the pursuit of non-interference sensing technology is pivotal for enabling independent measurements of concurrent input signals related to strain, pressure, and temperature, ensuring precise signal acquisition. In this comprehensive review, we present an overview of the recent advances in noninterference sensing strategies. We explore various fabrication methods for sensing strain, pressure, and temperature, emphasizing the use of hybrid composite materials with distinct mechanical properties. This review contributes to the understanding of critical developments in wearable sensor technology that are vital for their ongoing application and evolution in numerous fields.

• Journal of Sensor Science and Technology
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• v.3 no.1
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• pp.5-11
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• 1994

This paper describes the characteristics of a piezoresistive pressure sensor fabricated on a SOI (Si-on-insulator) structure, in which the SOI structures of Si/$SiO_{2}$/Si and Si/$Al_{2}O_{3}$/Si were formed by SDB (Si-wafer direct bonding) technology and hetero-epitaxial growth, respectively. The SOI pressure sensors using the insulator of a SOI structure as the dielectrical isolation layer of piezoresistors, were operated at higher temperatures up to $300^{\circ}C$. In the case of pressure sensors using the insulator of a SOI structure as an etch-stop layer during the formation of thin Si diaphragms, the pressure sensitivity variation of the SOI pressure sensors was controlled to within a standard deviation of ${\pm}2.3%$ over 200 devices. Moreover, the pressure sensors fabricated on the double SOI ($Si/Al_{2}O_{3}/Si/SiO_{2}/Si$) structures formed by combining SDB technology with epitaxial growth also showed very excellent characteristics with high-temperature operation and high-resolution.

• Journal of Institute of Control, Robotics and Systems
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• v.8 no.12
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• pp.1061-1065
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• 2002

Sensors need to be implanted to obtain necessary information for LVAS (Left Ventricular Assist System) operations. Size of the sensors can prevent them from being implanted in a patient and reliabilities of the sensors are questionable for a long term use. In this wort we utilize a developed pump model to estimate flow and pressure difference across the pump without implanted sensors and present a method to obtain the physiological variables as aorta pressure and left ventricle pressure from the pump model and pulsatility of flow estimate or pressure difference estimate. These estimated variables can be used for LVAS control as an index or indices.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.587-590
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• 2000

This paper presents the characteristics of metal thin-film pressure sensors. The micro pressure sensors consists of a chrom thin-film, patterned on a Wheatstone bridge configuration, sputter-deposited onto thermally oxidized Si wafer an aluminium interconnection layer. The fabricated micro pressure sensors shows a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.16~1.21 mV/V.kgf/$\textrm{cm}^2$ in the temperature range of 25~l0$0^{\circ}C$ and the maximum non-linearity is 0.21 %FS.

• Journal of Institute of Control, Robotics and Systems
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• v.3 no.4
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• pp.357-362
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• 1997

This paper suggests an automatic calibration technique for piezoelectric low pressure transducer measuring a pressure blow 500psi. The present calibration system embedded with error correction algorithm generates it's best you don't cut parts of wards like so dynamic pressure and compensates offset voltage and pressure error. It is shown via experimental results that the instrumentation accuracy has been improved and mean time between calibrations has been shortened.

• Journal of Advanced Marine Engineering and Technology
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• v.31 no.6
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• pp.761-767
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• 2007

We have developed novel optical-fiber sensors based on strain-induced long-period fiber gratings for monitoring the deformation of a hull. They have no external pressure for sustaining the mechanical formed gratings. The pressure, which provides a force to form the periodic grating along the single mode fiber, was realized by the bonding strength of a photopolymer. To reduce the polarization dependency of the sensors caused by the asymmetry structure of gratings, a Faraday Rotator Mirror (FRM) was utilized in this experiment. We have realized the polarization-insensitive function of the proposed sensors. The change of an external strain are measured by an optical spectrum analyzer. When the external stain increases. the attenuation at the resonant wavelength decreases and the loss peak was slightly shifted to the shorter wavelength.