• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.446-449
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• 1995

In this paper, the accurate end position control method of ultraprecision machine tool post using piezoelectric material as an micro positonong devics is presented. This method employs the classical PID feedback and uses an additional notch filter which eliminates the resonance characteristics of controlled plant. And the simple predictor is added to make use of the future value of desired input for better tracking performance. To show the feasibilty of proposed method, the PC-based experimental apparacy can be obtained. Using method, Al specimen of diameter 100mm was cut under practical machining condition to test the practicability of proposed method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.1009-1012
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• 1995

This paper presents an example of the development of motor drives for machine tools. Machine tools need motor drives with high control precision and performance. We developed a motor drive system that meets these requirements. The converter, the one component of drive system, adopts modular structure and high DC-link voltage. The drive which consists rest part of drive system is developed based on TMS320C32 DSP and state-of-the-art circuit technology. In this paper each developed parts are described in terms of its structure, specification and features.

• 한국정밀공학회지
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• 제20권11호
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• pp.166-170
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• 2003

Contouring errors are important especially for high speed and precision machining. In this study, contouring errors along contours having inflection points are studied. When a table of a machine tool moves along a circular path, acceleration acts toward the center of the circle. Thus, at inflection points, acceleration as well as inertia force changes its direction abruptly. The effect of inertia force on the contouring error is investigated in this study. It is found that the contouring error at an inflection point is proportional to the acceleration. This result can be useful in determining contouring errors along general paths.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.1028-1032
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• 1995

This paper describes the manufacture of spherical and aspherical surface on glass, superalloy and ceramic components. The rotationally symmetricallenses, and the ceramic or superalloy molds with spherical shapes are mainly generated by cutting processes on CNC lathe machine or 4,5 axis CNC machining centers. Recently, spherical shape parts require more precise and efficent machining technologies for wide material range such as optical lens of the lithography device in semiconductor manufacturing processes or the high precision mold machining of anti-chemical, anti-wear materials. In this paper, we introduce a newly developed infeed grinding machine with metal with metal bonded cup type wheel and its effects on spherical surface grinding.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.653-657
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• 2005

AGV is very useful equipment to transfer containers in automated container terminal. AGV must have Obstacle Detection System (ODS) for port automation. ODS needs the function to classify some specified object from background in acquired data. And it must be able to track classified moving objects. Finally, ODS could determine its next action for safe driving whether it should do emergency stop or speed down, or it should change its deriving lane. For these functions, ODS can have many different kinds of algorithm. In this paper, we present one of AGV to be used in automated container terminal.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.729-732
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• 2000

The general dicing process cuts a semiconductor wafer to lengthwise and crosswise direction by using a rotating circular diamond blade. But inferior goods are made under the influence of several parameters in dicing such as blade, wafer, cutting water and cutting condition. Moreover we can not applicable this dicing method to GaN wafer, because the GaN wafer is harder than the other wafer as GaAs. In order to overcome this problem, a new dicing process is necessary. This paper describes a new machine using scriber, breaker, and precision servo mechanism in order to dice an semiconductor wafer.

• International Journal of Precision Engineering and Manufacturing
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• 제6권1호
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• pp.31-35
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• 2005

Higher productivity requires high-speed motion of machine tool axes. The iron core linear DC motor (LDM) is widely accepted as a viable candidate for high-speed machine tool feed unit. LDM, however, has two inherent disturbance force components, namely cogging and thrust force ripple. These disturbance forces directly affect the tracking accuracy of the feeding system and must be eliminated or reduced. In order to reduce motor ripple, this research adapted the feedforward compensation method and neural network control. Experiments carried out with the linear motor test setup show that these control methods are effective in reducing motor ripple.

• 한국정밀공학회지
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• 제19권12호
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• pp.171-178
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• 2002

With increasing the needs for micro and precision parts, micro machining technology using micro tools has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. Though these micro tools have developed rapidly, it is difficult to apply them to micro fabrication technologies, because of the inherent manufacturing. In this study, micro tools (WC) to produce micro structures and parts were manufactured by cylindrical grinding machine employing ELID (Electrolytic In-process Dressing) technique and the micro tools are fabricated as square shape with the dimension less than 100${\mu}{\textrm}{m}$. With the micro tools on the same machine, characteristics of micro grooving and drilling are evaluated. Also we compare normal micro machining with ultrasonic micro machining on the vibration table. It is confirmed that the developed micro tools are fully applicable to micro grooving, micro drilling and free form cutting.

• International Journal of Precision Engineering and Manufacturing
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• 제9권1호
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• pp.19-24
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• 2008

We propose a new miniature air-bearing stage with a moving-magnet slotless linear motor. This stage was developed to achieve the precise positioning required for submicron-level machining and miniaturization by introducing air bearings and a linear motor sufficient for mesoscale precision machine tools. The linear motor contained two permanent magnets and was designed to generate a preload force for the vertical air bearings and a thrust force for the stage movement. The characteristics of the air bearings, which used porous pads, were analyzed with numerical methods, and a magnetic circuit model was derived for the linear motor to calculate the required preload and thrust forces. A prototype of a single-axis miniature stage with dimensions of $120\;(W)\;{\times}\;120\;(L)\;{\times}\;50\;(H)\;mm$ was designed and fabricated, and its performance was examined, including its vertical stiffness, load capacity, thrust force, and positioning resolution.

• 한국기계가공학회지
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• 제5권1호
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• pp.45-50
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• 2006

This paper shows a new precision actuator of MUTM(miniature universal testing machine) for the testing of compression and tensile load on the MEMS materials and structures. The MUTM consists of a sample holder, an ultraprecision precision actuator(tranlation stage) and load sensor. The precision actuator has been developed for generating displacements with nanometer accuracy and a dynamic range of 1mm simultaneously. In this paper, it can be made by using the displacement property of bi-morph type PZT, which is able to extend the long range(stroke) according to cantilever size. However, it is not enough to be generated for compression and tensile load in miniature universal testing machine. Therefore, three dozen bi-morph type PZTs are used for generating the load. The load and displacement of the precision actuator are 35g and 0.4mm respectively.