• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.10a
• /
• pp.263-264
• /
• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2013.05a
• /
• pp.299-300
• /
• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2009.06a
• /
• pp.37-38
• /
• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2011.06a
• /
• pp.1179-1180
• /
• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.11a
• /
• pp.515-516
• /
• 2010

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.12
• /
• pp.174-181
• /
• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.

• Journal of the Korean Society for Precision Engineering
• /
• v.33 no.2
• /
• pp.89-94
• /
• 2016

Equipments to influence by external force have to take effect mechanical oscillation. These equipments regardless of the movement on the external force such as roll, pitch and heave etc, worked to keep the height of tote are required for activeness and needed a device as equipment's fluctuation for rapidly compensation. Because the actual development of these devices is difficult to cost-effectively, we were developed to compensation simulator scaled down 1/50. In this paper, we were studying kinematic characteristics, designed the simulator to grasp the point and manufactured. This paper was analyzed for confirming the superiority of compensation simulator and set up 50 ton crane in practice.

• Journal of the Korean Society for Precision Engineering
• /
• v.25 no.2
• /
• pp.49-56
• /
• 2008

In order to reduce energy consumption, secondary controlled system has been applied to many types of equipments. In lifting equipments or press machines using hydraulic cylinder, a hydraulic transformer is used as a control component instead of a valve for motion control and a component for recovering potential energy of load. The transformer is a combination of a variable displacement pump/motor as a secondary controlled element and a fixed displacement pump/motor. In this paper the effect of transformer is studied. Multiple closed loop controllers with displacement feedback of variable pump/motor, speed feedback and position feedback of cylinder are used. The efficiency and energy consumption when cylinder is driven up and down is calculated by simulation. Simulation results show that considerable energy saving is achieved by choosing load ratio, circuit type and supply pressure.

• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.10
• /
• pp.74-80
• /
• 2009

This paper presents a study on fluid flow analysis of organic semiconductor thin film deposition process using the computational numerical method. In the production process, the thickness of deposited organic thin film depends on distribution of nozzle size in the linear cell system, so we analyze to decide the optimal nozzle system for uniform thickness of organic thin film. The results of deposited thickness of thin film by numerical analysis are in good agreement with those of the experimental measurements.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.23 no.11 s.170
• /
• pp.1912-1921
• /
• 1999

The equipments mounted on guided-missile undertake heavy vibrational disturbance. Sometimes the equipments mounted on guided-missile go wrong so that the guided-missile flies over unintended place. For the vibration isolation of the equipments mounted on guided-missile, active vibration control was performed. In the case of active vibration technique, the stiffness matrix and the mass matrix are derived based on FEM (ANSYS5.0). Model reduction was carried out and, as a result, we got 7 DOF mass and stiffness matrix. For the sake of FEM model identification, modal experiment was carried out. With the help of Sensitivity Analysis, the natural frequencies of FEM were tuned to those of Experiment. In this work, the Sky Hook and the LQG control theory were adopted for v iteration control using stacked piezoactuator. Experiments were performed with changing excitation frequency from 10 Hz upto 200 Hz and we got frequency response function of guided-missile equipments. The magnitude of 3rd mode of guided-missile equipments is 8.6 % that of Uncontrolled in Skyhook controller and is 3.4 % that of uncontrolled in LQG controller.