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Analysis of Fluid Flow in the Linear Cell Source for Organic Semiconductor Thin Film Deposition  

Kwak, In-Chul (Department of Mechanical Engineering, Chonnam National University)
Yang, Young-Soo (Department of Mechanical Engineering, Chonnam National University)
Choi, Bum-Ho (National Center for Nanoprocess and Equipments, Honam Technology Service Division, Korea Institute of Industrial Technology)
Kim, Young-Mi (National Center for Nanoprocess and Equipments, Honam Technology Service Division, Korea Institute of Industrial Technology)
Publication Information
Journal of the Korean Society for Precision Engineering / v.26, no.10, 2009 , pp. 74-80 More about this Journal
Abstract
This paper presents a study on fluid flow analysis of organic semiconductor thin film deposition process using the computational numerical method. In the production process, the thickness of deposited organic thin film depends on distribution of nozzle size in the linear cell system, so we analyze to decide the optimal nozzle system for uniform thickness of organic thin film. The results of deposited thickness of thin film by numerical analysis are in good agreement with those of the experimental measurements.
Keywords
Organic Semiconductor; Linear Cell Source; Thin Film Deposition; Numerical Analysis;
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