• Journal of the Korean Ceramic Society
• /
• v.32 no.1
• /
• pp.31-36
• /
• 1995

(100) Si was oxidized in N2O ambient, and the film properties of oxynitride dielectrics were compared with pure SiO2. The growth rate, after pre-oxidation in O2/N2 ambient with raising temperature, is faster than that of O2/N2O treatment during the same condition. Nitrogen piles up at the interface of SiO2 and Si substrate and the content is about 2atom%. Comparing with pure SiO2, oxynitride dielectrics shows less dielectric breakdown failures and flat-band voltage shift, and good diffusion barrier property to dopant(BF2) is also observed.

• Proceedings of the KIEE Conference
• /
• 1998.07d
• /
• pp.1327-1329
• /
• 1998

It is very important to select superior inter-layer PMD(Pre Metal Dielectric) materials which can act as penetration barrier to various impurities created by CMP processes. In this paper, hot carrier degradation and device characteristics were studied with material variation of PMD-1 layers, which were split by LP-TEOS, SR-Oxide, PE-Oxynitride, PE-Nitride, PE-TEOS films. It was observed that the oxynitride and nitride using plasma was greatly decreased in hot carrier effect in comparison with silicon oxide. Consequently, silicon oxide turned out to be a better PMD-1 material than PE-oxynitride and PE-nitride. Also, LP-TEOS film was the best PMD-1 material Among the silicon oxides.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1992.11a
• /
• pp.81-83
• /
• 1992

The superconducting thin films deposited on $SiO_x$ substrate by R.F magnetron sputter using $YBa_2Cu_3O_x$ single target have been made and annealed at $940^{\circ}C$ for 30 min. The thickness of films were 1000-2000${\AA}$ with a rate of 20-25${\AA}/min$ and superconducting properties of thin films depended on the compositions of pre-annealed the thin films. It has been analyzed by SEM photo-analysis and X-ray diffraction patterns of these samples obtained under the various conditions of this sputtering methods. and recognized the supperconducting thin films by electric properties.

• Proceedings of the KIEE Conference
• /
• 2008.07a
• /
• pp.1203-1204
• /
• 2008

본 논문에서는 ICP-CVD(Inductively Coupled Plasma Chemical Vapor Deposition)를 이용해 기판을 가열하지 않고 증착한 $SiO_2$ 절연막의 플라즈마 처리 효과를 분석하였다. 플라즈마 처리를 하지 않은 $SiO_2$ 절연막의 경우 평탄화 전압이 -7.8V, 유효 전하 밀도가 $4.77{\times}10^{13}cm^2$로 열악한 특성을 보였다. 이를 개선하기 위해 헬륨 플라즈마 전처리(Pre-treatment)와 수소 플라즈마 후처리(Post-treatment)를 통해서 $SiO_2$ 절연막의 전기적인 특성을 개선하였다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1994.11a
• /
• pp.143-146
• /
• 1994

In older to investigate the properties of electric conduction in low density polyethylene(LDPE) for power cable, the thickness of specimen was the 30, 100($\mu\textrm{m}$) of LDPE. The experimental condition for conductive properties was measured until the breakdown occurs at temperature ranges from 30 to 110[$^{\circ}C$] and in the electric field of 1 to 5 ${\times}$10$^2$[Mv/m]. As for increase of temperature, the current density of LDPE was increased with constant ratio in low field, but changes with exponential function in high field. The tunnel current of pre-breakdown region is shifted toward low field as much as thermal excitation energy.

• KSTLE International Journal
• /
• v.7 no.1
• /
• pp.22-26
• /
• 2006

A simple finite element analysis is performed to simulate the thermal characteristics of a micro sensor package with thin film heater embedded in the glass wall of a micro-channel. In this paper, Electric characteristics of ITO sputtered heater were presented in this study, which can be used as a map of heater design in the range of available system temperature. The effects of thermo-physical properties of materials, geometrical structure and boundary condition on the thermal performance are also investigated. Finally, the design of micro-flow induced thermal sensor that is capable of measuring fluid flow with a lower flow detection limit of approximately 24pL/s is presented.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2005.07a
• /
• pp.399-402
• /
• 2005

We have studied the Pixel Isolated Phase Separated Composite Organic Film (PI-PSCOF). The PI-PSCOF can be made by the anisotropic phase separation between Ferroelectric Liquid Crystals and Pre-polymer materials by irradiating the UV with optimizing its intensity and time. In the technology, the FLC molecules are isolated in pixels where FLCs are surrounded by the inter-pixel vertical polymer walls and the horizontal polymer films on the upper substrate. The good merits of this technology are fast response time, and good mechanical and thermal stability against external high pressure and temperature. We will compare the results obtained from FLC, PSCOF, and PI-PSCOF modes by using the electro-optic measurement and x-ray scattering, and mechanical method. We believe that the PI-PSCOF technology can be a best candidate for future Flexible Display Applications.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2005.07a
• /
• pp.453-456
• /
• 2005

Color characteristics of a dark state in the IPS-mode depending on viewing direction have been studied. IPS-mode is having a little variation of $d{\Delta}n$ with viewing angle since the LC rotates in plane. However, this mode shows asymmetric light leakage and color characteristics with viewing angle in a dark state. This drawback can be overcome by optimized retardation value of TAC film, pre-tilt angle & $d{\Delta}n$ of LC.

• Journal of the Semiconductor & Display Technology
• /
• v.4 no.4 s.13
• /
• pp.27-31
• /
• 2005

This article contains the development of FPC bonder that used for repair or trial product. Nowadays, in FPO module process (including PDP) accept the thermo-compress bonding method when attach FPC(Flexible Printed Circuit Board), TCP(Tape Carrier Package) and COF(Chip on the FPC) by ACF(Anisotropic Conductive Film). This system consists of ACF attachment part, pre-bonding part, main bonding part, loading / unloading part. This composition is a stand-alone system, not an in-line system. Hereafter, this composition should be developing into in-line system in all area of FPD industry.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2007.08a
• /
• pp.760-763
• /
• 2007

The properties of carbon nanotube obtained by thermal chemical vapor deposition (CVD) process were investigated as a function of ammonia $(NH_3)$ gas in hydrocarbon gas, Fe catalyst thickness, and growth temperature. Fe catalyst was prepared by DC magnetron sputter and pre-treated with ammonia gas. CNTs were then grown with ammonia-acetylene gas mixture by thermal CVD. The diameter of these CNTs shows a strong correlation with the gas rate, the catalyst film thickness and temperature. From our results, it was found that the factors of grown CNTs positively acted to improve CNT quality.