• Title/Summary/Keyword: Pre-Qualification

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Data Qualification of Optical Emission Spectroscopy Spectra in Resist/Nitride/Oxide Etch: Coupon vs. Whole Wafer Etching

  • Kang, Dong-Hyun;Pak, Soo-Kyung;Park, George O.;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.433-433
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    • 2012
  • As the requirement in patterning geometry continuously shrinks down, the termination of etch process at the exact time became crucial for the success in nano patterning technology. By virtue of real-time optical emission spectroscopy (OES), etch end point detection (EPD) technique continuously develops; however, it also faced with difficulty in low open ratio etching, typically in self aligned contact (SAC) and one cylinder contact (OCS), because of very small amount of optical emission from by-product gas species in the bulk plasma glow discharge. In developing etching process, one may observe that coupon test is being performed. It consumes costs and time for preparing the patterned sample wafers every test in priority, so the coupon wafer test instead of the whole patterned wafer is beneficial for testing and developing etch process condition. We also can observe that etch open area is varied with the number of coupons on a dummy wafer. However, this can be a misleading in OES study. If the coupon wafer test are monitored using OES, we can conjecture the endpoint by experienced method, but considering by data, the materials for residual area by being etched open area are needed to consider. In this research, we compare and analysis the OES data for coupon wafer test results for monitoring about the conditions that the areas except the patterns on the coupon wafers for real-time process monitoring. In this research, we compared two cases, first one is etching the coupon wafers attached on the carrier wafer that is covered by the photoresist, and other case is etching the coupon wafers on the chuck. For comparing the emission intensity, we chose the four chemical species (SiF2, N2, CO, CN), and for comparing the etched profile, measured by scanning electron microscope (SEM). In addition, we adopted the Dynamic Time Warping (DTW) algorithm for analyzing the chose OES data patterns, and analysis the covariance and coefficient for statistical method. After the result, coupon wafers are over-etched for without carrier wafer groups, while with carrier wafer groups are under-etched. And the CN emission intensity has significant difference compare with OES raw data. Based on these results, it necessary to reasonable analysis of the OES data to adopt the pre-data processing and algorithms, and the result will influence the reliability for relation of coupon wafer test and whole wafer test.

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Analysis of ICT skills for problem solving : learning functional & logical abilities in context for pre-service students (문제해결을 위한 ICT 활용 능력 분석 : 문맥 속에서 대학생의 기능 및 논리 능력 학습하기)

  • Lee, Hwa-Hyeon;Im, Yeon-Wook;Lee, Ok-Hwa
    • The Journal of Korean Association of Computer Education
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    • v.9 no.3
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    • pp.85-96
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    • 2006
  • This study analyzes a phenomenon observed in the problem-solving process using ICT that field learners prioritize functional and logical fields. The purpose of this study is to anticipate the future direction of education utilizing ICT and to explore what effort is needed to increase balanced ability of utilizing ICT in the area of education. To analyze the patterns of ICT usage in education, students were asked to solve the problems including functional and logical requests by using the program of framing document. That results were marked in accordance with standards framed in both functional and logical fields. As a result, students utilized the ICT functional field more than logical one. Therefore, we confirm learning through ICT is more effective on functional sides than on logical sides. We also confirm the excellency of ICT's functional sides in such variables as major, grade, computer capability and qualification, etc.

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Improvement Plan for the Payment Standard of Rental Fee in Construction New Technology (건설신기술 사용료 지급기준 개선방안)

  • Park, Hwan-Pyo;Oh, Un-O
    • Korean Journal of Construction Engineering and Management
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    • v.7 no.6
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    • pp.193-201
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    • 2006
  • The Evaluation system of Excellent Construction Technology has been operated for 15 years from 1990 in Korea. 443 technologies have been certified as Excellent Construction Technology(ECT) and those ECTs are adapted over 20,000 times into the construction projects. As a result of investigation, new technology evaluation system became a stable stage because new technology evaluation system has assigned about 433 and also applied more than 20,000 times in construction sites in 2004. However, it was indicated to a large problem that there aren't still detail criteria of cost assessment for using ECTs. Therefore, we analyzed the status and problems of the cost of using ECTs and suggested some useful ideas which are reviewed by various aspects. Specially we suggested specified criteria for the cost assessment of using ECTs. It is based on the scheduled construction cost and determined the rate $({\bullet}{\cdot})$ of using ECTs. To adapt ECTs into construction projects nationwide not only it is very important to certify better new technologies but also it is required to make the criteria of cost assessment for using ECTs.

The Evaluation of Day Care Center In-service Education Program Using the CIPP Evaluation Model (CIPP 평가모형을 적용한 어린이집 보수교육프로그램 평가)

  • Kim, Bo-Hwa
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.2
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    • pp.270-278
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    • 2018
  • A CIPP model-based evaluation of day care centers in-service education was performed to improve the quality of infant teachers. This study covered 203 infant teachers of a day care center located in Chungnam and Daejeon city. The analysis results are summarized as follow. The education situation, such as a suggestion of a target and pre-analysis, was more positive than other evaluation areas, but the education course, which is a personal variable of infant teachers, was found to require modifications in day care center in-service education. Uniform education that does not reflect the characteristics of the individual teacher have limitations to education systematically and effectively. Therefore, it is essential to consider the education environment and to reflect the requirements of the infant teacher. Finally, this study provides basic data for a desirable in-service education and qualification improvement program to improve in-service education through an evaluation of day care center in-service education.

Musculoskeletal Diseases' of the 119 Rescue party's (119 구급대원의 근골격계 질환)

  • Shin, Sang-Yol;Jung, Ji-Yun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.12
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    • pp.6461-6468
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    • 2013
  • This research is conducted to investigate musculoskeletal diseases' that can be developed in paramedics body whose are in charge of emergency situations before they arrive at the hospital. The data were collected from 216 of paramedics from July 2, 2012 to July 31, 2012. As a result, 57.9% of participants have already felt the subjective symptoms of the muscular skeletal diseases, and 47.2% of them felt the pain on their waists and hips. These pains are highly related to their working situations. In the aspects of the muscuoskeletal diseases' symptoms, general characteristics, gender (t=16.579, p=.000), age (t=102.344, p=.000), education (t=5.363, p=.027), drinking (t=6.999, p=.030), and smoking (t=6.266, p=.009), have significance differences. Professional characteristics, career (t=67.684, p=.000), passengers of the ambulance (t=7.717, p=.004), qualification or license (t=25.480, p=.000), and position (t=74.615, p=.000), have also significance differences.

A Study on the Performance Review of the NIVTPD for Vocational Training Teachers Training System in Cameroon (카메룬의 직업훈련교사 양성을 위한 국립직업훈련교육원의 시범연수 성과 검토에 관한 연구)

  • Cho, Hyun-chan;Hwang, Suk;Choi, Seong-joo
    • Journal of Practical Engineering Education
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    • v.11 no.2
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    • pp.251-258
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    • 2019
  • In order to establish the NIVTPD which is only one qualification training institute for vocational training teachers in Cameroon, the research team taught such as curriculum development methods, course materials development, and lecturing methodology for master teachers of NIVTPD. Also we prepared actual operation of NIVTPD by conducting actual lecture through Pilot training. This paper also includes two different surveys (Base-line and End-line surveys) results and two different tests (pre and post-test) results to assess the impact of training gained in NIVTPD on classroom performance. The results of the survey will be used for the improvement of NIVTPD's educational program through identifying the current state of the vocational training interface and integration, modification and improvement of the curriculum. Examination results can also be used as indicators for vocational training teachers' pedagogical knowledge and for future certification.

A Basis Study on the Integrated System for the Evaluation and Public Announcing System of the Contractor's Construction Capacity (시공능력평가 통합시스템 기반구축에 관한 기초연구)

  • Noh, Jae-Yoon;Jun, Young-Joon;Park, Eun-Soo;Lee, Tai-Sik
    • Proceedings of the Korean Institute Of Construction Engineering and Management
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    • 2008.11a
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    • pp.568-571
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    • 2008
  • To help a owner selecting proper contractors about the specified contract, the Evaluation and Public Announcing System of the Contractor's Construction Capacity has been introduced since 1997. But, the system has been done violence to its original meaning and purpose as time went on. When annually announcing the Contractor's Construction Capacity, especially, there was frequently a large range of opinion on the issues. On that account, MLTM(Ministry of Land, Transport and Maritime Affairs) has had to make a alteration to improve those and is making efforts for a constructive policy now. The purpose of this paper is to conduct a basis study on the Integrated System after reflecting points to be considered about improvements and the current of the times.

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Orders Status Analysis on the Successful Bidder Decision Method of Turnkey Alternative Tendering Construction (턴키·대안입찰공사 낙찰자 결정방식에 의한 수주현황 분석)

  • Park, Hong-Tae;Lee, Yang-Kyu
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.33 no.2
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    • pp.771-780
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    • 2013
  • Inspection system which was performed in the past selected the final winning bidder by separating Pre-Qualification, the basic design evaluation and price evaluation. However, turnkey and alternative bidding construction has selected way to determine the successful bidder as the best design and the most low cost method, comprehensive evaluation method (bid price adjustment, design score adjustments, weights standard), the best design and the fixed amount method from january 1, 2010 to the present. Due to these institutional problems, orders institutions were often a way to determine the successful bidder to apply differently for identical or similar construction. Therefore this study winning bidder selection criteria through analysis of construction the number and construction order performance, order performance by work division and institutional orders, the weights bidder order performance and orders status of turnkey alternative tendering construction to civil part performed in domestic.

Analysis of Factors Related to the Students' Satisfaction on 6-year Pharmacy Program and Strategic Planning (6년제 약대 학제시스템 만족도에 영향을 미치는 요인 분석 및 향후 전략)

  • Lee, Heejung;Shim, MiKyong;Ha, Jungeun;Kim, Hyunah;Moon, Hongseop;Kwak, Hyesun;Choi, Kyungeob
    • Korean Journal of Clinical Pharmacy
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    • v.24 no.4
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    • pp.288-295
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    • 2014
  • Background: The pharmacy education system in South Korea has changed from four-year degree program to two-year pre-pharmacy program plus four-year professional degree program (a total of six years) since 2009. Objectives: The purpose of this study is to assess final year student's satisfaction on this new pharmacy education system and to explore factors related to student satisfaction. Methods: A paper-and-pencil survey instrument was administered to all final year pharmacy students at four universities located in South Korea during September of 2014. The self-administered questionnaire contained 39 items. In part 1, the quality of education with regards to school utilities, education system, human resources, and communication domains were measured. In part 2, overall satisfactions with the new education system were asked to students. Responses were recorded on a seven point Likert scale. Results: A total of 207 students were participated in this study. Students showed low satisfaction on school utilities and standardization of education while they displayed high level of satisfaction on the quality of the faculty members and preceptors at clerkship sites. Factor analysis showed that education service was the most significant factor that affects students' satisfaction followed by facilities, standardized education, communication, administration, pharmacy practice (p<0.05). Conclusion: The qualification of faculty and preceptors ranked number one in students' satisfaction and it was the most significant factor. School facilities were found to be the second most significant factor in students' satisfaction while students displayed poor satisfaction. The study results might need to be reflected in future education planning to improve students' satisfaction.

Considering Performance Measurement and Life-Cycle Costs for Andong Culture & Art Center BTL Project (VE기법을 적용한 안동문화예술회관 민간투자사업의 성능개선 사례연구)

  • Kim, Seong-Il;Lee, Kwang-Mo;Choi, Seok-Won
    • Proceedings of the Korean Institute Of Construction Engineering and Management
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    • 2007.11a
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    • pp.1005-1010
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    • 2007
  • According to revision of Construction Technology Management Act (2005), the government ordering construction which cost is more than 10billion won should investigate the value engineering(VE) of a construction. In this sense, the government actively promote plans in 2008 after identifying the examining standards of the investigation on the VE(2007). It is substantial issue to introduce Pre-Qualification(PQ) in oder to restrain unlicensed VE consulting companies or VE consultants. This system will contribute to the quality and the settlement of the value engineering in our country. The reason why the Korea VE Society founded in 2006 is one of the afore-mentioned reasons. Therefore, we try to establish the value engineering of Build-Transfer-Lease Scheme by providing the practical application of construction value engineering and definite procedures through the example of Andong Culture and Art Center's research in one of the various construction fields.

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