• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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• pp.20-23
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• 2004

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing(CMP) process was required for the global planarization of inter-metal dielectric(IMD) layer with free-defect. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Chemical-Mechanical polishing(CMP) of conductors is a key process in Damascene patterning of advanced interconnect structure. The effect of alternative commercial slurries pads, and post-CMP cleaning alternatives are discuss, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. Electroplated copper deposition is a mature process from a historical point of view, but a very young process from a CMP perspective. While copper electro deposition has been used and studied for decades, its application to Cu damascene wafer processing is only now gaining complete acceptance in the semiconductor industry. The polishing mechanism of Cu-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. however it is important to understand the effect of oxidizer on copper passivation layer in order to obtain higher removal rate and non-uniformity during Cu-CMP process. In this paper, we investigated the effects of oxidizer on Cu-CMP process regarding the additional volume of oxidizer.

• 한국재료학회지
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• 제29권8호
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• pp.483-490
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• 2019

Currently, the Korean nuclear industry uses ZIRLO as material for nuclear fuel cladding(zirconium alloy). KEPCO Nuclear Fuel is in the process of developing a HANA alloy to enable domestic production of cladding. Cladding manufacture involves multistage heat treatments and pickling processes, the latter of which is vital for the removal of defects and impurities on the cladding surface. SMUT that forms on the cladding surface during such pickling process is a source of surface defects during heat treatment and post-treatment processes if not removed. This study analyzes ZIRLO, HANA-4, and HANA-6 alloy claddings to extensively study the SEM/EDS, XRD, and particle size characteristics of SMUT, which are second phase particles that are formed on the cladding surface during pickling processes. Using the analysis results, this study observes SMUT formation characteristics according to Nb concentration in Zr alloys during the washing process following the pickling process. In addition, this study observes SMUT removal characteristics on cladding surfaces according to concentrations of nitric acid and hydrofluoric acid in the acid solution.

• Journal of Electrochemical Science and Technology
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• 제13권1호
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• pp.1-18
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• 2022

Persistent organic pollutants (POPs) and emerging pollutants (EP) are characterized by their difficulty to be removed through biological oxidation processes (BOPs); they persist in the environment and could have adverse effects on the aquatic ecosystem and human health. The electro-oxidation (EO) process has been successfully used as an alternative technique to oxidize many kinds of the aforementioned pollutants in wastewater. However, the EO process has been criticized for its high energy consumption cost and its potential generation of by-products. In order to decrease these drawbacks, its combination with biological oxidation processes has been reported as a solution to reduce costs and to reach high rates of recalcitrant pollutants removal from wastewaters. Thus, the location of EO in the treatment line is an important decision to make, since this decision affects the formation of by-products and biodegradability enhancement. This paper reviews the advantages and disadvantages of EO as a pre and post-treatment in combination with BOPs. A perspective of the EO scale-up is also presented, where hydrodynamics and the relationship of A/V (area of the electrode/working volume of the electrochemical cell) experiments are examined and discussed.

• 구강회복응용과학지
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• 제31권2호
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• pp.75-85
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• 2015

목적: 이번 연구의 목적은 FRC-포스트와 코어가 색상차이에 따라 구별되는 정도를 비교하는 것이다. 연구 재료 및 방법: 실험을 위해 유사한 크기(${\pm}0.5 mm$)와 길이(${\pm}0.5 mm$)의 발치 한 하악 소구치 9개를 근관 형성하고 충전하였다. 3개의 치근을 체온을 재현하기 위해 $37^{\circ}C$ 물이 흐르는 가는 실리콘 튜브로 감은 후 cold mounting resin에 매몰하여 각 3개의 치근이 매몰된 총 3개의 시편을 제작하였다. 개개의 시편 치근에는 3종류의 $Snowpost^{(R)}$, MACRO-$LOCK^{TM}$ POST $ILLUSION^{TM}$ $XRO^{(R)}$, FRC $Postec^{(R)}$ Plus post를 이용하여 각각의 포스트에 맞게 공간을 형성하고 포스트를 접착하였다. 3개의 시편 별로 $Luxacore^{(R)}$ Dual Blue, $Luxacore^{(R)}$ Dual A3 및 $Filtek^{TM}$ Z350 XT A1E로 코어를 축조, 시편 별로 다른 코어를 사용하였다. 각 시편에 대해 온도를 낮추기 위한 압축공기를 불 때와 안 불 때로 나누어 디지털 이미지를 촬영하였다. 치과의사 50명과 치과대학 대학생 50명 총 100명에게 어떤 포스트가 코어와 가장 구별이 잘되는 지를 설문조사 하였다. 결과: $Luxacore^{(R)}$ Dual Blue에서는 $Snowpost^{(R)}$가, $Luxacore^{(R)}$ Dual A3에서는 $Snowpost^{(R)}$가, $Filtek^{TM}$ Z350 A1E에서는 MACRO-$LOCK^{TM}$ POST $ILLUSION^{TM}$ $XRO^{(R)}$가 구별이 가장 잘되었다. 압축공기를 불어 온도를 내리면 나타나는 MACRO-$LOCK^{TM}$ $ILLUSION^{TM}$ $XRO^{(R)}$의 색은 포스트와 코어의 구별을 더 용이하게 하였다. 결론: FRC-포스트와 복합레진 코어가 구별되는 정도는 색상차이에 따라 다름을 알 수 있었다.

• Maxillofacial Plastic and Reconstructive Surgery
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• 제23권1호
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• pp.31-39
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• 2001

The purpose of this study is to reveal the factors leading to the problem of unilateral condylar fractures and suggest a treatment guideline of treatment for good prognosis in surgical treatment. The factors can be age, sex, fracture site, degree of displacement, posterior occlusion loss, post-operative alteration of condylar head position, post-operative condylar head resorption, and maxillomandibular fixation period. One hundred and eleven patients with unilateral condylar fractures, who were treated by surgical method from 1990 Feb. to 2000 Feb., were studied. Minimum follow-up period was 6 months. The results were as follows ; 1. In the age group of $41{\sim}60$, females had significantly higher complication rate than males, therefore we must be careful about treatment of female in this age group 2. In level I fractures of the mandibular condyle, because there were abundant complications when the patients were treated with fragment removal, conservative treatment is recommended over the surgical approach. 3. There were no differences in the complication rate, in the level II, III fractures. but were severe complications in the cases of patients treated by Dr.Nam's method or fragment removal. Therefore, open reduction and internal fixation is recommended over Dr.Nam's method or fragment removal. 4. In level IV fractures, open reduction and internal fixation is recommended 5. Although there was a higher complication rate depending on the degree of deviation, there was no correlation between the degree of deviation and development of complications in each level of fracture 6. Because the complication rate was higher in cases of condylar resorption, vertical dimension loss, and alteration of condylar head position, we must make an effort to prevent such complications during treatment

• 한국전기전자재료학회논문지
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• 제24권1호
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• pp.17-21
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• 2011

Copper (Cu) had been attractive material due to its superior properties comparing to other metals such as aluminum or tungsten and considered as the best metal which can replace them as an interconnect metal in integrated circuits. CMP (Chemical Mechanical Polishing) technology enabled the production of excellent local and global planarization of microelectronic materials, which allow high resolution of photolithography process. Cu CMP is a complex removal process performed by chemical reaction and mechanical abrasion, which can make defects of its own such as a scratch, particle and dishing. The abrasive particles remain on the Cu surface, and become contaminations to make device yield and performance deteriorate. To remove the particle, buffing cleaning method used in post-CMP cleaning and buffing is the one of the most effective physical cleaning process. AE(Acoustic Emission) sensor was used to detect dynamic friction during the buffing process. When polishing is started, the sensor starts to be loaded and produces an electrical charge that is directly proportional to the applied force. Cleaning efficiency of Cu surface were measured by FE-SEM and AFM during the buffing process. The experimental result showed that particles removed with buffing process, it is possible to detect the particle removal efficiency through obtained signal by the AE sensor.

• 대순사상논총
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• 제25_2집
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• pp.103-136
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• 2015

The theory of post-heaven provided Korea's many emerging national religions with spiritual ground. The I Ching originated in China emphasizes the principles of change or static aspects of world, while Right I Ching, which Il-Bu Kim suggested, underlines dynamic aspects of world. Il-Bu Kim is perceived to open a new stage in the history of philosophy of I Ching in this regard. His most remarkable contribution is the view of Great Opening Era of Post-Heaven, according to which the clock of cosmos shows the era of great change from Pre-Heaven to Post-Heaven and in the world of Post-Heaven everything will take its proper place. As to human society, Il-Bu Kim foresaw the change from disharmony to harmony, imbalance to balance and era of xiaoren to that of junzi. The advent of such a new world, however, asks human's moral revolution as a prerequisite. In the tradition of East Asian thought, human is the center of the Samjae, Heaven-Earth-Human and the only being which could participate in the growth of Heaven and Earth. Without the change of human mind, however, human can neither participate in the growth of Heaven and Earth nor expect the right change of Heaven and Earth. Even though the world of nature changes according to the principle of cosmic harmony, as the Right I Ching predicts, the real change of Heaven and Earth can be achieved only with moral change of human. The human in the Right I Ching is a free man who sticks to nothing and communicates with cosmos with empty mind. This is the very image of perfect man(至人). The perfect man in the Right I Ching is the main agent of everything, that's to say, the main agent of the great opening to Post-Heaven Era. This is the reason why most leaders of Koran emerging religions concentrate on the change of human. In this regard, Jeung-San Kang encouraged people to become the perfect man through the purification of mind and body and the great opening of inner man, depending on the metaphysical principle of the Right I Ching. Cheok and Resolution of grievances for the mutual beneficence of all life are what he suggested as a method of the great opening of inner man. Such a view is based on the thought that the accumulated sinful behaviors are obstacles to cosmic change and the time of mutual beneficience opens with the removal of the obstacles. If such religious practices are so effective, as Jeung-San Kang says, that future world could consist of perfect men who have achived the great opening of inner man, moral change, and change of consciousness, we could expect that the activities of xiaoren will be shrinked and junzi will be welcomed, as the Right I Ching predicts.

• 생명과학회지
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• 제19권3호
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• pp.373-377
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• 2009

환경시료에서 많이 분리되는 장내바이러스 중 폴리오바이러스, 콕사키바이러스, 에코바이러스를 이용하여 정수처리 공정별 제거율을 조사하였다. 양성 시료로 사용된 바이러스들의 회수율은 72-108%의 범위로 나타났다. 이들 3종 바이러스들을 대상으로 정수처리공정별 제거효율을 조사한 결과 약 99%의 바이러스가 침전단계에서 제거되어졌고, 후오존과 BAC 여과과정을 거치면서 100% 제거되어짐을 확인할 수 있었다. 6개의 세포주를 사용하여 바이러스별 감수성을 조사한 결과 폴리오바이러스는 BGMK 세포주, 콕사키바이러스는 Vero 및 BGMK 세포주가 다른 세포주에 비해 높은 감수성을 나타내었고, 반면 에코바이러스는 RD 세포주에서 가장 분리가 용이하였다.

• Membrane and Water Treatment
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• 제11권4호
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• pp.257-274
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• 2020

There are many previous review articles are available to summarize either the characterization methods of effluent organic matter (EfOM) or the individual control treatment options. However, there has been no attempt made to compare in parallel the physicochemical treatment options that target the removal of EfOM from biological treatments. This review deals with the recent progress on the characterization of EfOM and the novel technologies developed for EfOM treatment. Based on the publications after 2010, the advantages and the limitations of several popularly used analytical tools are discussed for EfOM characterization, which include UV-visible and fluorescence spectroscopy, Fourier transform infrared spectroscopy (FTIR), size exclusion chromatography (SEC), and Fourier transform-ion cyclotron resonance-mass spectrometry (FT-ICR-MS). It is a recent trend to combine an SEC system with various types of detectors, because it can successfully track the chemical/functional composition of EfOM, which varies across a continuum of different molecular sizes. FT-ICR-MS is the most powerful tool to detect EfOM at molecular levels. However, it is noted that this method has rarely been utilized to understand the changes of EfOM in pre-treatment or post-treatment systems. Although membrane filtration is still the preferred method to treat EfOM before its discharge due to its high separation selectivity, the minimum requirements for additional chemicals, the ease of scaling up, and the continuous operation, recent advances in ion exchange and advanced oxidation processes are greatly noteworthy. Recent progress in the non-membrane technologies, which are based on novel materials, are expected to enhance the removal efficiency of EfOM and even make it feasible to selectively remove undesirable fractions/compounds from bulk EfOM.

• 산업기술연구
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• 제18권
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• pp.249-258
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• 1998

In this paper, we investigated the post-combustion removal of nitrogen oxide($NO_x$) and sulfur oxide($SO_x$) which is based on the gas to particle conversion process by the pulsed corona discharge. Under normal pressure, the pulsed corona discharge produces the energetic free electrons which dissociate gas molecules to form the active radicals. These radicals cause the chemical reactions that convert $SO_x$ and $NO_x$ into acid mists and these mists react with $NH_3$ to form solid particles. Those particles can be removed from the gas stream by conventional devices such as electrostatic precipitator or bag filter. The reactor geometry was coaxial with an inner wire discharge electrode and an outer ground electrode wrapped on a glass tube. The simulated flue gas with $SO_x$ and $NO_x$ was used in the experiment. The corona discharge reactor was more efficient in removing $SO_x$ and $NO_x$ by adding $NH_3$ and $H_2O$ in the gas stream. We also measured the removal efficiency of $SO_x$ and $NO_x$ in a cylinder type corona discharge reactor and obtained more than 90 % of removal efficiency in these experimental conditions. The effects of process variables such as the inlet concentrations of $SO_x$, $NH_3$ and $H_2O$, residence time, pulse frequencies and applied voltages were investigated.