Particle Removal on Buffing Process After Copper CMP |
Shin, Woon-Ki
(Graduate School of Mechanical Engineering, Pusan National University)
Park, Sun-Joon (Graduate School of Mechanical Engineering, Pusan National University) Lee, Hyun-Seop (Graduate School of Mechanical Engineering, Pusan National University) Jeong, Moon-Ki (Graduate School of Mechanical Engineering, Pusan National University) Lee, Young-Kyun (Graduate School of Mechanical Engineering, Pusan National University) Lee, Ho-Jun (Graduate School of Mechanical Engineering, Pusan National University) Kim, Young-Min (Graduate School of Mechanical Engineering, Pusan National University) Cho, Han-Chul (NSF Nanoscale Science & Engineering Center) Joo, Suk-Bae (Department of Mechanical Engineering, Texas A&M University) Jeong, Hae-Do (Graduate School of Mechanical Engineering, Pusan National University) |
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