• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.169-169
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• 2010

As display industry requires various applications for future display technology, which can guarantees high level of flexibility and transparency on display panel, oxide semiconductor materials are regarded as one of the best candidates. $InGaZnO_4$(IGZO) has gathered much attention as a post-transition metal oxide used in active layer in thin-film transistor. Due to its high mobility fabricated at low temperature fabrication process, which is proper for application to display backplanes and use in flexible and/or transparent electronics. Electrical performance of amorphous oxide semiconductors depends on the resistance of the interface between source/drain metal contact and active layer. It is also affected by sheet resistance on IGZO thin film. Controlling contact/sheet resistance has been a hot issue for improving electrical properties of AOS(Amorphous oxide semiconductor). To overcome this problem, post-annealing has been introduced. In other words, through post-annealing process, saturation mobility, on/off ratio, drain current of the device all increase. In this research, we studied on the relation between device's resistance and post-annealing temperature. So far as many post-annealing effects have been reported, this research especially analyzed the change of electrical properties by increasing post-annealing temperature. We fabricated 6 main samples. After a-IGZO deposition, Samples were post-annealed in 5 different temperatures; as-deposited, $100^{\circ}C$, $200^{\circ}C$, $300^{\circ}C$, $400^{\circ}C$ and $500^{\circ}C$. Metal deposition was done on these samples by using Mo through E-beam evaporation. For analysis, three analysis methods were used; IV-characteristics by probe station, surface roughness by AFM, metal oxidation by FE-SEM. Experimental results say that contact resistance increased because of the metal oxidation on metal contact and rough surface of a-IGZO layer. we can suggest some of the possible solutions to overcome resistance effect for the improvement of TFT electrical performances.

• 한국초전도ㆍ저온공학회논문지
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• 제24권4호
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• pp.40-45
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• 2022

The electrical/thermal stabilities and magnetic field controllability of a no-insulation (NI) high-temperature superconducting magnet are characterized by contact resistance between turn-to-turn layers, and the contact resistance characteristics are determined by properties of conductor surface and winding tension. In order to accurately predict the electromagnetic characteristics of the NI coil in a design stage, it is necessary to control the contact resistance characteristics within the design target parameters. In this paper, the contact resistance and critical current characteristics of a rare-earth barium copper oxide (REBCO) conductor were measured to analyze the effects of surface treatment conditions (roughness and oxidation level) of the copper stabilizer layer in REBCO conductor. The test samples with different surface roughness and oxidation levels were fabricated and conductor surface analysis was performed using scanning electron microscope, alpha step surface profiler and energy dispersive X-ray spectroscopy. Moreover, the contact resistance and critical current characteristics of the samples were measured using the four-terminal method in a liquid nitrogen impregnated cooling environment. Compared with as-received REBCO conductor sample, the contact resistance values of the REBCO conductors, which were post-treated by the scratch and oxidation of the surface of the copper stabilizer layer, tended to increase, and the critical current values were decreased under certain roughness and oxidation conditions.

• Asian-Australasian Journal of Animal Sciences
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• 제25권12호
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• pp.1775-1779
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• 2012

The aim of the present work was to investigate how colour changes of foal meat can vary after thawing out in relation to the slaughtering age of the horses and to the post-thawing time. Eighteen Italian Heavy Draught Horse (IHDH) foals were used for the trial. They were subdivided in three groups according to their slaughtering age (6, 11 and 18 months). Two different surfaces were investigated for each sample: a fresh cut surface (daily renewed cutting surface: DRCS), and not-renewed cutting surface (NRCS). The redness of both investigated surfaces increased with slaughtering age (p<0.01). Moreover, this parameter decreased during post-thawing time (p<0.01) only on the NRCS, probably due to the myoglobin oxidation processes. Colour is an important visual cue denoting perceived quality by consumers. So, by a chromatic perspective the thawed meat of IHDH foals slaughtered at 6 and 11 months proved to be that which best meets the market requirements.

• Nuclear Engineering and Technology
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• 제30권5호
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• pp.396-402
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• 1998

Experiments on the steamside corrosion and hydrogen pick-up of Zircaloy-4 under high pressure up to 10.3MPa are carried out to estimate the pressure effects on the kinetics. Temperature and reaction time are determined to be 37$0^{\circ}C$ and 72hours for the pre-transition test and $700^{\circ}C$ and 210minutes for the post-transition test, respectively. Results show that under 10.3MPa pressure the oxidation reaction is 50% and 100% enhanced in the pre-and the post-transition regime, respectively. Total amount of hydrogen uptake in the reaction is proportionally increased as corrosion weight gain is elevated. However, pick-up fraction is not affected by the high pressure. The fraction is almost twice greater than that in the waterside corrosion. Edges in the specimens play a certain role in the enhancement, especially in the post-transition regime. To identify physical property changes of oxide film such as micro-cracks or micro-pores, careful and thorough examination must be needed with some special techniques.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2009년도 추계학술대회 논문집
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• pp.429-432
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• 2009

The influence of the subsequent-annealing (SA) treatment on plasma electrolytic oxidation (PEO)-treated Mg-based alloy was investigated and the dependence of the dehydration reaction on the SA temperature was also studied. For this purpose, a series of the SA treatments were carried out on the coated samples at two different temperatures, i.e. 423 and 523 K for 10 h. In contrast to the sample without SA treatment, the sample annealed at 523 K exhibited a significant difference in term of surface morphology since the MgO content in the oxide layer increased with increasing SA temperature. With increasing SA temperature, the dehydration of $Mg(OH)_2$ led to the increase in the relative amount of the MgO, which was a hard phase. From the nano-indentation results, the applied loads of the samples were seen to increase as SA temperature increased. However, the corrosion resistance of the sample annealed at 423 K was higher than that of the samples annealed at 523 K.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2009년도 추계학술대회 논문집
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• pp.217-220
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• 2009

This paper presents fabrication method of nano-structured PMMA substrates as well as evaluations of their optical transmittance. For anti-reflective surface, surface coating method had been conventionally used. However, it requires high cost, complicated process and post-processing times. In this study, we suggested the fabrication method of anti-reflective surface by the hot embossing process. Using the nano patterned master fabricated by anodic aluminum oxidation process. Anodic aluminum oxide(AAO) is widely used as templates or a molds for various applications such as carbon nano tube (CNT), nano rod and nano dots. Anodic aluminum oxidation process provides highly ordered regular nano-structures on the large area, while conventional pattering methods such as E-beam and FIB can fabricate arbitrary nano-structures on small area. We fabricated a porous alumina hole array with various inter-pore distance and pore diameter. In order to replicate nano-structures using alumina nano hole array patterns, we have carried out hot-embossing process with PMMA substrates. Finally the nano-structured PMMA substrates were fabricated and their optical transmittances were measured in order to evaluate the charateristivs of anti-reflection. Anti-reflective structure can be applied to various displays and automobile components.

• 한국전기전자재료학회논문지
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• 제19권12호
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• pp.1078-1084
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• 2006

Impurity contamination induced by $CF_4\;and\;HBr/Cl_2/O_2$ plasma etching on Si surface was examined by using surface spectroscopes. XPS(x-ray photoelectron spectroscopy) surface analysis showed that F of 0.4 at % exists in the surface layer in the form of Si-F bonding but Br and Cl are below the detection limit $(0.1{\sim}1.0%)$ of the spectroscope. Static-SIMS(secondary ion mass spectrometry) surface analysis showed that the etched Si surface was contaminated with etching gas elements such as H, F, Cl and Br, and they existed to the depth of about $20{\sim}40nm$. The etched Si surface was treated with three different methods that were HF dip, thermal oxidation followed by HF dip and oxygen-plasma oxidation followed by HF dip. They showed an effect in reducing the impurity contamination and the oxygen-plasma oxidation followed by HF dipping method appears to be a little bit more effective.

• Korean Chemical Engineering Research
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• 제53권2호
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• pp.216-223
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• 2015

The present work explores the potential of wet air oxidation (WAO) for pretreatment of mixed lignocellulosic biomass to enhance enzymatic convertibility. Rice husk and wheat straw mixture (1:1 mass ratio) was used as a model mixed lignocellulosic biomass. Post-WAO treatment, cellulose recovery in the solid fraction was in the range of 86% to 99%, accompanied by a significant increase in enzymatic hydrolysis of cellulose present in the solid fraction. The highest enzymatic conversion efficiency, 63% (by weight), was achieved for the mixed biomass pretreated at $195^{\circ}C$, 5 bar, 10 minutes compared to only 19% in the untreated biomass. The pretreatment under the aforesaid condition also facilitated 52% lignin removal and 67% hemicellulose solubilization. A statistical design of experiments on WAO process conditions was conducted to understand the effect of process parameters on pretreatment, and the predicted responses were found to be in close agreement with the experimental data. Enzymatic hydrolysis experiments with WAO liquid fraction as diluent showed favorable results with sugar enhancement up to $10.4gL^{-1}$.

• 한국표면공학회지
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• 제31권5호
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• pp.237-244
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• 1998

In this stydy, submicron shallow trenches applied to STI(shallow tench isolation) were etched using inductively coupled $CI_2$/HBr and $CI_2/N_2$plasmas and the physical and electrical defects remaining on the etched silicon trench surfaces and the effects of various annealing and oxidation on the removal of the defects were studied. Using high resolution electron microscopy(HRTEM), Physical defects were investigated on the silicon trench surfaces etched in both 90%$CI_2$/ 10%$N_2$ and 50%$CI_2$/50%HBr. Among the areas in the tench such as trench bottom, bottom edge, and sidewall, the most dense defects were found near the trench bottom edge, and the least dense defects were found near the trench bottom edge, and least dense defects compared to that etched with ment as well as hydrogen permeation. Thermal oxidation of 200$\AA$ atthe temperature up to $1100^{\circ}C$apprars not to remove the defects formed on the etched silicon trenches for both of the etch conditions. To remove the physicall defects, an annealing treatment at the temperature high than $1000^{\circ}C$ in N for30minutes was required. Electrical defects measured using a capacitance-voltage technique showed the reduction of the defects with increasing annealing temperature, and the trends were similar to the results on the physical defects obtained using transmission electron microscopy.

• 한국표면공학회지
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• 제52권2호
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• pp.96-102
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• 2019

Magnesium and its alloys are prone to be corroded, thus surface treatments improving corrosion resistance are always required for practical applications. As a surface treatment of magnesium alloys, plasma electrolytic oxidation (PEO), creating porous stable oxide layer by a high voltage discharge in electrolyte, enhances the corrosion resistance. However, due to superhydrophilicity of the porous oxide layer, which easily allow the penetration of corrosive media toward magnesium alloys substrate, post-treatments inhibiting the transfer of corrosive media in porous oxide layer are required. In this work, we employed a hydrophobizing method to enhance the corrosion resistance of PEO treated Mg alloy. Three types of hydrophobizing techniques were used for PEO layer. Thin Teflon coating with solvent evaporation, self-assembled monolayer (SAM) coating of octadecyltrichlorosilane (OTS) based on solution method and SAM coating of perfluorodecyltrichlorosilane (FDTS) based on vacuum method significantly enhances corrosion resistance of PEO treated Mg alloy with reducing the contact of water on the surface. In particular, the vacuum based FDTS coating on PEO layer shows the most effective hydrophobicity with the highest corrosion resistance.