• 한국정밀공학회지
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• 제26권5호
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• pp.33-40
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• 2009

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.217-217
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• 2003

• 한국정밀공학회지
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• 제20권5호
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• pp.22-28
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• 2003

• 한국정밀공학회지
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• 제12권7호
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• pp.26-31
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• 1995

A new actuating mechanism suitable for a micro positioning device is developed using piezo-electric elements. The actuator can make a step movement of 0.5 .mu. m up to 3.5 .mu. m. The step size can be adjusted on demand. By repeating this step action, long distance movement is achieved. Precise positioning can be obtained by combining the coarse motion with the maximum step size and fine motion. Two types of fine motion have been proposed for a driving method. Firstly, feedback control bases on PID is applied. The experimental results for the two method are presented.

• 한국생산제조학회지
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• 제22권6호
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• pp.982-988
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• 2013

With conventional positioning apparatus, it is very difficult to simultaneously achieve the desired driving range and precision at the sub-micrometer level. Generally, lead screw and friction drive, etc., have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.40-45
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• 2008

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.

• 한국정밀공학회지
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• 제19권3호
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• pp.137-143
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• 2002

This paper presents the In-process compensation to control cutter runout and improve the machined surface quality. Cutter runout compensation system consists of the micro-positioning servo system with piezoelectric actuator which is embeded in the sliding table to manipulate radial depth of cut in real-time. Cutting force feedback control was proposed in the angle domain based upon repetitive learning control strategy to eliminate chip load variation in end milling process. Micro-positioning control due to adaptive actuation force response improves the machined surface quality by compensation runout effect induced cutting force variation. This result will provide lots of information to build-up the preciswion machining technology.

• 한국정밀공학회지
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• 제6권3호
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• pp.32-45
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• 1989

The positioning accuracy of robots depends upon a forward kinematics which relates the joint variables to the orientation and position of the robot extremity in the absolute coordinate system. The relationship between two connective joint coordi- nates of a robot, which is the basis of the kinematics, is defined by 4 Denavit-Hartenberg parameters. But manufacturing errors in machining and assembly process of robots lead to disctrepancies between the design parameters and the physical structure. Thus, improving the positioning accuracy of robots reguires the identification of the actual link parameters of each robot. In this study, the least-squares method is used to calibrate the link parameters and off-line parameter calibration software is developed. Computer simulation is done to study the dependence of the calibration performance upon the DOF of the robot and number of acquired data set used in the least-squares method. 3 DOF Robot/Controller and specially designed 3D coordinate measurer is made and experiment is carried out to verify the theoretical and computational analysis.

• 한국정밀공학회지
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• 제15권1호
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• pp.60-68
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• 1998

Parallel link manipulators have an ability of more precise positioning than serial open-loop manipulators. However. general parallel link manipulators have been restricted to the real applications since they have limited workspace due to interference among actuators. In this study, we suggest a closed-loop manipulator with 6 degrees-of-freedom and with enlarged workspace. It consists of two parts for minimizing the interference among actuators. One part is lower structure with planar 3 degrees-of-freedom and the other is upper one with spatial 3 degrees-of-freedom. Forward kinematics and inverse kinematics are solved, research about singularity points are carried out and workspace is evaluated. The comparison of workspace between Stewart platform, which is the typical parallel link manipulator, and the suggested manipulator shows that the workspace of the latter is wider than that of the former. Especially, simulation results also show that the suggested manipulator is more suitable when there needs rotation in the end-effector.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.977-981
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• 2000

Direct drive linear motors have large potential for use as high speed machine tool feed units since they can increase machining rates and improve servo accuracy by eliminating gear related machining problems. So, in this paper, characteristic of 2-axis linear motor feed unit are studied and control gain are adjusted considering positioning, velocity, acceleration and static stiffness. We confirm linear motor feed unit are affected value of control gain sensitively, because drive directly. From the experiment, this feed unit has l${\mu}{\textrm}{m}$ micro step resolution, 5.7${\mu}{\textrm}{m}$ positioning accuracy and under 60${\mu}{\textrm}{m}$ circularity.