• 한국정밀공학회지
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• 제21권12호
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• pp.174-181
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• 2004

Ultra precision positioning mechanism has widely been used on semiconductor manufacturing equipments, optical spectrum analyzer and cell manipulations. Ultra precision positioning mechanism is consisted of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design, analysis and manufacture all of the inchworm linear motor system, which is one of the equipments embodied in ultra precision positioning mechanism. Inchworm linear motor system is consisted of a controller system and an inchworm linear motor, and its driving form is similar to a motion of spanworm. A design and manufacture of inchworm linear motor, which is consisted of three PZT actuators, a rod, two columns and a guide plate, are performed. Minimizing the von-Mises stress of the hinge using Taguchi method and simulation by FEM software optimizes the structural design in a column of flexure hinge. The designed columns and guide plates are manufactured by a W-EDM and NC-milling. A controller system, which is an apparatus to drive inchworm linear motor, can easily adjust driving conditions by varying resonance frequency and input-output voltage of actuators and amplifiers. The performance of manufactured inchworm linear motor system is verified and valuated. In the future, inchworm linear motor system will be used to make a more precision positioning by reinforcing a sensor and feedback system.

• 한국생산제조학회지
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• 제22권6호
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• pp.982-988
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• 2013

With conventional positioning apparatus, it is very difficult to simultaneously achieve the desired driving range and precision at the sub-micrometer level. Generally, lead screw and friction drive, etc., have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.51-54
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• 2008

A novel stereolithography method using evanescent light has been proposed as a means to realize 100-nanometer resolution. An in-process measurement system with high accuracy has been introduced to the nanostereolithography apparatus. Specifically, an optical microscopic system was developed to monitor the exposure process and a confocal positioning system was established to improve the longitudinal positioning accuracy in the layer-by-layer process. A high-power objective lens, a tube lens, and a charge coupled device (CCD) were included in the optical microscopic system, whereas a laser, a high-power objective lens, a piezoelectric (PZT) stage, a condenser lens, a pinhole, and a photomultiplier (PMT) made up the confocal microscopic system. Two verification experiments were conducted, and the results indicated that the optical microscopic system had a horizontal resolution of 200 nm and that the confocal positioning system provided a depth resolution of 30.8 nm. These results indicate that nanostereolithography can be successfully performed with this system.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 C
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• pp.1425-1427
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• 1995

The effect of the magnetic flux interference between the driving and detecting unit of the gyroscope by the electromagnetic force has been investigated quantitatively. The key parameter dictating the output characteristics of the gyroscope which is driven and detected using electromagnetic force is the mutual interference between the driving and detecting unit. Using the specially designed apparatus for positioning of the detecting unit, it is found that the vertical positioning of the detecting unit plays a significant role in minimizing the interference effect as evidenced by our experimental results.

• 대한의용생체공학회:의공학회지
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• 제44권2호
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• pp.125-138
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• 2023

The development of AI systems for radiation therapy is important to improve the accuracy, effectiveness, and safety of cancer treatment. The current system has the disadvantage of monitoring patients using CCTV, which can cause errors and mistakes in the treatment process, which can lead to misalignment of radiation. Developed the PMRP system, an AI automation system that uses depth cameras to measure patient's fine movements, segment patient's body into parts, align Z values of depth cameras with Z values, and transmit measured feedback to positioning devices in real time, monitoring errors and treatments. The need for such a system began because the CCTV visual monitoring system could not detect fine movements, Z-direction movements, and body part movements, hindering improvement of radiation therapy performance and increasing the risk of side effects in normal tissues. This study could provide the development of a field of radiotherapy that lags in many parts of the world, along with the economic and social importance of developing an independent platform for radiotherapy devices. This study verified its effectiveness and efficiency with data through phantom experiments, and future studies aim to help improve treatment performance by improving the posture correction mechanism and correcting left and right up and down movements in real time.

• 한국공작기계학회논문집
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• 제14권6호
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• pp.88-94
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• 2005

A swirl ratio of a charge in the cylinder could be calculated by measuring both the rotary speed of paddle and the intake air flow rate in the swirl measurement apparatus fur several positions of valve lift. The automation of the swirl ratio measurement for a cylinder head is achieved by controlling both the valve lift of cylinder head and a suction pressure of the surge tank, instead of controlling them manually. PID control of the surge tank pressure and positioning a valve lift of the cylinder head are also achieved by using two step motors, respectively. Rotating speed of a paddle are measured using an optical sensor and a counter. Flow rate are measured from ISA 1932 flow nozzle by reading a differential pressure gauge position using IEEE-1394 camera. Time to measure the swirl ratio for a port in the cylinder head is drastically reduced from an hour to 3 minutes by automation control of the apparatus.

• 한국전기전자재료학회논문지
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• 제20권10호
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• pp.907-911
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• 2007

This paper dealt with the frequency spectrum analysis of acoustic signal produced by partial discharge (PD) in insulation oil and the positioning of PD occurrence to apply in diagnosis of oil insulated transformers. Three types of electrode system ; the needle-plane, the plane-plane, and the wire-wire structure were assembled to simulate partial discharges in oil insulated transformers. A low-noise amplifier and a decoupling circuit were designed to detect acoustic signal with high sensitivity The frequency spectrum of the acoustic signal were 50 kHz ${\sim}$ 260 kHz in the needle-plane, 50 kHz ${\sim}$ 250 kHz in the plane-plane, and 45 kHz${\sim}$195 kHz in the wire-wire electrode system. Their peak frequencies were 145 kHz, 130 kHz and 114 kHz, respectively The position of PD occurrence was calculated by the time difference of arrival (TOA) using three acoustic emission (AE) sensors, and we could find the position within the error of 1 % in the experimental apparatus.

• 한국기계가공학회지
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• 제12권1호
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• pp.97-103
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• 2013

A new precision positioning mechanism for stage was been developed by Displacement Magnification Device(DMD) in this paper. The DMD was composed of the beam and multilayer piezoelectric actuators. The theoretical and experimental analysis of DMD to enlarge displacement more then 50times were discussed. And the 2-axis stage by using displacement amplification apparatus was added in the new DMD, and it was able to do it through finite element analysis and experiment. As the results, the magnification of DMD can be obtained about $100{mu}m$ displacement to the 10V input voltage($1.5{mu}m$). And the about 50nm of linearity error in the $30{mu}m$ measurement range and 20times of the amplification in displacement can be measured. In addition, the experimental results are confirmed the possibility of millimeter displacement characteristics and correspond to finite element analysis results.

• 한국공작기계학회논문집
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• 제18권2호
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• pp.228-233
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• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.251-255
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• 1995

정밀위치결정 기구는 정밀가공기, 계측기기, 반도체 제조장치등의 각종산업기기에 있어 중요 장치로 많이 이용되고 있다. 반도체 회로의 고정밀화, 고집적화, 가공기의 고정도화와 함께 위치결정기구의 기술은 매년 엄격해지고 있다. 현재는 0.1 -0.01 .$\mu$ m의 정도가 요구되고 있어 이에 대응할 수 있는 고정밀 미동제어 위치결정 제어에 대한 연구가 활발히 진행되고 있다. 또한 고정도와 함께 대스트로크(Stroke)를 가지며, 동시에 고속동작의 실현이필요하다. 따라서 이런 여러 성능을 만족시키는 것은 고부가가치 산업에 있어 매우 중요한 조건 중의 하나이다.