• Title/Summary/Keyword: Plasma treatment

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The effect of plasma treatment of aluminum/CFRP composites (알루미늄/CFRP 복합재의 플라즈마 표면처리의 효과)

  • 신명근;김만태;한운용;이지훈;이경엽
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.401-404
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    • 2003
  • This paper investigates the effect of plasma treatment of aluminum on the fracture toughness of aluminum/CFRP composites, The surface of the aluminum panel was treated by a DC plasma. The plasma treatment was carried out at volume ratio of acetylene gas to nitrogen gas of 5:5 and the treatment times used was 30 sec. The fracture toughness of plasma-treated aluminum/CFRP' composites was compared with that of untreated aluminum/CFRP composites and The fracture surface of aluminum/CFRP composites was compared with SEM. The results showed that fracture toughness of plasm-treated aluminum/CFRP composites was about 50% higher than that of untreated aluminum/CFRP composites.

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Improvement of Interface Adhesionin Ball Grid Array Packages by Plasma Treatment (플라즈마 처리에 의한 BGA 패키지의 계면 접착력 향상)

  • 김경섭;한완옥;장의구
    • Journal of Welding and Joining
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    • v.18 no.4
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    • pp.64-69
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    • 2000
  • Reliability of PBGA(Plastic Ball Grid Array) package is very weak compared with normal plastic packages. The reliability are the lower resistance to popcorn cracking, which is reduced by moisture absorption in PCB(Printed Circuit Board). This paper adapts plasma treatment process and analyzes their effect. The contents of C and Cl decrease after plasma treatment but O, Ca and N relatively increase. The Plasma treatment to improve the adhesion between EMC(Epoxy Molding Compound) and PCB(solder mask). The degree of improvement was over 100% Max., which is depend on the properties of EMC. Ar+H$_2$as plasma gas show good result. There is a little difference in RF power and treatment time.

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Improved SiNx buffer layer by Using the $N_2$ Plasma Treatment for TFT-FRAM applications ($N_2$ 플라즈마를 이용한 TFT-FRAM용 $SiN_x$ 버퍼층의 특성 개선)

  • Lim, Dong-Gun;Yang, Kea-Joon;Yi, Jun-Sin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.360-363
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    • 2003
  • In this paper, we investigated SiNx film as a buffer layer of TFT-FRAM. Buffer layers were prepared by two step process of a $N_2$ plasma treatment and subsequent $SiN_x$ deposition. By employing $N_2$ plasma treatment, interface traps such as mobile charges and injected charges were removed, hysteresis of current-voltage curve disappeared. After $N_2$ plasma treatment, a leakage current was decreased about 2 orders. From these results, it is possible to perform the plasma treating process to make a good quality buffer layer of MFIS-FET or capacitor as an application of non-volatile memory.

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Effects of Plasma Treatment on the Reliability of a-IGZO TFT

  • Xin, Dongxu;Cui, Ziyang;Kim, Taeyong;Yi, Junsin
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.2
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    • pp.85-89
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    • 2021
  • High reliability thin film transistors are important factors for next-generation displays. The reliability of transparent a-IGZO semiconductors is being actively studied for display applications. A plasma treatment can fill the oxygen vacancies in the channel layer and the channel layer/insulating layer interface so that the device can work stably under a bias voltage. This paper studies the effect of plasma treatment on the performance of a-IGZO TFT devices. The influence of different plasma gases on the electrical parameters of device and its working reliability are reviewed. The article mentions argon, fluorine, hydrogen and several ways of processing in the atmosphere. Among these methods, F (fluorine) plasma treatment can maximize equipment reliability. It is expected that the presented results will form a basis for further research to improve the reliability of a-IGZO TFT.

The Effect of Nitrogen Plasma Treatment on Tribological Behaviors of Plasma-sprayed Zirconia Coatings

  • Lim, Dae-Soon;Shin, Jong-Han;Lee, Jung-Yeob;Cho, Chang-Hee
    • Journal of the Korean Ceramic Society
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    • v.38 no.7
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    • pp.602-607
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    • 2001
  • Zirconia powder containing 3 mol% yttria (3Y-PSZ) was casted on the cast iron substrate by plasma spraying method. Coated specimens were then heat treated at 500$\^{C}$ in nitrogen plasma. Wear tests were performed on nitrogen heat treated and non heat treated samples at temperatures from 25$\^{C}$ to 600$\^{C}$. Wear results showed that the friction coefficient and the wear loss of both the treated and the non-treated samples showed maximum value at 400$\^{C}$. These results were explained by low temperature thermal degradation due to the monoclinic transformation. Nitrogen plasma treatment significantly improved the tribological performance. The effect of nitrogen heat treatment on tribological behavior was explained by the increased micro-hardness and decreased monoclinic faction.

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Low Temperature Plasma and/or Protease Treatment of Wool Fiber (양모섬유의 저온플라즈마 및 효소처리)

  • Yoon, Nam-Sik;Lim, Yong-Jin
    • Textile Coloration and Finishing
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    • v.6 no.4
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    • pp.27-33
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    • 1994
  • Wool fabrics were treated with low temperature oxygen plasma and/or protease, and examined for their mechanical and dyeing properties. By plasma-treatment the strength of wool fabric increased and higher rate of weight loss for protease treatment was obtained. When dyed by levelling type acid dye equilibrium dye uptake appeared same, but rate of dyeing increased by the plasma treatment, while, with milling type acid dye, both of them increased greatly in the order of untreatedplasma/protease-treated. It was assumed from the above results that plasma affects the surface of fiber, and enzyme attacks mainly the inner part of fiber. This was confirmed again by scanning electron microscope.

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Graphene Doping by Ammonia Plasma Surface Treatment (암모니아 플라즈마 표면처리를 통한 그래핀의 질소도핑)

  • Lee, Byeong-Joo;Jeong, Goo-Hwan
    • Journal of the Korean institute of surface engineering
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    • v.48 no.4
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    • pp.163-168
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    • 2015
  • Graphene has attracted much attention due to its remarkable physical properties and potential applications in many fields. In special, the electronic properties of graphene are influenced by the number of layer, stacking sequence, edge state, and doping of foreign elements. Recently, many efforts have been dedicated to alter the electronic properties by doping of various species, such as hydrogen, oxygen, nitrogen, ammonia and etc. Here, we report our recent results of plasma doping on graphene. We prepared mechanically exfoliated graphene, and performed the plasma treatment using ammonia gas for nitrogen doping. The direct-current plasma system was used for plasma ignition. The doping level was estimated from the number of peak shift of G-band in Raman spectra. The upshift of G-band was observed after ammonia plasma treatment, which implies electron doping to graphene.

Influence of Hydrogen and Oxygen Plasma Treatment on the Structural Properties of Carbon Nanotubes (수소 및 산소 플라즈마 처리에 따른 탄소나노튜브의 구조적 특성 변화)

  • Lee, Jae-Hyeong;Nah, Chang-Woon;Park, Dae-Hee
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.20 no.11
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    • pp.943-947
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    • 2007
  • The effect of hydrogen and oxygen plasma treatments on the structural properties of carbon nanotube(CNT) has been systematically investigated. As the plasma power was increased, nano particles were appeared at the surface of CNTs. At high plasma power(300 Watt), the structure of CNT was changed from nanotube type to nano particles. However, in case of hydrogen plasma treatment, there was no change in microstructure of CNT. From the Raman analysis, the crystallinity of CNT was deteriorated by the plasma treatment, regardless of gas types.

Characteristics of ITO Films Grown on an Oxygen Plasma Treated Glass Substrate (유리기판에 O2 플라즈마 표면처리 후 제작된 ITO 박막의 특성)

  • Chae, Hong-Chol;Hong, Joo-Wha
    • Korean Journal of Metals and Materials
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    • v.50 no.7
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    • pp.545-548
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    • 2012
  • The optical and electronic properties of Indium Tin Oxide (ITO) thin films deposited on a RF-plasma treated glass substrate were investigated by X-Ray Photoelectron Spectroscopy (XPS), Ultra-violet Photoelectron Spectroscopy (UPS), Reflected Electron Energy Loss Spectroscopy (REELS). The modification of glass substrates was carried out by varying the time of the plasma surface treatment in an oxygen atmosphere. The focus of this research was to examine how the optical and electronic properties of ITO thin films change with the plasma treatment time. The surface energy increased since the carbon bonds were removed from the surface after the glass substrate received the surface treatment. The ITO thin films produced on the glass substrate with surface treatment showed that the high optical transmittance was approximately 85%. The measured band gap energy was as high as 3.23 eV when the plasma treatment time was 60 s and the work function after the treatment was increased by 0.5 eV in comparison to that before the treatment of 60 s. The ITO thin film exhibited an excellent sheet resistance of $2.79{\Omega}/{\Box}$. We found that the optical and electronic properties of ITO thin films can be improved by RF-plasma surface treatment.

Photocurrent Characteristics of Plasma Sprayed TiO2 Composite Coatings according to Additive Transition Metal (전이금속을 첨가한 플라즈마 TiO2 복합 용사피막의 광전류 특성)

  • Ko, Byung-Chun;Ko, Young-Bong;Park, Kyeung-Chaea
    • Journal of the Korean institute of surface engineering
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    • v.44 no.3
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    • pp.89-94
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    • 2011
  • In this study, the photocurrent characteristics of plasma sprayed $TiO_2$ coatings have been investigated according to additive transition metal (Fe, Mn, Nb powder) and heat treatment conditions. The plasma sprayed $TiO_2$ coatings by heat treatment at $400^{\circ}C$ and 90 min had the higher photocurrent at ultraviolet light, no photocurrent at visible light. The photocurrent of plasma sprayed $TiO_2$ coatings added by Fe, Mn, Nb (named by plasma sprayed $TiO_2$ composite coatings) was lower than that of plasma sprayed $TiO_2$ coatings at ultraviolet light, as was low in intensity ratio of XRD(101)/(110). and the atomic percentage of oxygen by plasma sprayed $TiO_2$ composite coatings was higher than that by plasma sprayed $TiO_2$ coatings. The photocurrent of plasma sprayed $TiO_2$ composite coatings in heat treatment at $400^{\circ}C$ and 90 min was higher than that of plasma sprayed $TiO_2$ coatings in same heat treatment conditions at ultraviolet and visible light, as was high in oxygen affinity by heat treatment.