• 제목/요약/키워드: Plasma test

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전북대 고온플라즈마 설비 구축현황 (The Status of the High Enthalpy Plasma Test Facility in Chonbuk National University)

  • 최성만;신의섭;서용석;서준호;홍봉근
    • 한국추진공학회:학술대회논문집
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    • 한국추진공학회 2010년도 제34회 춘계학술대회논문집
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    • pp.417-420
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    • 2010
  • 전북대학교 고온 플라즈마 응용연구센터 구축사업은 교육과학기술부의 기초연구사업으로 진행되고 있다. 사업기간은 2009년 7월1일부터 2014년 6월 30일까지 총 5년에 걸쳐 이루어 지고 있으며, 총 사업비는 393억원이다. 플라즈마 응용연구센터에서 구축하고자 하는 장비는 0.4MW급 Enhanced Huels 형 플라즈마 장비 1 set, 2.4MW 급 Enhanced Huels 형 플라즈마 장비 1 set, 그리고 RF 플라즈마 장비 60KW 및 200 KW 각각 1 Set 이다.

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Growth and characterization of BON thin films prepared by low frequency RF plasma enhanced MOCVD method

  • Chen, G.C.;Lim, D.-C.;Lee, S.-B.;Hong, B.Y.;Kim, Y.J.;Boo, J.-H.
    • 한국표면공학회지
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    • 제34권5호
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    • pp.510-515
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    • 2001
  • It was first time that low frequency R.F. derived plasma enhanced MOCVD with frimethylborate precursor was used to fabricate a new ternary compound $BO_{x}$ $N_{y}$ . The formation of BON molecule was resulted from nitrogen nitrifying B-O, and forming the angular molecule structure proved by XPS and FT-IR results. The relationship between hardness and film thickness was studied. An thickness-independent hardness was fond about 10 GPa. The empirical calculation of band-gap and UV test result showed that our deposited $BO_{x}$ $N_{y}$ thin film was semiconductor material with 3.4eV of wide band gap. The electrical conductivity, $4.8$\times$10^{-2}$ /($\Omega$.cm)$^{-1}$ also confirmed that $BO_{x}$ $N_{y}$ has a semiconductor property. The roughness detected from the as-grown films showed that there was no serious bombarding effect due to anion in the plasma occurring in the RF frequency derived plasma.

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Ni계 및 Co계 합금 PTA 오버레이용접층의 마모거동에 관한 연구 (Wear Behavior of Plasma Transferred Arc Deposited Layers for Ni - and Co - base Alloy)

  • 윤병현;이창희;김형준
    • Journal of Welding and Joining
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    • 제19권5호
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    • pp.540-547
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    • 2001
  • This study has evaluated the wear behavior of PTA (Plasma Transferred Arc) Inconel 625 and Stellite 6 overlays on Nimonic 80A substrate. Nimonic 80A alloy was also included for comparison. In order to evaluate the wear performance, three-body abrasive wear test and pin-on-disk dry sliding wear test were performed. Microstructural development during the solidification of deposits is also discussed. Wear test results show that the wear rate of Stellite 6 deposit is lower than that of Inconel 625 deposit and Nimonic 80A. The sliding wear resistance of overlay deposits follows a similar trend to the abrasive wear resistance, but for Nimonic 80A. The main wear mechanisms were abrasive wear for Inconel 625 deposit, adhesive wear and delamination for Stellite 6 deposit in pin-on-disk dry sliding wear test and ploughing in three-body abrasive wear test. Cross sectional examinations of the worn surface of pin specimens after pin-on-disk dry sliding wear test implies that the plastic deformation near worn surface has occurred during the wear testing.

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Plasma etching behavior of RE-Si-Al-O glass (RE: Y, La, Gd)

  • 이정기;황성진;이성민;김형순
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2010년도 춘계학술발표대회
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    • pp.49.1-49.1
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    • 2010
  • The particle generation during the plasma enhanced process is highly considered as serious problem in the semiconductor manufacturing industry. The material for the plasma processing chamber requires the plasma etching characteristics which are homogeneously etched surface and low plasma etching depth for preventing particulate contamination and high durability. We found that the materials without grain boundaries can prevent the particle generation. Therefore, the amorphous material with the low plasma etching rate may be the best candidate for the plasma processing chamber instead of the polycrystalline materials such as yttria and alumina. Three glasses based on $SiO_2$ and $Al_2O_3$ were prepared with various rare-earth elements (Gd, Y and La) which are same content in the glass. The glasses were plasma etched in the same condition and their plasma etching rate was compared including reference materials such as Si-wafer, quartz, yttria and alumina. The mechanical and thermal properties of the glasses were highly related with cationic field strength (CFS) of the rare-earth elements. We assumed that the plasma etching resistance may highly contributed by the thermal properties of the fluorine byproducts generated during the plasma exposure and it is expected that the Gd containing glass may have the highest plasma etching resistance due to the highest sublimation temperature of $GdF_3$ among three rare-earth elements (Gd, Y and La). However, it is found that the plasma etching results is highly related with the mechanical property of the glasses which indicates the cationic field strength. From the result, we conclude that the glass structure should be analyzed and the plasma etching test should be conducted with different condition in the future to understand the plasma etching behavior of the glasses perfectly.

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Plasma renin activity(PRA) and Active renin concentration(ARC)비교를 통한 ARC 유용성 실험 (ARC availability experiment by comparing plasma renin activity (PRA) and active renin concentration (ARC))

  • 박준모;김한철;최승원
    • 핵의학기술
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    • 제22권1호
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    • pp.84-89
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    • 2018
  • Purpose Renin is a proteolytic enzyme synthesized and secreted from epidermal(juxtaglomerular) cells in kidney. Renin acts on the renin substrate angiotensinogen to produce angiotensin I, and then angiotensin II is produced by the action of angiotensin converting enzyme. This causes the adrenal glands to boost blood pressure (vasoconstriction) and promote aldosterone secretion. While Plasma renin activity (PRA) is to test angiotensin I, the active renin concentration (ARC) is a renin test directly. They have different test methods and their own substrates. However, these two methods are sometimes interpreted as the same as a result. The purpose of this study was to evaluate the usefulness of the ARC test by comparing the results between PRA and ARC. Materials and Methods For the diversity of the experiment, 26 samples were requested to test with PRA(TFB company) and ARC(Cisbio company) to other institution. We compared and analyzed PRA(Immunotech company) and ARC(Cisbio company) tests using 28 samples from September $15^{th}$ to October $13^{th}$ in 2017. The statistical analysis method for PRA/ARC evaluated the usefulness using Microsoft Excel program by verifying a correlation analysis of Aldosterone/PRA ratio and a correlation analysis of Aldosterone/ARC ratio and conducting T-test. Results The regression equation of the PRA(Immunotech company)/ARC(Cisbio company), which was tested in the department, was y = 0.0619x + 0.4615 and the correlation coefficient was 0.73. The regression equation of the PRA(TFB company)/ARC(Cisbio company), which was tested in the other institution, was y = 0.0888x + 0.3316 and the correlation coefficient was 0.91. In addition, The regression equation of Aldosterone / PRA ratio and Aldosterone / ARC ratio was y = 0.875x - 11.688 and the correlation coefficient was 0.87. Plus T - test showed no significant difference (P>0.05). Conclusion Both tests showed a strong positive correlation, but this only represents the strength and direction of the relationship between the two tests. Furthermore, the actual results showed somewhat differences. It is presumed that the measured value was influenced by the endogenous renin group mass in the plasma, the condition of the enzyme reaction and the kind of the inhibitor. When the active renin concentration (ARC) test is performed, it is useful to distinguish between the two tests as they are complementary.

초소형위성 SNIPE(Scale Magnetospheric and Ionospheric Plasma Experiment) 시제인증모델의 발사환경시험 및 분석 (Launch Environment Test for Scale magNetospheric and Ionospheric Plasma Experiment (SNIPE) Engineering Qualification Model)

  • 김민기;김해동;최원섭;김진형;김기덕;김지석;조동현
    • 우주기술과 응용
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    • 제1권3호
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    • pp.319-336
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    • 2021
  • 본문은 과학관측임무 초소형위성인 SNIPE(Scale magNetospheric and Ionospheric Plasma Experiment)의 시제인증모델(EQM)에 대한 발사환경시험 수행 결과 및 이를 통해 얻을 수 있는 신뢰성 있는 초소형위성 개발 방향에 대해 논한다. SNIPE는 우주기상관측을 포함한 다양한 탑재체를 지닌 6U급 초소형위성으로 4기가 편대비행을 하며 임무를 수행한다. 다수의 비행모델 제작 전 시제인증모델을 통해 먼저 설계 및 제작의 유용성을 검증하고자 하였다. 시제인증모델의 발사환경시험은 2019년 1차 시험이 수행되었고, 여기서 발견된 일부 문제점을 교정하여 2021년에 2차 시험을 수행함으로써 모든 문제가 해결되었음을 확인할 수 있었다. 두 차례의 시험에서 특이할 점은 1차 시험의 발사관과 2차 시험의 발사관이 다르다는 점인데, 1차 시험용 발사관과 달리 2차 시험의 발사관은 내부의 초소형위성을 고정하는 기능이 있어서 내부 초소형위성이 실제 받는 구조적 하중이 1차 시험에 비해 훨씬 경감되었다는 점이다. 본 논문은 두 시험의 결과로 나타난 특징을 분석하고, 차후 여타 초소형위성의 구조 설계에 반영할 수 있는 지침들을 제시하였다.

유도결합 플라즈마를 이용한 집속이온빔용 고휘도 이온원의 개발 및 특성연구 (Development and characteristic study of high brightness ion source using inductively coupled plasma for focused ion beam)

  • Kim, Yoon-Jae;Park, Dong-Hee;Hwang, Yong-Seok
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 춘계학술대회 논문집
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    • pp.494-499
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    • 2004
  • A ion source using inductively coupled plasma has been tested in order to test its feasibility as a high brightness ion source for focused ion beam. When operating the ion source with filter magentas in front of plasma electrode for a negative ion source, lower remittances are expected. Extracted beam remittances are measured with an Allison-type scanning device for various plasma parameters and extraction conditions. The normalized omittance has been measured to be around 0.2$\pi$mmmrad with beam currents of up to 0.55 ㎃. In particular, noting that multicusp magnets have a role in decreasing the remittance as well as increasing plasma discharge efficiency, transverse magnetic field has been confirmed to be a useful tool fur decreasing remittance via electron energy control.

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인젝터 플라즈마 저항의 실험적 연구 (An experimental study on the resistivity of injector plasma)

  • 한충규
    • 한국군사과학기술학회지
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    • 제5권4호
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    • pp.19-26
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    • 2002
  • A chamber enduring 3,000 bars and an electrical high voltage power system have been designed and installed for studying the characteristics of the plasma produced in electro-thermal chemical propulsion system. In order to test the structural characteristics, polyethylene injectors were used which have 4 or 6 mm inner diameter and several lengths from 15 to 70 mm. The capacitors were charged at the voltages of 5.2, 7.3 and 10.4 kV which correspond to 5.58, 11 and 22.3 kJ in charging energy. The observed resistivities of the plasma injector are close to those predicted by a theoretical model that describes the plasma resistivity according to high current density.

바이오-메디컬 응용을 위한 마이크로 플라즈마 분사 소자 (Microplasma-Jet Device for Bio-medical Application)

  • 김강일;홍용철;김근영;양상식
    • 전기학회논문지
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    • 제58권12호
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    • pp.2474-2479
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    • 2009
  • This paper presents an atmospheric microplasma-jet device for bio~medical application. The microplasma-jet device consists of four components; a thin Ni anode, porous alumina insulator, a stainless steel cathode and an aluminum case. The anode has 8 holes, and hole diameter and depth are $200 {\mu}m$ and $60 {\mu}m$, respectively. The discharge test was performed in atmospheric pressure using nitrogen gas and AC voltage at the optimum gas flow rate of 4 Vmin. The plasma-jet is ejected stably for the input voltage ranging from 5.5 to $9.5 kV_{p-p}$. The plasma becomes dense as the input voltage increases, which was verified by the hydrophilicity change of PMMA surface treated by the plasma. The temperature increasement of the aluminum film exposed to plasma-jet illustrates that the micro plasma-jet device is feasible for bio-medical application.

Analysis of the Effects of SD Plasma on Aerodynamic Drag Reduction of a High-speed Train

  • Lee, Hyung-Woo;Kwon, Hyeok-Bin
    • Journal of Electrical Engineering and Technology
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    • 제9권5호
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    • pp.1712-1718
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    • 2014
  • Experimental analysis according to the plasma actuator design variables was performed in order to verify the effects of sliding discharge plasma on aerodynamic drag reduction of a high-speed train. For the study, sliding discharge plasma actuator and high-frequency, high-voltage power supply were developed and experimented to figure out the best design variables for highest ionic wind velocity which could reduce the drag force. And then, 5% reduced-scale model of a high-speed train was built for wind tunnel test to verify it. From the results, it was confirmed that sliding discharge plasma had contribution to reduce the drag force and it had the potential to be applied to real-scale trains.