Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)
- 2004.04a
- /
- Pages.494-499
- /
- 2004
Development and characteristic study of high brightness ion source using inductively coupled plasma for focused ion beam
유도결합 플라즈마를 이용한 집속이온빔용 고휘도 이온원의 개발 및 특성연구
- Kim, Yoon-Jae (Dept.of Nuclear engineering, Seoul National University) ;
- Park, Dong-Hee ;
-
Hwang, Yong-Seok
(Dept.of Nuclear engineering, Seoul National University)
- Published : 2004.04.01
Abstract
A ion source using inductively coupled plasma has been tested in order to test its feasibility as a high brightness ion source for focused ion beam. When operating the ion source with filter magentas in front of plasma electrode for a negative ion source, lower remittances are expected. Extracted beam remittances are measured with an Allison-type scanning device for various plasma parameters and extraction conditions. The normalized omittance has been measured to be around 0.2