• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.58-62
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• 2003

Silicon carbide (SiC) was etched in a $NF_3/CH_4$ inductively coupled plasma. The etch process was modeled by using a neural network called generalized regression neural network (GRNN). For modeling, the process was characterized by a $2^4$ full factorial experiment with one center point. To test model appropriateness, additional test data of 16 experiments were conducted. Particularly, the GRNN predictive capability was drastically improved by a genetic algorithm (GA). This was demonstrated by an improvement of more than 80% compared to a conventionally obtained model. Predicted model behaviors were highly consistent with actual measurements. From the optimized model, several plots were generated to examine etch rate variation under various plasma conditions. Unlike the typical behavior, the etch rate variation was quite different depending on the bias power Under lower bias powers, the source power effect was strongly dependent on induced dc bias. The etch rate was strongly correated to the do bias induced by the gas ratio. Particularly, the etch rate variation with the bias power at different gas ratio seemed to be limited by the etchant supply.

• Korean Journal of Materials Research
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• v.17 no.4
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• pp.215-221
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• 2007

The effect of $CF_4$ plasma treatment condition on the interfacial adhesion energy of inkjet printed Ag/polyimide system is evaluated from $180^{\circ}$ peel test by calculating the plastic deformation energy of peeled metal films. Interfacial fracture energy between Ag and as-received polyimide was 5.5 g/mm. $CF_4$ plasma treatment on the polyimide surface enhanced the interfacial fracture energy up to 17.6 g/mm. This is caused by the increase in the surface roughness as well as the change in functional group of the polyimide film due to $CF_4$ plasma treatment on the polyimide surface. Therefore, both the mechanical interlocking effect and the chemical bonding effect are responsible for interfacial adhesion improvement in ink jet printed Ag/polyimide systems.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.63 no.10
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• pp.1412-1416
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• 2014

We report thin-film organic moisture barriers based on polystyrene(PS) laminates deposition by PECVD for an encapsulation of OLEDs. The organic polystyrene thin-film has the benzene ring structure and high hydrophobic characteristics and it was polymerized by PECVD in dry process. Life time properties of Ca test were obtained 32 minutes at the RF 100W process conditions. From the AFM test, the roughness of multi-layer thin-film was more excellent rather than that of a single-layer thin-film. In addition, 5 layers of the multi-layer film properties were obtained 45 minutes. So that the optical and electrical properties were not affected with these plasma polymerized organic thin-film encapsulation. For life time improvement, the inorganic $Al_2O_3$ thin-film were deposited 5nm using ALD atomic layer deposition. The WVTR(Water Vaper Transmission Rate) value of hybrid thin-film encapsulation in the optimum process conditions was resulted by less than $10-3g/m^2/day$. From the results of experiment, plasma polymerized hybrid encapsulation was suggested as the flexible display applications.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.5 no.5
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• pp.458-461
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• 2004

In order to improve the adhesion properties of copper, MPS(3-mercaptopropyltrimethoxysilane) organic film were employed. The plasma pretreatment in pure He or $He/O_{2}$ mixed gas environment greatly increased adhesion force. Adhesion force was measured by scratch test with nano indenter. Microstructures and surface roughness were observed with scanning electron microscope(SEM). The characteristics of MPS layer for pretreatment were studied with flourier transform infrared spectroscope(FT-IR) and contact angle tester. The heighest adhesion was achieved in the specimen pretreated with mixed plasma and NPS coating, which was 56mN. Other specimen showed lower value by $20{\%}$ to $30{\%}$. The roughness of substrate was not affected by the bonding strength of copper plating.

• Korean Journal of Materials Research
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• v.29 no.11
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• pp.657-663
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• 2019

In this work, we study physical and mechanical properties of oxide films formed on AZ91D magnesium alloy by plasma anodization at different temperatures. It is found that the higher the electrolyte temperature, the lower is the breakdown voltage of oxide layer. This is probably because films formed at higher temperatures are thinner and denser. Moreover, electrolyte temperature plays an important role in the physical properties of the films. As the electrolyte temperature increases from 20 to $50^{\circ}C$, the hardness of the oxide layer increases. Friction test against steel balls indicates that wear scars become narrower for films formed at higher temperatures because the films are harder, as indicated by the Vickers hardness. The thinner and denser nature of the oxide film formed at $50^{\circ}C$ is also advantageous for heat transfer when film is used as a heat sink. Laser flash test results show very fast heat transfer for AZ91D with plasma anodized oxide layer formed at higher temperatures.

• Polymer(Korea)
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• v.31 no.1
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• pp.31-36
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• 2007

It has been reported that the surface properties of the plasma treated material were changed while maintaining its bulk properties. In this study, surface modification of nylon fiber by plasma treatment was tried to attain high water-repellency Nylon fiber was treated with RF plasma under a vacuum system using various parameters such as gas specious, processing time and processing power. Morphological changes by low pressure plasma treatment were observed using scanning electron microscopy (SEM) and atomic force microscopy (AFM). Moreover, the mechanical and inherent properties were analyzed by tensile strength, differential scanning calorimetry (DSC) and thermogravimetric analysis (TGA). The high water-repellency property of nylon fiber was evaluated by a water-drop standard test under various conditions in terms of aging effect. The results showed that the water-repellency of plasma-surface-treated nylon fiber was greatly improved compared to untreated nylon fiber.

• Journal of Welding and Joining
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• v.33 no.1
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• pp.61-71
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• 2015

The effect of welding condition on microstructure and mechanical property of Plasma-MIG Hybrid Weld between Al 5083 plates(thickness : 10mm) was investigated. 1 pass weld without any defects such as puckering, undercut, and lack of fusion was obtained by 150~200A of plasma current and 5~7mm of welding speed. Gas porosities and shrinkage porosities were existed in the weld near fusion line. As welding speed and plasma current were decreasing, the area fraction of porosity was increasing. The hardness of the weld is increasing as welding speed. On the basis of microstructural analysis, Mg segregated region near dendrite boundaries tends to increase with the welding speed. In the result of hardness test, Distribution of hardness in fusion zone showed little change with the plasma current. However, when the welding speed increased, hardness in weld metal markdly increased. It could be considered that effect of heat input to growth of the dendritic solidification structures. Based on tensile test, tensile properties of weld metal was predominated by area fraction of porosities. Consequently, tensile properties can be controlled by formation site and area fraction of porosity.

• Korean Journal of Materials Research
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• v.2 no.2
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• pp.85-94
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• 1992

The size, morphology and distribution of pores which affect on the physical properties of thermal barrier coatings were investigated to find the relationship with spraying parameters. The plasma-sprayed zirconia coatings contained numerous micropores as well as macropores which were appeared as spherical and irregular pores, and cracks. The pore formation process and its characteristics were varied with spraying distance. Porosity itself was varied with spraying parameters such as spray gun current, gas flow rate and the gas used(Ar or $N_2). The Porosity of coatings was ranged from 10 to 18% with the variation of spraying conditions. The relative hardness measured by the scratch test, showed strong dependence on the porosity of coatings rather than spraying parameters.

• Composites Research
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• v.25 no.3
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• pp.76-81
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• 2012

Atmospheric pressure plasma treatment on carbon nanotube (CNT) surfaces was performed to modify reinforcement effect and interfacial adhesion of carbon fiber reinforced CNT-phenolic composites. The surface changes occurring on CNT treated with plasma were analyzed by using Fourier transform infrared spectroscope (FT-IR). The significant improvement of wettability on CNT was confirmed by static contact angle test after plasma treatment. Such plasma treatment resulted in a decrease in the advancing contact angle from $118^{\circ}$ to $60^{\circ}$. The interfacial adhesion between carbon fiber and CNT-phenolic composites increased by plasma treatment based on apparent modulus test results during quasi-static tensile strength. Furthermore, the proposed database offers valuable knowledge for evaluating interfacial shear strength (IFSS).

• Journal of Microbiology
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• v.44 no.1
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• pp.72-76
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• 2006

Plasma-derived products are produced from plasma via fractionation and chromatography techniques, but can also be produced by other methods. In the performance of nucleic acid amplification tests (NAT) with plasma-derived products, it is necessary to include an internal control for the monitoring of all procedures. In order to avoid false negative results, we confirmed the usefulness of the bovine viral diarrhoea virus (BVDV) for use as an internal control in the detection of hepatitis C virus (HCV) RNA in plasma-derived products. These products, which were spiked with BVDV, were extracted and then NAT was performed. Specificity and sensitivity were determined via the adjustment of primer concentrations and annealing temperatures. BVDV detection allows for validation in the extraction, reverse transcription, and amplification techniques used for HCV detection in plasma-derived products.