• 대한화학회지
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• 제35권6호
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• pp.699-706
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• 1991

헬륨 기체를 사용하여 중급 출력(500W) 마이크로파 유도 플라즈마(Microwave Induced Plasma:MIP)를 헬륨 기체를 사용하여 만든 뒤 직접 수용액 시료 분석에 사용하였다. Beenakker의 cavity를 변형시켜 얻은 안정된 헬륨 플라즈마는 실린더 형태의 모양을 하고 있고 기체의 흐름량을 조절하여 "toroidal"형태의 플라즈마도 얻을 수 있으나 분석학적 능력은 오히려 감소되었다. Glass Frit Nebuliser를 이용하여 분석하였을 때 금속 원소는 10~100 ppb 근처의 검출한계를 보였고 비금속원소인 염소의 경우는 50ppm근처의 검출한계를 보였다.

• 한국산학기술학회논문지
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• 제10권3호
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• pp.515-520
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• 2009

본 논문에서는 알루미늄 레이저 용접에서 발생하는 플라즈마의 빛을 계측하여 용접공정을 모니터링할 수 있는 시스템을 개발하였다. 분광분석을 통해 용접 시 플라즈마의 파장대를 계측하고 이를 근거로 하여 모니터링 시스템에 적합한 포토다이오드를 선정하였다. 이를 다양한 용접 조건에 대하여 적용하였고, 센서 신호의 특성은 플라즈마의 강도와 안정성에 밀접하게 연관되어 있음을 신호의 평균값과 FFT분석을 통하여 알 수 있었다. 이러한 신호 변동의 원인은 플라즈마와 키홀의 거동과 용접 비드의 형상과도 밀접한 관계가 있음을 분석하였다.

• Journal of Welding and Joining
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• 제8권3호
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• pp.60-69
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• 1990

Plasma arc cutting is a fusion cutting process in which a gas-constricted arc is employed to produce a high-temperature, high-velocity plasma jet on the workpiece. This process provides some advantages such as increased cutting velocity, excellent working accuracy and the ability to cut special materials (widely used stainless steels and Al-alloys, for example), when compared with iconventional oxyfuel gas cutting. From the view point of price and reliability of the power source, plasma arc cutting has also some distinct advantages over laser beam cutting. High-speed machines with NC or CNC systems are needed for the plasma arc or laser beam cutting process, while for oxyfuel gas cutting, low-speed machines with copying templates or optical-shape tracking sensors can be applied. The low price and high flexibility of the microprocessor arc contributing more and more the application of CNC system in the plasma arc cutting process, as in other manufacturing fields. From these points of view, a microprocessor-based plasma arc cutting system was developed by using a reference-pulse system, and its performance was tested. The interpolating routines were programmed in the assembly language for saving the memory volume and improving the compouting speed, which has an intimate relationship with the available cutting velocity.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.279-281
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• 1997

The properties of Platinum dry etching were investigated in MICP(Magnetized Inductively Coupled Plasma). The problem with Platinum etching is the redeposition of sputtered Platinum on the sidewall. Because of the redeposits on the sidewall, the etching of patterned Platinum structure produce feature sizes that exceed the original dimension of the PR size and the etch profile has needle-like shape.[1] Generally, $Cl_2$ plasma is used for the fence-free etching.[1][2][3] The main object of this study was to investigate a new process technology for the fence-free Pt etching. Platinum was etched with Ar plasma at the cryogenic temperature and with Ar/$SF_6$ plasma at room temperature. In cryogenic etching, the height of fence was reduced to 20% at $-190^{\circ}C$ compared with that of room temp., but the etch profile was not fence-free. In Ar/$SF_6$ Plasma, chemical reaction took part in etching process. The trend of properties of Ar/$SF_6$ Plasma etching is similar to that of $Cl_2$ Plasma etching. Fence-free etching was possible, but PR selectivity was very low. A new gas chemistry for fence-free Platinum etching was proposed in this study.

• 한국표면공학회지
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• 제54권6호
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• pp.348-356
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• 2021

In this study, optical diagnosis of plasma was performed for nitrogen doping in graphene using a horizontal inductively coupled plasma (ICP) system. Graphene was prepared by mechanical exfoliation and the ICP system using nitrogen gas was ignited for plasma-induced and defect-suppressed nitrogen doping. In order to derive the optimum condition for the doping, plasma power, working pressure, and treatment time were changed. Optical emission spectroscopy (OES) was used as plasma diagnosis method. The Boltzmann plot method was adopted to estimate the electron excitation temperature using obtained OES spectra. Ar ion peaks were interpreted as a reference peak. As a result, the change in the concentration of nitrogen active species and electron excitation temperature depending on process parameters were confirmed. Doping characteristics of graphene were quantitatively evaluated by comparison of intensity ratio of graphite (G)-band to 2-D band, peak position, and shape of G-band in Raman profiles. X-ray photoelectron spectroscopy also revealed the nitrogen doping in graphene.

• Nuclear Engineering and Technology
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• 제52권9호
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• pp.2064-2071
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• 2020

For proton pencil beam scanning (PBS) technology, the accuracy of the dose distribution in a patient is sensitive to the properties of the incident beam. However, mechanical deformation of the proton therapy facility may occur, and this could be an important factor affecting the proton dose distribution in patients. In this paper, we investigated the effect of deformation on an SC200 proton facility's beam isocenter properties. First, mechanical deformation of the PBS nozzle, L-shape plate, and gantry were simulated using a Finite Element code, ANSYS. Then, the impact of the mechanical deformation on the beam's isocenter properties was evaluated using empirical formulas. In addition, we considered the simplest case that could affect the properties of the incident beam (i.e. if only the bending magnet (BG3) has an error in its mounting alignment), and the effect of the beam optics offset on the isocenter characteristics was evaluated. The results showed that the deformation of the beam position in the X and Y direction was less than 0.27 mm, which meets the structural design requirements. Compared to the mechanical deformation of the L-shape plate, the deformation of the gantry had more influence on the beam's isocenter properties. When the error in the mounting alignment of the BG3 is equal to or more than 0.3 mm, the beam deformation at the isocenter exceeds the maximum accepted deformation limits. Generally speaking, for the current design of the SC200 scanning beam delivery system, the effects of mechanical deformation meet the maximum accepted beam deformation limits. In order to further study the effect of the incident beam optics on the isocenter properties, a fine-scale Monte Carlo model including factors relating to the PBS nozzle and the BG3 should be developed in future research.

• 한국환경과학회지
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• 제21권5호
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• pp.597-603
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• 2012

Non-thermal plasma processing using a dielectric barrier discharge (DBD) has been investigated as an alternative method for the degradation of non-biodegradable organic compounds in wastewater. The active species such as OH radical, produced by the electrical discharge may play an important role in degrading organic compound in water. The degradation of N, N-Dimethyl-4-nitrosoaniline (RNO) was investigated as an indicator of the generation of OH radical. The DBD plasma reactor of this study consisted of a plasma reactor, recycling pump, power supply and reservoir. The effect of diameter of external reactor (15 ~ 40 mm), width of ground electrode (2.5 ~ 30 cm), shape (pipe, spring) and material (copper, stainless steel and titanium) of ground electrode, water circulation rate (3.1 ~ 54.8 cm/s), air flow rate (0.5 ~ 3.0 L/min) and ratio of packing material (0 ~ 100 %) were evaluated. The experimental results showed that shape and materials of ground were not influenced the RNO degradation. Optimum diameter of external reactor, water circulation rate and air flow rate for RNO degradation were 30 mm, 25.4 cm/s and 4 L/min, respectively. Ground electrode length to get the maximum RNO degradation was 30 cm, which was same as reactor length. Filling up of glass beads decreased the RNO degradation. Among the experimented parameters, air flow rate was most important parameters which are influenced the decomposition of RNO.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2004년도 제22회 춘계학술대회논문집
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• pp.262-270
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• 2004

Basic experiments were carried out using the THT-IV low-power Hall thruster to examine the influences of magnetic field shape and strength, and acceleration channel length on thruster performance and to establish guidelines for design of high-performance Hall thrusters. Thrusts were measured with varying magnetic field and channel structure. Exhaust plasma diagnostic measurement was also made to evaluate plume divergent angles and voltage utilization efficiencies. Ion current spatial profiles were measured with a Faraday cup, and ion energy distribution functions were estimated from data with a retarding potential analyzer. The thruster was stably operated with a highest performance under an optimum acceleration channel length of 20 mm and an optimum magnetic field with a maximum strength of about 150 Gauss near the channel exit and with some shape considering ion acceleration directions. Accordingly, an optimum magnetic field and channel structure is considered to exist under an operational condition, related to inner physical phenomena of plasma production, ion acceleration and exhaust plasma feature. A new Hall thruster was designed with basic research data of the THT-IV thruster. With the thruster with many considerations, long stable operations were achieved. In all experiments at 200-400 V with 1.5-3 mg/s, the thrust and the specific impulse ranged from 15 to 70 mN and from 1100 to 2300 see, respectively, in a low electric power range of 300~1300 W. The thrust efficiency reached 55 %. Hence, a large map of the thruster performance was successfully made. The thermal characteristics were also examined with data of both measured and calculated temperatures in the thruster body. Thermally safe conditions were achieved with all input powers.

• 공업화학
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• 제22권1호
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• pp.31-36
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• 2011

사불화탄소($CF_4$)는 반도체 제조공정에서 플라즈마 에칭과 화학기상증착(CVD)에서 사용되어온 가스이다. $CF_4$는 적외선을 강하게 흡수하고 대기 중 잔류시간이 길어서 지구온난화에 영향을 미치기 때문에 고효율의 분해가 필요하다. 본 연구에서는 플라즈마와 워터젯을 결합하여 방전영역을 증가시키고 다량의 OH 라디칼을 생성시켜 $CF_4$를 고효율로 분해할 수 있는 워터젯 글라이딩 아크 플라즈마 시스템을 개발하였다. 실험 변수로 전극 형태, 전극 각도, 가스 노즐직경, 전극 간격과 전극 길이를 취하였다. 변수실험을 통하여 Arc 형태의 전극에서 전극 각도가 $20^{\circ}$, 가스 노즐 직경이 3 mm, 전극 간격이 3 mm, 전극 길이가 120 mm일 때 $CF_4$ 분해율은 최고 93.4%까지 도달하였다.

• 한국응용약물학회:학술대회논문집
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• 한국응용약물학회 1996년도 춘계학술대회
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• pp.282-282
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• 1996

The purpose of this study was to prepare the nifedipine dry elixir (NDE) and coated nifedipine dry elixir (CNDE) containing nifedipine ethanol solution for improving the dissolution rate and bioavailability of nifedipine. NDE containing nifedipine and ethanol in wall materials of dextrin was prepared using a spray-dryer and then NDE was coated with eudragit acrylic resin to make CNDE. Shape and size of the NDE and CNDE were monitored by scanning electron micrograph and laser particle size analyzer In vitro dissolution tests were performed in simulated gastric and intestinal fluid. Bioavailability of NDE and CNDE were compared with drug powder suspension and commercial soft capsule after oral administration of the preparations to rats. NDE and CNDE are spherical in shape. Cross-sectional view of dry elixirs indicates the large inter cavity containing ethanolic drug solution in shell. Geometric mean diameter of NDE and CNDE is about 6.64 and 8.70 $\mu\textrm{m}$, respectively. Drug dissolution rate within first 5 min from NDE increased dramatically irrespective of dissolution medium. However, CNDE showed a particularly retarded dissolution rate in pH 1.2 simulated gastric fluid compared with NDE. The bioavailability of nifedipine in the NDE was increased dramatically compared with drug powder suspension. CNDE reduced initial burst-out plasma peak compared with NDE. CNDE as a sustained release delivery system could reduce the initial burst-out plasma peak due to controlling the release rate of nifedipine from NDE and maintain the effective plasma level over a longer period within therapeutic window with enhanced bioavailability of nifedipine.