• Korean Journal of Materials Research
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• v.26 no.5
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• pp.229-234
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• 2016

In this study, the degree of particle melting in $Y_2O_3$ plasma spraying and its effects on coating characteristics have been investigated in terms of microstructural features, microhardness and scratch resistance. Plasma sprayed $Y_2O_3$ coatings were formed using two different powder feeding systems: a system in which the powder is fed inside the plasma gun and a system in which the powder is fed externally. The internal powder spraying method generated a well-defined lamellae structure that was characterized by a thin porous layer at the splat boundary and microcracks within individual splats. Such micro-defects were generated by the large thermal contraction of splats from fully-molten droplets. The external powder spraying method formed a relatively dense coating with a particulate deposition mode, and the deposition of a higher fraction of partially-melted droplets led to a much reduced number of inter-splat pores and intra-splat microcracks. The microhardness and scratch resistance of the $Y_2O_3$ coatings were improved by external powder spraying; this result was mainly attributed to the reduced number of micro-defects.

• Korean Journal of Metals and Materials
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• v.47 no.10
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• pp.629-634
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• 2009

The effects of processing parameters on the surface properties of the hardened layers processed by the low temperature plasma nitrocarburizing and the low temperature two-step plama treatment (carburizing+nitriding) were investigated. The nitrogen-enriched expanded austenite structure (${\gamma}_N$) or S phase was formed on all of the treated surface. The surface hardness reached up to 1200 $HV_{0.025}$, which is about 5 times higher than that of untreated sample (250 $HV_{0.1}$). The thickness of hardened layer of the low temperature plasma nitrocarburized layer treated at $400^{\circ}C$ for 40 hour was only $15{\mu}m$, while the layer thicknesss in the two-step plama treatment for the 30 hour treatment increased up to about $30{\mu}m$. The surface thickness and hardness increased with increasing treatment temperature and time. In addition, the corrosion resistance was enhanced than untreated samples due to a high concentration of N on the surface. However, higher treatment temperature and longer treatment time resulted in the formation of $Cr_2N$ precipitates, which causes the degradation of corrosion resistance.

• Korean Journal of Materials Research
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• v.32 no.10
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• pp.442-447
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• 2022

Sealing treatment is a post-surface treatment of the plasma spray coating process to improve the corrosion resistance of the coating material. In this study, the effect of the sealing on the corrosion resistance and adhesive strength of the plasma spray-coated alumina coatings was analyzed. For sealing, an epoxy resin was applied to the surface of the coated specimen using a brush. The coated specimen was subjected to a salt spray test for up to 48 hours and microstructural analysis revealed that corrosion in the coating layer/base material interface was suppressed due to the resin sealing. Measurement of the adhesive strength of the specimens subjected to the salt spray test indicated that the adhesive strength of the sealed specimens remained higher than that of the unsealed specimens. In conclusion, the resin sealing treatment for the plasma spray-coated alumina coatings is an effective method for suppressing corrosion in the coating layer/base material interface and maintaining high adhesive strength.

• Proceedings of the Korean Vacuum Society Conference
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• 2004.02a
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• pp.143-143
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• 2004

• The Korea Journal of Herbology
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• v.30 no.2
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• pp.37-42
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• 2015

Objectives : The aim of this study was to investigate the effects of licorice supplementation on muscle injury, plasma cortisol, testosterone and insulin sensitivity after high intensity resistance exercise. Methods : The fourteen health college male students were voluntarily participated in this study and were randomly divided into 2 groups: Control group (CON, n=7), Licorice group (LR, n=7). LR group ingested 2 g/time of licorice extract (mixed with 100 ml of water) two times/day for 10 days while the CON group ingested 100 ml of water. All subjects performed a high intensity resistance exercise (half-squat, 8 RM at 80% one-repetition maximum, 5 sets, 1min rest). Blood samples were collect before (-7) and after (0) licorice supplementation, and then 1 day, 2 day and 3 day post exercise. After 10 day treatment, plasma creatine kinase, cortisol, testosterone, glucose, insulin were measured. To determine the insulin sensitivity, HOMA-IR was calculated. Results : Plasma creatine kinase activities were significantly elevated after exercise, but there was not different between two groups. The plasma cortisol and testosterone levels were not significantly different between two groups. Plasma glucose levels were increased at 1 day and 2 day after exercise in the LR comparing with CON group (P<0.05) but plasma insulin levels were significantly lower in comparison with CON. HOMA-IR were significantly lower in the LR than CON group at 0 day to 3 day (P<0.05). Conclusions : The results of the current study suggest that licorice supplementation for 10 days might not attenuate the high-intensity exercise-induce muscle injury but may enhance the whole-body insulin sensitivity.

• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.74-79
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• 2022

In this study, the plasma corrosion resistance and the change in the number of contamination particles generated using the plasma etching process and cleaning process of coating parts for semiconductor plasma etching equipment were investigated. As the coating method, atmospheric plasma spray (APS) was used, and the powder materials were Y₂O₃ and Y₃Al₅O₁₂ (YAG). There was a clear difference in the densities of the coatings due to the difference in solubility due to the melting point of the powdered material. As a plasma environment, a mixed gas of CF₄, O₂, and Ar was used, and the etching process was performed at 200 W for 60 min. After the plasma etching process, a fluorinated film was formed on the surface, and it was confirmed that the plasma resistance was lowered and contaminant particles were generated. We performed a surface cleaning process using piranha solution(H₂SO₄(3):H₂O₂(1)) to remove the defect-causing surface fluorinated film. APS-Y₂O₃ and APS-YAG coatings commonly increased the number of defects (pores, cracks) on the coating surface by plasma etching and cleaning processes. As a result, it was confirmed that the generation of contamination particles increased and the breakdown voltage decreased. In particular, in the case of APS-YAG under the same cleaning process conditions, some of the fluorinated film remained and surface defects increased, which accelerated the increase in the number of contamination particles after cleaning. These results suggest that contaminating particles and the breakdown voltage that causes defects in semiconductor devices can be controlled through the optimization of the APS coating process and cleaning process.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.12
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• pp.596-600
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• 2004

In this study, the surface properties of PET film were analyzed after plasma surface treatment. After plasma treatment of surface roughness and XPS were evaluated to analyze the chemical property, while the surface potential decay and surface resistance rate was measured to analyze the electric관 characteristic. When plasma discharge treatment was conducted for less than 10 minutes, the electrical insulating property was improved by evaporation of low molecular weight materials and cleaning of surface. However, when the treatment was conducted for more than 10 minutes, the insulating property was decreased due to excessive discharge energy. Analyses of chemical characteristics showed that 10-minute treatment resulted in increase of C-O and O=C-O bonds. However, when treated for more than 10 minutes. they were relatively decreased.

• Korean Journal of Materials Research
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• v.12 no.6
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• pp.427-430
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• 2002

Plasma nitrocarburizing treatment was performed for SCM 435 steel by using a plasma ion nitriding system. The effects of the variation of nitrogen and methan contents upon the hardened layer was investigated. Both the thickness of the compound layer and the amount of $\varepsilon$ phase in the compound layer increased with increasing nitrogen content. However, the thickness of the compound layer decreased due to unstable plasma for an atmosphere containing 90% $N_2$ gas content in the gas mixture. The amount of $\varepsilon$phase in the compound layer increased with increasing $CH_4$ gas content. For $CH_4$ gas content more than 2% in the gas mixture, the thickness of the compound layer decreased due to the formation of $\theta$ phase.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.5
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• pp.424-428
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• 2003

The channel of a superconducting flux flow transistor has been fabricated with plasma etching method using a inductively coupled plasma etching. The ICP conditions then were ICP Power of 450 W, rf chuck power of 150 W, the pressure in chamber of 5 mTorr, and Ar : Cl$_2$=1:1. Especially, over the 5 mTorr, the superconducting thin films were not etched. The channel etched by plasma gas showed the critical temperature over 85 K. The critical current of the SFFT was altered by varying the external applied current. As the external applied current increased from 0 to 12 mA, the critical current decreased from 28 to 22 mA. Then the obtained trans-resistance value was smaller than 0.1 $\Omega$ at a bias current of 40 mA.

• Corrosion Science and Technology
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• v.6 no.5
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• pp.251-256
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• 2007

Plasma nitriding is a surface treatment process which is increasingly used to improve wear, fatigue and corrosion resistance of industrial parts. Active screen plasma nitriding (ASPN) has both the advantages of the classic cold wall and the hot wall conventional dc plasma nitriding (DCPN) method and the parts to be nitrided are no longer directly exposed to the plasma. In this study, AS plasma nitriding has been used to nitride the UNS S31803 duplex stainless steel, AISI 304 and AISI 316 austenitic stainless steel, and AISI 420 martensitic stainless steel. Treated specimenswere characterized by means of microstructural analysis, microhardness measurements and electrochemical tests in NaCl aerated solutions. Hardness of the nitride cases of AISI 420 stainless steel by Knoop test can get up to 1300 HK0.1. From polarization tests, the corrosion current densities of AISI 420 and UNS S31803specimens ASPN at $420^{\circ}C$ were generally lower than those of their untreated substrates. The corrosion resistance of UNS S31803 duplex stainless steel can be enhanced by plasma nitriding at $420^{\circ}C$ Cowing to the formation of the S-phase.