• Journal of the Korean Society for Heat Treatment
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• v.13 no.2
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• pp.91-97
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• 2000

The structure and mechanical properties of TiN and TiCN thin films deposited on STD61 steel substrates by the RF-sputtering methods has been studied by using XPS, XRD, micro-hardness tester, scratch tester, and wear-resistance tester. XPS results showed that the TiCN thin film formed with chemical bonding state. The TiN thin films grew with (111) orientation having the lowest strain energy by compressive stress, whereas the TiCN thin films grew with both (111) and (200) orientation, but (200) orientation having the lowest surface energy becomes dominant as carbon contents increase. The pre-etching treatment of substrate did not affect on the preferred orientation of thin films, but it played an important role in improving mechanical properties of thin films such as the hardness, adhesion and wear- resistance. Especially, the TiCN thin films showed the superior wear resistances due to high hardness and low friction coefficient compared with TiN thin films.

• Journal of Korea Foundry Society
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• v.29 no.5
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• pp.233-237
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• 2009

The effect of electrolyte on mechanical and corrosion properties of AZ91 magnesium alloy by plasma electrolytic oxidation (PEO) method was investigated. The coating layers formed in the silicate and the aluminate electrolytes showed porous structures. The small pores were randomly distributed on the coatings formed in aluminate electrolyte while the coatings formed in silicate electrolyte showed much bigger pores. In the aluminate electrolyte, the coatings were composed of Mg, MgO and $MgAl_2O_4$, whereas Mg, MgO, $MgAl_2O_4$ and $Mg_2SiO_4$ were identified in the coatings formed in silicate electrolyte. The hardness of coatings in the silicate electrolyte was higher than that of coating grown in the aluminate electrolyte. The AZ91 alloy coated in the silicate electrolyte had higher tensile strength and elongation than that coated in the aluminate electrolyte. In addition, the coatings formed in the silicate electrolyte showed much better corrosion resistance compared to the coatings formed in the aluminate electrolyte.

• Korean Journal of Metals and Materials
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• v.50 no.6
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• pp.469-475
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• 2012

A high-energy mechanical milling (HEMM) process was introduced to improve sinter-ability, and rapid sintering of spark plasma sintering (SPS) under pressure was used to make ultra fine grain (UFG) of Ti-Nb-Mo-CPP composites, which have bio-attractive elements, for increasing mechanical properties. Ti-Nb-Mo-CPP composites were successfully fabricated by SPS at $1000^{\circ}C$ within 5 minutes under 70 MPa using HEMMed powders. The Vickers hardness of the composites increased with increased milling time and addition of CPP contents. Biocompatibility and corrosion resistance of the Ti-Nb-Mo alloys were improved by addition of CPP, and the Ti-35%Nb-10%Mo-10%CPP alloy had better biocompatibility and corrosion resistance than the Ti-6Al-4V ELI alloy.

• Design & Manufacturing
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• v.13 no.1
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• pp.13-18
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• 2019

The size and prospects of the domestic semiconductor equipment market are increasing every year. In the case of various parts used inside semiconductor equipments, high durability such as high strength and abrasion resistance is demanded. Particularly, the gases used in semiconductor production processes are toxic. In order to prevent such toxic gas leakage, a precision processing technique and a surface treatment technique for preventing corrosion are required. Electro-polishing is an electro-chemical method of polishing a metal surface to make it smooth and polished. Electro-polishing is mainly used in the finishing process of metal surface. Unlike mechanical polishing, electro-polishing is used in many fields, such as fine chemical etching equipment, since no damaged layer or burr, fine polishing groove and particles are generated. However, in order to withstand the gas used in the semiconductor equipment, the parts must have high corrosion resistance. However, the surface hardness generally become lowered through electro-polishing. Therefore, in this study, surface hardness were experimentally observed before and after electro-polishing. Then, a method of improving hardness by preparing a nitrided layer by plasma ion nitriding treatment.

• Korean Journal of Metals and Materials
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• v.49 no.3
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• pp.270-274
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• 2011

Plasma electrolytic oxidation (PEO) treatment was performed on squeeze cast AZ31 alloy and $Al_{18}B_4O_{33}w/AZ31$ composite. Scanning electron microscope (SEM) was employed to characterize the surface morphology and cross-section microstructure of the coating. The phase structures of the PEO coating were analyzed by X-ray diffraction (XRD). The corrosion resistance of the PEO coating was evaluated by electrochemical method. The results showed that the $Al_{18}B_4O_{33}$ whisker on the surface of the composite was decomposed and $MgAl_2O_4$ was formed in the PEO coating layer of $Al_{18}B_4O_{33}w/AZ31$ composite during PEO treatment. As a result, the electrochemical corrosion potential of the PEO coated $Al_{18}B_4O_{33}w/AZ31$ composite was increased compared with that of AZ31 alloy.

• Journal of the Korea Institute of Building Construction
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• v.21 no.6
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• pp.539-550
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• 2021

In this study, Zn and Zn-15Al were coated on general carbon steel by plasma arc metal spraying and then immersed in a 3.5wt.% NaCl solution similar to the seawater environment to evaluate the corrosion resistance properties. Through the surface shape analysis test by SEM and XRD, it was found that the Zn coating was porous and needle-shaped, so the penetration of the electrolyte was easy, and thus the corrosion rate was rapid. On the other hand, the Zn-15Al coating had a uniform and dense shape and was shown to suppress corrosion.

• Tribology and Lubricants
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• v.39 no.1
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• pp.13-20
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• 2023

Large drill bits may face high hardness ore and high working pressure when working. To optimize the use effect of large drill bits and prolong the use time, it is necessary to add a layer of pressure-resistant, wear-resistant, and low-friction coating on the surface of the drill bit. In this study, CoCrNiAlTi high-entropy alloy coatings and CoCrNiAlTi (70 wt%)-TiC (30 wt%) composite coatings are successfully prepared on Q235 steel by plasma spraying. The CoCrNiAlTi (70 wt%)-TiC (30 wt%) coating consists of FCC solid solution and a small amount of TiC phase. The effect of TiC on the composition phase, microhardness, and elastic modulus of HEA coating is studied by X-ray diffractometer (XRD) and microhardness tester. The effect of TiC on the friction and wear properties of HEA coatings is investigated using a wear tester. By improving the process parameters, the metallurgical bonding between the coating and the substrate is well combined, and a coating without pores and cracks is obtained. The experimental results confirm that the microhardness, elastic modulus, and wear resistance of CoCrNiAlTi-TiC composite coating are better, and the friction coefficient is lower.

• Journal of the Microelectronics and Packaging Society
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• v.21 no.3
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• pp.25-29
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• 2014

Plasma organic thin film for PCB surface finish is a potential replacement of the conventional PCB finishes because of environment-friendly process, high corrosion-resistance and long shelf life over 1 year. In this study, solder joint properties of the plasma organic surface finish were estimated and compared with OSP surface finish. The plasma surface finish was deposited by chemical vapor deposition from fluorine-based precursors. The thickness of the plasma organic coating was 20 nm. Sn-3.0Ag-0.5Cu (SAC305) solder was used as solder joint materials. From a salt spray test, the plasma organic coating had higher corrosion resistance than the OSP surface finish. The spreadability of SAC305 on plasma organic coating was higher than that on OSP surface finish. SEM and TEM micrographs showed that the interfacial microstructure of the plasma surface finish sample were similar to that of the OSP sample. Solder joint strength of the plasma finish sample was also similar to that of the OSP finished sample.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.33 no.4
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• pp.153-157
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• 2023

In order to manufacture a semiconductor circuit, etching, cleaning, and deposition processes are repeated. During these processes, the inside of the processing chamber is exposed to corrosive plasma. Therefore, the coating of the inner wall of the semiconductor equipment with a plasma-resistant material has been attempted to minimize the etching of the coating and particle contaminant generation. In this study, we mixed AlF₃ powder with the solid-state reacted yttrium oxyfluoride (YOF) in order to increase plasma-etching resistance of the plasma spray coated YOF layer. Effects of the mixing ratio of AlF₃ with YOF powder on crystal structure, microstructure and chemical composition were investigated using XRD and FE-SEM. The plasma-etching ratios of the plasma-spray coated layers were calculated and correlation with AlF₃ mixing ratio was analyzed.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.60 no.12
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• pp.2276-2280
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• 2011

An indium-tin-oxide (ITO) is normally used as a substrate in organic photovoltaic cells. We examined the effects of an oxygen ($O_2$) plasma treatment on the electrical properties of an organic photovoltaic cell. Experiments with four-point probe method and atomic force microscope revealed the lowest surface resistance of 17.64 ${\Omega}$/sq and the lowest average surface roughness of 1.39 nm at the plasma treatment power of 250 W. A device structure of ITO/CuPc/$C_{60}$/BCP/$Cs_2CO_3$/Al was fabricated by thermal evaporation with and without the plasma treated ITO substrate. It was found that the power conversion efficiency of the cell with the plasma treated ITO is 65 % higher than the one without the plasma treated ITO.