• Title/Summary/Keyword: Plasma resistance

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Fundamental Study on Ni-Base Self-Fluxing Alloy Coating(II) - The Effect of Strengthening Treatment on Mechanical Properties of Coating Layer - (Ni-기 자융성합금의 코팅에 관한 기초적 연구(II) - 코팅층의 기계적 특성에 미치는 강화처리의 영향 -)

  • Kim, Y.S.;Oh, M.S.
    • Journal of Power System Engineering
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    • v.2 no.2
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    • pp.35-40
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    • 1998
  • In this study, the author investigated the effects of strengthening treatments on the mechanical properties of plasma sprayed Ni-base self fluxing alloy. Strengthening treatments for sprayed specimens were carried out in 4 different temperature conditions in vacuum furnace. The mechanical properties, such as microhardness, thermal shock resistance and erosion resistance were tested for the sprayed specimens after strengthening treatments. And it was proved that the mechanical properties of coating layer were much improved by strengthening treatments.

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The heat treatment characteristics of plasma sprayed ZrO$_2$-Y$_2$O$_3$ coatings (플라즈마 용해법에 의한 ZrO$_2$-Y$_2$O$_3$ 피복층의 가열처리효과)

  • 정병근;김한삼;김수식
    • Journal of the Korean institute of surface engineering
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    • v.27 no.1
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    • pp.12-18
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    • 1994
  • The plasma spray process was used to deposit coatings of $ZrO_2$-8wt%Y2O3 powders on mild steel sub-strate, and the characteristics of as-deposited and heat treated coatings have been investigated. Particulary, the variations of porosity, wear resistance, thermal barrier and thermal shock resistance in $ZrO_2$-8wt% $Y_2O_3$coatings after heat treatment under vacuum circumstance have been investigated. The porosity of the coating layer was increased with increased spray distance. In the case of the arc current of 450A and at the spray distance of 50mm, it was obtained the lowest amount of porosity. After heat treatment, the amount of porosity was found to be decreased, and the wear resistance, microhardness and thermal shock resistance were im-proved. However, the thermal barrier was decreased.

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Effects of plasma ion nitriding temperature using DC glow discharge on improvement of corrosion resistance of 304 stainless steel in seawater (천연 해수에서 304 스테인리스강의 내식성에 미치는 DC glow 방전 플라즈마 이온질화처리 온도의 영향)

  • Chong, Sang-Ok;Park, Il-Cho;Kim, Seong-Jong
    • Journal of Advanced Marine Engineering and Technology
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    • v.41 no.3
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    • pp.238-244
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    • 2017
  • Plasma ion nitriding has been widely used in various industries to improve the mechanical properties of materials, especially stainless steels by increasing the surface hardness. It has the particular advantages of less distortion compared to that in the case of hardening of steel, gas nitriding, and carburizing; in addition, it allows treatment at low-temperatures, and results in a high surface hardness and improved corrosion resistance. Many researchers have demonstrated that the plasma ion nitriding process should be carried out at temperatures of below $450^{\circ}C$ to improve corrosion resistance via the formation of the expanded austenite phase(S-phase). Most experimentals studied to date have been carried out in chloride solutions like HCl or NaCl. However, the electrochemical characteristics for the chloride solutions and natural seawater differ. Hence, in this work, plasma ion nitriding of 304 stainless steels was performed at various temperatures, and the electrochemical characteristics corresponding to the different process temperatures were analyzed for the samples in natural seawater. Finally the optimum plasma ion nitriding temperature that resulted in the highest corrosion resistance was determined.

Evaluation of Plasma Spray Hydroxy Apatite coatings on Metallic Materials

  • Take, S.;Mitsui, K.;Kasahara, M.;Sawai, R.;Izawa, S.;Nakayama, M.;Itoi, Y.
    • Corrosion Science and Technology
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    • v.6 no.6
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    • pp.286-290
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    • 2007
  • Biocompatible Hydroxy apatite (HAp) coatings on metallic substrate by plasma spray techniques have been developed. Long-term credibility of plasma spray HAp coatings has been evaluated in physiological saline by electrochemical measurements. It was found that the corrosion resisitance of SUS316L based HAp/Ti conbined coatings was excellent even after more than 10 weeks long-term immersion. It was shown that postal heat treatment improved both the crystallinity and corrosion resistance of HAp. By lowering cooling rate during heat treatment process, less cracks produced in HAp coating layer, which lead to higher credibility of HAp during immersion in physiological saline. The ICP results showed that the dissolution level of substrate metallic ions was low and HAp coatings produced in this research can be acceptable as biocompatible materials. Also, the concentration of dissolved ions from HAp coatings with postal heat treatment was lower compared to those from samples without postal heat treatment. The adherence of HAp coatings with Ti substrate and other mechanical properties were also assessed by three-point bending test. The poor adhesion of HAp coating to titanium substrate can be improved by introducing a plasma spray titanium intermediate layer.

Synthesis of SiC Nano-powder from TEOS by RF Induction Thermal Plasma (RF 열플라즈마를 이용한 TEOS로 부터의 SiC 나노분말 합성)

  • Ko, Sang-Min;Koo, Sang-Man;Kim, Jin-Ho;Kim, Ji-Ho;Byeon, Myeong-Seob;Hwang, Kwang-Taek
    • Journal of the Korean Ceramic Society
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    • v.48 no.1
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    • pp.1-5
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    • 2011
  • Silicon carbide (SiC) has recently drawn an enormous industrial interest because of its useful mechanical properties such as thermal resistance, abrasion resistance and thermal conductivity at high temperature. RF Thermal plasma (PL-35 Induction Plasma, Tekna CO., Canada) has been utilized for synthesis of high purity SiC powder from cheap inorganic solution (Tetraethyl Orthosilicate, TEOS). It is found that the powders by thermal plasma consist of SiC with free carbon and amorphous silica ($SiO_2$) and, by thermal treatment and HF treatment, the impurities are driven off resulting high purity SiC nano-powder. The synthesized SiC powder lies below 30 nm and its properties such microstructure, phase composition, specific surface area and free carbon content have been characterized by X-ay diffraction (XRD), field emission scanning electron microscopy (FE-SEM), thermogravimetric (TG) and Brunauer-Emmett-Teller (BET).

Phase Stability and Plasma Erosion Resistance of La-Gd-Y Rare-earth Oxide - Al2O3 Ceramics (La-Gd-Y 희토류계 산화물-알루미나 세라믹스의 상안정화 영역과 내플라즈마 특성)

  • Kim, Kyeong-Beom;Lee, Sung-Min
    • Journal of the Korean Ceramic Society
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    • v.47 no.6
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    • pp.540-545
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    • 2010
  • In this study, we have investigated new plasma resistant materials with less usage of rare-earth oxides than $Y_2O_3$ which is currently used in the semiconductor industry. We observed the stability ranges of $(Gd{\cdot}Y)_3Al_5O_{12}$ and $(La{\cdot}Y)Al_{11}O_{18}$ ternary systems, and measured their etch rates under typical fluorine plasma. $(Gd{\cdot}Y)_3Al_5O_{12}$ system showed an extensive solid solution up to 80 mol% gadolinium, but $(La{\cdot}Y)Al_{11}O_{18}$ showed a negligible substitution between rare-earth ions, which can be explained by the differences between the ionic radii. The etch rates depended on the total amount of rare-earth oxides but not on the substitution of the rare-earth ions. When the specimen was examined using XPS after the exposure to fluorine plasma, the strong surface fluorination was observed with a shift of the binding energy to higher energy.

PLASMA SOURCE ION IMPLANTATION OF NITROGEN AND CARBON IONS INTO CO-CEMENTED WC

  • Han, Seung-Hee;Lee, Yeon-Hee;Lee, Jung-Hye;Kim, Hai-Dong;Kim, Gon-Ho;Kim, Yeong-Woo;Cho, Jung-Hee
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.220-220
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    • 1999
  • In plasma source ion implantation, the target is immersed in the plasma and repetitively biased by negative high voltage pulses to implant the extracted ions from plasma into the surface of the target material. In this way, the problems of line-of-sight implantation in ion-beam ion implantation technique can be effectively solved. In addition, the high dose rate and simplicity of the equipment enable the ion implantation a commercially affordable process. In this work, plasma source ion implantation technique was used to improve the wear resistance of Co-cemented WC. which has been extensively used for high speed tools. Nitrogen and carbon ions were implanted using the pulse bias of -602kV, 25 sec and at various implantation conditions. The implanted samples were examined using scanning Auger electron spectroscopy and XPS to investigate the depth distributions of implanted ions and to reveal the chemical state change due to the ion implantation. The implanted ions were found to have penetrated to the depth of 3000$\AA$. The wear resistance of the implanted samples was measured using pin-on-disc wear tester and the wear tracks were examined with alpha-step profilometer.

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Characteristics of Carbon Tetrafluoride Plasma Resistance of Various Glasses

  • Choi, Jae Ho;Han, Yoon Soo;Lee, Sung Min;Park, Hyung Bin;Choi, Sung Churl;Kim, Hyeong Jun
    • Journal of the Korean Ceramic Society
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    • v.53 no.6
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    • pp.700-706
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    • 2016
  • Etch rate, surface roughness and microstructure as plasma resistance were evaluated for six kinds of oxide glass with different compositions. Borosilicate glass (BS) was found to be etched at the highest etch rate and zinc aluminum phosphate glass (ZAP) showed a relatively lower etch rate than borosilicate. On the other hand, the etching rate of calcium aluminosilicate glass (CAS) was measured to be similar to that of sintered alumina while yttrium aluminosilicate glass (YAS) showed the lowest etch rate. Such different etch rates by mixture plasma as a function of glass compositions was dependent on whether or not fluoride compounds were formed on glass and sublimated in high vacuum. Especially, in view that $CaF_2$ and $YF_3$ with high sublimation points were formed on the surface of CAS and YAS glasses, both CAS and YAS glasses were considered to be a good candidate for protective coating materials on the damaged polycrystalline ceramics parts in semi-conductor and display processes.

Optical Properties of Organic Light Emitting Diode and Characteristics of ITO by Variation of Radio Frequency Plasma Power (Radio Frequency Plasma Power변화에 따른 ITO 특성 및 OLED의 광학적 특성)

  • Ki, Hyun-Chul;Kim, Hwe-Jong;Hong, Kyung-Jin;Kim, En-Mei;Gu, Hal-Bon
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.1
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    • pp.81-85
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    • 2009
  • We has been analysed optical properties of OLED(organic light emitting diode) and characteristics of ITO(Indium Tin Oxide) in terms of $O_2$ plasma treatment for manufacturing high efficiency OLED, RF power of $O_2$ plasma was changed 25, 50, 100, 200 W. $O_2$ gas flow, gas pressure and treatment time were fixed. Sheet resistance and surface roughness of ITO were measured by Hall-effect measurement system and AFM, respectively. The ranges of sheet resistance and surface roughness were $5.5{\sim}6,06\;{\Omega}$ and $2.438{\sim}3.506\;nm$ changing of RF power, respectively, PM(Passive Matrix)OLED was fabricated with the structure of ITO(plasm treatment)/TPD($400\;{\AA}$)/$Alq_3(600\;{\AA})$/LiF($5\;{\AA}$)/Al($1200\;{\AA}$). Turn-on voltage of PMOLED was 7 V and luminance was $7,371\;cd/m^2$ at the RF power of 25 W, $O_2$ plasma treatment of ITO surface was result in lowering the operating voltage and improving luminance of PMOLED.

Synthesis of Silicon Carbide Nano-Powder from a Silicon-Organic Precursor by RF Inductive Thermal Plasma (RF 유도 열플라즈마를 이용한 유기 용매로 부터의 탄화규소 나노 분말 합성)

  • Ko, Sang-Min;Koo, Sang-Man;Kim, Jin-Ho;Cho, Woo-Seok;Hwang, Kwang-Taek
    • Journal of the Korean Ceramic Society
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    • v.49 no.6
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    • pp.523-527
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    • 2012
  • Silicon carbide (SiC) has recently drawn an enormous amount of industrial interest due to its useful mechanical properties, such as its thermal resistance, abrasion resistance and thermal conductivity at high temperatures. In this study, RF thermal plasma (PL-35 Induction Plasma, Tekna CO., Canada) was utilized for the synthesis of high-purity SiC powder from an organic precursor (hexamethyldisilazane, vinyltrimethoxysilane). It was found that the SiC powders obtained by the RF thermal plasma treatment included free carbon and amorphous silica ($SiO_2$). The SiC powders were further purified by a thermal treatment and a HF treatment, resulting in high-purity SiC nano-powder. The particle diameter of the synthesized SiC powder was less than 30 nm. Detailed properties of the microstructure, phase composition, and free carbon content were characterized by X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), a thermogravimetric (TG) analysis, according to the and Brunauer-Emmett-Teller (BET) specific surface area from N2 isotherms at 77 K.