• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.12
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• pp.601-605
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• 2006

The resistance-capacitance (RC) delay of signals through interconnection materials becomes a big hurdle for high speed operation of semiconductors which contain multi-layer interconnections in smaller scales with higher integration density. Low-k materials are applied to the inter-metal dielectric (IMD) materials in order to overcome the RC delay. Relaxation continuum (RCT) model that includes neutral-species transport model have developed to model the etching process in a capacitively coupled plasma (CCP) device. We present the parametric study of the modeling results of a two-frequency capacitively coupled plasma (2f-CCP) with $N_2/H_2$ gas mixture that is known as promising one for organic low-k materials etching. For the etching of low-k materials by $N_2/H_2$ plasma, N and H atoms have a big influence on the materials. Moreover the distributions of excited neutral species influence the plasma density and profile. We include the neutral transport model as well as plasma one in the calculation. The plasma and neutrals are calculated self-consistently by iterating the simulation of both species till a spatio-temporal steady state profile could be obtained.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.207-207
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• 2016

plasma group velocities of neon with oxygen admixture (ug) are obtained by intensified charge coupled device (ICCD) camera images at fixed gate width time of 5 ns. The propagation velocities outside interelectrode region are in the order of 104 m/s.The plasma ambipolar diffusion velocities are calculated to be in the order of 102 m/s. Plasma jet is generated by all fixed sinusoidal power supply, total gas flow and repetition frequency at 3 kV, 800 sccm and 40 kHz, respectively. The amount of oxygen admixture is varied from 0 to 2.75 %. By employing one dimensional convective wave packet model, the electron temperatures in non-thermal atmospheric-pressure plasma jet are estimated to be in a range from 1.65 to 1.95 eV.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.156.1-156.1
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• 2015

Neon and argon plasma group velocities (ug) are obtained by intensified charge coupled device (ICCD) camera images at fixed gate width time of 5 ns. The propagation velocities in upstream and downstream region are in the order of 104-105 m/s. The plasma ambipolar diffusion velocities are calculated to be in the order of 101-102 m/s. Plasma jet is generated by sinusoidal power supply in varying voltages from 1 to 4 kV at repetition frequency of 40 kHz. By employing one dimensional convective wave packet model, the neon and argon electron temperatures in non-thermal atmospheric-pressure plasma jet are estimated to be 1.95 and 1.18 eV, respectively.

• Proceedings of the KIEE Conference
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• 2006.04a
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• pp.96-98
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• 2006

A new ex-situ model to diagnose a plasma processing equipment was presented. The model was constructed by combining wavelet, scanning electron microscope, ex-situ measurement of etching profile, and neural network. The diagnosis technique was applied to a tungsten etching process, conducted in a $SF_6$ helicon plasma. The wavelet was used to characterize detailed variations of plasma-etched surface. The diagnosis model was constructed with the vertical wavelet component. For comparison, a conventional model was built by using the estimated profile data. Compared to the conventional model, the wavelet-based model, demonstrated a much improved diagnosis.

• Journal of Welding and Joining
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• v.34 no.2
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• pp.67-72
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• 2016

Aluminum alloy is one of light weight material and it is used to make LNG tank and ship. However, in order to weld aluminum alloy high density heat source is needed. In this paper, I-butt welding of Al 5083 with 6mm thickness using Plasma-MIG welding was carried out. The experiment was performed to investigate the influence of plasma-MIG welding parameters such as plasma current, wire feeding rate, MIG-welding voltage and welding speed on the tensile strength of weld. In addition we suggested 3 strength estimation models which are second order polynomial regression model, multiple nonlinear regression model and neural network model. The estimation performance of 3 models was evaluated in terms of average error rate (AER) and their values were 0.125, 0.238, and 0.021 respectively. Neural network model which has training concept and reflects non -linearity was best estimation performance.

• Journal of international Conference on Electrical Machines and Systems
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• v.3 no.1
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• pp.78-82
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• 2014

Power Transformers with more than one secondary winding are not uncommon in industrial applications. But new classes of applications where very large number of independent secondaries are used are becoming popular in controlled converters for medium and high voltage applications. Cascade H-bridge medium voltage drives and Pulse Step Modulation (PSM) based high voltage power supplies are such applications. Regulated high voltage power supplies (Fig. 1) with 35-100 kV, 5-10 MW output range with very fast dynamics (${\mu}S$ order) uses such transformers. Such power supplies are widely used in fusion research. Here series connection of isolated voltage sources with conventional switching semiconductor devices is achieved by large number of separate transformers or by single unit of multi-secondary transformer. Naturally, a transformer having numbers of secondary windings (~40) on single core is the preferred solution due to space and cost considerations. For design and simulation analysis of such a power supply, the model of a multi-secondary transformer poses special problem to any circuit analysis software as many simulation softwares provide transformer models with limited number (3-6) of secondary windings. Multi-Secondary transformer models with 3 different schemes are available. A comparison of test results from a practical Multi-secondary transformer with a simulation model using magnetic component is found to describe the behavior closer to observed test results. Earlier models assumed magnetising inductance in a linear loss less core model although in actual it is saturable core made-up of CRGO steel laminations. This article discusses a more detailed representation of flux coupled magnetic model with saturable core properties to simulate actual transformers very close to its observed parameters in test and actual usage.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.74-74
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• 2010

The aqua-plasma is the non-thermal plasma in electrical conductive electrolyte by generates the vapor film layer on the immersed metal electrode surface. This plasma can generate the hydroxyl radical by dissociate the water molecule with the plasma electron. To develop the plasma discharge device for high efficiency in the hydroxyl radical generation, proper model for estimation of plasma power is necessary. In this work, the 1-D spherical model was developed, considering temperature dependence material constants. The relation between the plasma power and hydroxyl generation was also studied by the comparison between the optical emission intensity from the hydroxyl radical using monochromator and estimated plasma power. First, the thickness of vapor layer thickness was estimated using the Navier-Stokes fluid equation in order to calculate the discharge E-field inside vapor layer. Using the E-field magnitude and power balance on the plasma generation, it was possible to estimate the plasma power. The plasma power was assumed to uniformly fill the vapor layer and the temperature of vapor layer was fixed in the boiling temperature of electrolyte, 375K. In the experiment, the aqua-plasma was discharged in the saline by applied the voltage on the bipolar electrode. The range of applied voltage was 234 to 280V-rms in the frequency of 380 kHz. Two type electrodes were produced with two ${\Phi}0.2$ tungsten. The plasma power was estimated from the V-I signal from the two high voltage probes and current probe. The estimated plasma power agreed with the profile of emission intensity when the plasma discharged between the metal electrode and vapor layer surface. However, when the plasma discharged between the metal electrodes, the increasing rate of emission intensity was lower than the increase of plasma power. It implies that the surface reaction is more sufficient rather than the volume reaction in the radical generation, due to the high density of water molecule in the liquid.

• Nuclear Engineering and Technology
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• v.54 no.11
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• pp.4134-4145
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• 2022

The collimator is one of the high-heat-flux components used to avoid a series of vacuum and thermal problems. In this paper, the heat load distribution throughout the collimator is first calculated through experimental data, and a transient thermodynamic simulation analysis of the original model is carried out. The error of the pipe outlet temperature between the simulated and experimental values is 1.632%, indicating that the simulation result is reliable. Second, the model is optimized to improve the heat transfer performance of the collimator, including the contact mode between the pipe and the flange, the pipe material and the addition of a twisted tape in the pipe. It is concluded that the convective heat transfer coefficient of the optimized model is increased by 15.381% and the maximum wall temperature is reduced by 16.415%; thus, the heat transfer capacity of the optimized model is effectively improved. Third, to adapt the long-pulse steady-state operation of the experimental advanced superconducting Tokamak (EAST) in the future, steady-state simulations of the original and optimized collimators are carried out. The results show that the maximum temperature of the optimized model is reduced by 37.864% compared with that of the original model. The optimized model was changed as little as possible to obtain a better heat exchange structure on the premise of ensuring the consumption of the same mass flow rate of water so that the collimator can adapt to operational environments with higher heat fluxes and long pulses in the future. These research methods also provide a reference for the future design of components under high-energy and long-pulse operational conditions.

• Proceedings of the Zoological Society Korea Conference
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• 2000.10a
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• pp.283.2-283
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• 2000

No Abstract, See Full Text

• Bulletin of the Korean Chemical Society
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• v.32 no.11
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• pp.3967-3972
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• 2011

A whole body physiologically based pharmacokinetic (PBPK) model was applied to investigate absorption, distribution, and physiologic variations on pharmacokinetics of imatinib in human body. Previously published pharmacokinetic data of the drug after intravenous (i.v.) infusion and oral administration were simulated by the PBPK model. Oral dose absorption kinetics were analyzed by adopting a compartmental absorption and transit model in gut section. Tissue/plasma partition coefficients of drug after i.v. infusion were also used for oral administration. Sensitivity analysis of the PBPK model was carried out by taking parameters that were commonly subject to variation in human. Drug concentration in adipose tissue was found to be higher than those in other tissues, suggesting that adipose tissue plays a role as a storage tissue for the drug. Variations of metabolism in liver, body weight, and blood/plasma partition coefficient were found to be important factors affecting the plasma concentration profile of drug in human body.