• Title/Summary/Keyword: Plasma formation

Search Result 1,024, Processing Time 0.026 seconds

Property of Nickel Silicides with Hydrogenated Amorphous Silicon Thickness Prepared by Low Temperature Process (나노급 수소화된 비정질 실리콘층 두께에 따른 저온형성 니켈실리사이드의 물성 연구)

  • Kim, Jongryul;Choi, Youngyoun;Park, Jongsung;Song, Ohsung
    • Korean Journal of Metals and Materials
    • /
    • v.46 no.11
    • /
    • pp.762-769
    • /
    • 2008
  • Hydrogenated amorphous silicon(a-Si : H) layers, 120 nm and 50 nm in thickness, were deposited on 200 $nm-SiO_2$/single-Si substrates by inductively coupled plasma chemical vapor deposition(ICP-CVD). Subsequently, 30 nm-Ni layers were deposited by E-beam evaporation. Finally, 30 nm-Ni/120 nm a-Si : H/200 $nm-SiO_2$/single-Si and 30 nm-Ni/50 nm a-Si:H/200 $nm-SiO_2$/single-Si were prepared. The prepared samples were annealed by rapid thermal annealing(RTA) from $200^{\circ}C$ to $500^{\circ}C$ in $50^{\circ}C$ increments for 30 minute. A four-point tester, high resolution X-ray diffraction(HRXRD), field emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM), and scanning probe microscopy(SPM) were used to examine the sheet resistance, phase transformation, in-plane microstructure, cross-sectional microstructure, and surface roughness, respectively. The nickel silicide on the 120 nm a-Si:H substrate showed high sheet resistance($470{\Omega}/{\Box}$) at T(temperature) < $450^{\circ}C$ and low sheet resistance ($70{\Omega}/{\Box}$) at T > $450^{\circ}C$. The high and low resistive regions contained ${\zeta}-Ni_2Si$ and NiSi, respectively. In case of microstructure showed mixed phase of nickel silicide and a-Si:H on the residual a-Si:H layer at T < $450^{\circ}C$ but no mixed phase and a residual a-Si:H layer at T > $450^{\circ}C$. The surface roughness matched the phase transformation according to the silicidation temperature. The nickel silicide on the 50 nm a-Si:H substrate had high sheet resistance(${\sim}1k{\Omega}/{\Box}$) at T < $400^{\circ}C$ and low sheet resistance ($100{\Omega}/{\Box}$) at T > $400^{\circ}C$. This was attributed to the formation of ${\delta}-Ni_2Si$ at T > $400^{\circ}C$ regardless of the siliciation temperature. An examination of the microstructure showed a region of nickel silicide at T < $400^{\circ}C$ that consisted of a mixed phase of nickel silicide and a-Si:H without a residual a-Si:H layer. The region at T > $400^{\circ}C$ showed crystalline nickel silicide without a mixed phase. The surface roughness remained constant regardless of the silicidation temperature. Our results suggest that a 50 nm a-Si:H nickel silicide layer is advantageous of the active layer of a thin film transistor(TFT) when applying a nano-thick layer with a constant sheet resistance, surface roughness, and ${\delta}-Ni_2Si$ temperatures > $400^{\circ}C$.

A Study on How to Kill Airborne Bacteria and Viruses in Elementary Schools (초등학교내 공기중 부유세균 및 바이러스 사멸방법에 대한 연구)

  • Lee, Su Yeon;Kim, Chang Soo;Kwak, Eun Mi;Im, Jong Eon;Jeon, Jae Hwan;Kwon, Jun Ho
    • Journal of the Society of Disaster Information
    • /
    • v.18 no.3
    • /
    • pp.566-573
    • /
    • 2022
  • Purpose: This study attempted to verify the effectiveness of the application of air sterilizers in elementary schools at risk of group infection among vulnerable groups in order to address fears of new infectious diseases that have increased since the outbreak of Middle East Respiratory Syndrome (MERS) and Coronavirus infection-19 (COVID-19). Method: One air sterilizer was installed in each classroom, cafeteria, and bathroom of an elementary school in Seoul, and surface and air samples were collected at a distance of 2m from the air sterilizer, and the bacterial reduction effect was analyzed compared to the uninstalled control group. Result: The sterilization effect on the surface was less than 2log CFU/cm2 in both the control group and the test group, and the test group showed 54 to 87% less general bacterial colony formation than the control group. In addition, the sterilization effect in the air differed depending on the location of the air sterilizer, and the wall installation showed a reduction effect of up to 91% compared to the control group, and the central installation showed a reduction effect of up to 93%. Conclusion: As a result of the study, it is expected that the prevention of infectious diseases can be increased by maintaining the current quarantine program in elementary schools that conduct regular disinfection while applying air sterilizers. In addition, it is considered desirable to facilitate the inflow of air into the air sterilizer.

The Effect of Combined Estrogen/calcium Therapy on Bone Metabolism in Ovariectomized Rats I. A Study on Biochemical Parameters in Ovariectomized Rats (에스트로겐/칼슘 혼합요법이 난소절제 쥐의 골대사에 미치는 영향 I. 생화학적 변화에 관한 연구)

  • 이경화;오승호
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.25 no.6
    • /
    • pp.993-1005
    • /
    • 1996
  • This study was implemented in order to investigate the effects of dietary calcium-salt, estrogentreatment, and estrogen/calcium treatment on bone metabolism. Ovariectomized rats were used as animal models. Female Sprague-Dawley rats with a body weight of 250~280g were underwent ovariectomy or sham-operation. The ovariectomized rats were divided into 9 different experimental groups including the saline-treated group, the estrogen-treated group, the high calcium salt-treated group, and the estrogen/calcium treated groups and fed for 6 weeks. Creatinine and hydroxyproline in urine were analyzed. Creatinine, calcitonin, osteocalcin, alkaline phosphatase and parathyroid hormone in plasma were also determined. The results of the experiment are as follows : The ovariectomy caused a significant increase in the level of food intake, food effciency ratio and body weight gain in comparison with sham-operation. The overall food intake, food effciency ratio and body weight gain were significantly decreased by estrogen. The ovariectomized animals developed obesity as a result of increased food intake. In addition, estradiol injections suppressed food intake with a concomitant loss in body weight. The level or urinary hydroxyproline, as an indicator or bone resorntion, was higher in the ovariectomized rats compared to sham-opertion, while these decresed in the estrogen/calcium treated group. Parathyroid hormone and calcitonin in the plasma, that were used as the indicator of calcium homeostasis, parathyroid hormone higher in the ovariectomized rats compared to sham-operation. It was lowered by estrogen and high calcium treated groups; thus, estrogen and estrogen/calcium treated groups were decreased by 32% compared to saline treated group. Osteocalcin and alkaline phosphatase which are indicators of bone formation, were significantly higher in ovariectomized group, while this showed to be decreased in the estrogen and the ostrogenicalcium treated groups. Estrogen and estrogen/calcium in ovariectomized rats resulted in lower bone loss. However, estrogen treated group its gradual reduction showed little effect on bone loss, while the gradual reduction of estrogen had a preventive effect on bone loss when the treatment was combined with calcium intensification.

  • PDF

Radioprotective Effects of Post-Treatment with Hesperetin against γ-Irradiation-Induced Tissue Damage and Oxidative Stress in BALB/c Mice (BALB/c 마우스에서 감마선 조사로 유도된 조직 손상과 산화적 스트레스에 대한 헤스페레틴 투여 후의 방사선방호 효과)

  • Kang, Jung Ae;Nam, You Ree;Rho, Jong Kook;Jang, Beom-Su;Chung, Young-Jin;Park, Sang Hyun
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.44 no.5
    • /
    • pp.657-663
    • /
    • 2015
  • Ionizing radiation induces cell damage through formation of reactive oxygen species. The present study was designed to evaluate the protective effects of post-treatment with hesperetin against ${\gamma}$-irradiation-induced cellular damage and oxidative stress in BALB/c mice. Healthy female BALB/c mice were exposed to ${\gamma}$-irradiation and administered hesperetin (25 mg/kg and 50 mg/kg, b.w., orally) for 7 days after 6 Gy of ${\gamma}$-irradiation. Exposure to ${\gamma}$-irradiation resulted in hematopoietic system damage manifested as decreases in spleen indexes and WBC count. In addition, hepatocellular damage characterized by increased levels of aspartate aminoransferase (AST) and alanine aminotransferase (ALT) in plasma. However, post-irradiation treatment with hesperetin provided significant protection against hematopoietic system damage and decreased AST and ALT levels in plasma. The results indicate that ${\gamma}$-irradiation induced increases in lipid peroxidation and xanthine oxidase (XO) as well as decreases in antioxidant enzymes (superoxide dismutase, catalase, and glutathione peroxidase) and glutathione (GSH) in the liver. These effects were also attenuated by post-treatment with hesperetin, which decreased lipid peroxidation and XO as well as increased antioxidant enzymes and GSH. These results show that post-treatment with hesperetin offers protection against ${\gamma}$-irradiation-induced tissue damage and oxidative stress and can be developed as an effective radioprotector during radiotherapy.

A bilayer diffusion barrier of atomic layer deposited (ALD)-Ru/ALD-TaCN for direct plating of Cu

  • Kim, Soo-Hyun;Yim, Sung-Soo;Lee, Do-Joong;Kim, Ki-Su;Kim, Hyun-Mi;Kim, Ki-Bum;Sohn, Hyun-Chul
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2008.06a
    • /
    • pp.239-240
    • /
    • 2008
  • As semiconductor devices are scaled down for better performance and more functionality, the Cu-based interconnects suffer from the increase of the resistivity of the Cu wires. The resistivity increase, which is attributed to the electron scattering from grain boundaries and interfaces, needs to be addressed in order to further scale down semiconductor devices [1]. The increase in the resistivity of the interconnect can be alleviated by increasing the grain size of electroplating (EP)-Cu or by modifying the Cu surface [1]. Another possible solution is to maximize the portion of the EP-Cu volume in the vias or damascene structures with the conformal diffusion barrier and seed layer by optimizing their deposition processes during Cu interconnect fabrication, which are currently ionized physical vapor deposition (IPVD)-based Ta/TaN bilayer and IPVD-Cu, respectively. The use of in-situ etching, during IPVD of the barrier or the seed layer, has been effective in enlarging the trench volume where the Cu is filled, resulting in improved reliability and performance of the Cu-based interconnect. However, the application of IPVD technology is expected to be limited eventually because of poor sidewall step coverage and the narrow top part of the damascene structures. Recently, Ru has been suggested as a diffusion barrier that is compatible with the direct plating of Cu [2-3]. A single-layer diffusion barrier for the direct plating of Cu is desirable to optimize the resistance of the Cu interconnects because it eliminates the Cu-seed layer. However, previous studies have shown that the Ru by itself is not a suitable diffusion barrier for Cu metallization [4-6]. Thus, the diffusion barrier performance of the Ru film should be improved in order for it to be successfully incorporated as a seed layer/barrier layer for the direct plating of Cu. The improvement of its barrier performance, by modifying the Ru microstructure from columnar to amorphous (by incorporating the N into Ru during PVD), has been previously reported [7]. Another approach for improving the barrier performance of the Ru film is to use Ru as a just seed layer and combine it with superior materials to function as a diffusion barrier against the Cu. A RulTaN bilayer prepared by PVD has recently been suggested as a seed layer/diffusion barrier for Cu. This bilayer was stable between the Cu and Si after annealing at $700^{\circ}C$ for I min [8]. Although these reports dealt with the possible applications of Ru for Cu metallization, cases where the Ru film was prepared by atomic layer deposition (ALD) have not been identified. These are important because of ALD's excellent conformality. In this study, a bilayer diffusion barrier of Ru/TaCN prepared by ALD was investigated. As the addition of the third element into the transition metal nitride disrupts the crystal lattice and leads to the formation of a stable ternary amorphous material, as indicated by Nicolet [9], ALD-TaCN is expected to improve the diffusion barrier performance of the ALD-Ru against Cu. Ru was deposited by a sequential supply of bis(ethylcyclopentadienyl)ruthenium [Ru$(EtCp)_2$] and $NH_3$plasma and TaCN by a sequential supply of $(NEt_2)_3Ta=Nbu^t$ (tert-butylimido-trisdiethylamido-tantalum, TBTDET) and $H_2$ plasma. Sheet resistance measurements, X-ray diffractometry (XRD), and Auger electron spectroscopy (AES) analysis showed that the bilayer diffusion barriers of ALD-Ru (12 nm)/ALD-TaCN (2 nm) and ALD-Ru (4nm)/ALD-TaCN (2 nm) prevented the Cu diffusion up to annealing temperatures of 600 and $550^{\circ}C$ for 30 min, respectively. This is found to be due to the excellent diffusion barrier performance of the ALD-TaCN film against the Cu, due to it having an amorphous structure. A 5-nm-thick ALD-TaCN film was even stable up to annealing at $650^{\circ}C$ between Cu and Si. Transmission electron microscopy (TEM) investigation combined with energy dispersive spectroscopy (EDS) analysis revealed that the ALD-Ru/ALD-TaCN diffusion barrier failed by the Cu diffusion through the bilayer into the Si substrate. This is due to the ALD-TaCN interlayer preventing the interfacial reaction between the Ru and Si.

  • PDF

Construction of a Fluorescently Labeled Infectious R Peptide-Less Moloney MLV Molecular Clone for Analysis of Syncytium (합포체 분석을 위해 R 펩타이드가 결여된 형광 표지 Moloney 마우스레트로바이러스 Molecular Clone 제조)

  • Lee, Yong-Jin;Park, Jin-Woo;Lee, Kyu-Jun;Bae, Eun-Hye;Park, Sung-Han;Lim, Ji-Hyun;Kim, Sae-Ro-Mi;Jung, Yong-Tae
    • Korean Journal of Microbiology
    • /
    • v.45 no.3
    • /
    • pp.246-250
    • /
    • 2009
  • Retroviruses enter host cells by membrane fusion between the viral Env proteins on the virus membrane and a virus receptor on the cellular membrane. The envelope protein of the ecotropic Moloney murine leukemia virus is synthesized as a gp85 precursor and is proteolytically cleaved into an extracellular surface unit (SU) and the transmembrane protein (TM). The cytoplasmic tail (16 amino acid; R peptide) of the TM protein is further cleaved by the viral protease during virion maturation. Unlike the wild type Env protrin bearing the R peptide, R peptide-truncated Envelope induces syncytia in susceptible cells. To understand the mechanism of R peptidetruncated Env in syncytium formation, R peptide-truncated Env expressing full-length molecular clone containing EGFP in PRR (proline rich region) of Env was constructed. This molecular clone induced syncytia in transfected NIH3T3 cells, fluorescence was detected in the cytoplasm and at the plasma membrane, while the nuclei did not stain and appeared black by fluorescence microscopy. Interestingly, virions with truncated envelope produced from transfected NIH3T3 cells induced syncytia in NIH3T3 cells, but fluorescence was not detected in the same infected cells. It is believed that cell-free viruses direct the fusion of neighboring cells without infection. Our data suggests that use of EGFP-tagged envelope for monitoring syncytium is a sensitive and convenient method. We also found that virion incorporated the R peptide-truncated Env is able to induce the formation of syncytia by fusion from without.

Mammary Performance of First Lactation Bali Cows (Bibos banteng) Fed Grass-Legume Based Diets in Relation to the Role of Glucose

  • Sukarini, I.A.M.;Sastradipradja, Djokowoerjo;Nusada, N.;Mahardika, I.G.;Kiranadi, B.
    • Asian-Australasian Journal of Animal Sciences
    • /
    • v.14 no.5
    • /
    • pp.615-623
    • /
    • 2001
  • A study of mammary function in relation to glucose metabolism of first lactation Bali cows on grass-legume diets was carried out using 12 primiparous cows (initial BW $263.79{\pm}21.66kg$) for 16 weeks starting immediately post calving. The animals were randomly allocated into 4 dietary treatment groups R1, R2, R3 and R4, receiving from the last 2 months of pregnancy onwards, rations based on a mixture of locally available grass and legume feed ad libitum. On a DM basis R1 contained 70% elephant grass (PP, Penicetum purpureum) plus 30% Gliricidia sepia leaves (GS), R2 was 30% PP plus 25% GS supplemented with 55% Hibiscus tilliacius leaves (HT, defaunating effect), R3 and R4 were 22.5% PP+41.25% GS+11.25% HT+25% concentrate, with R4 supplemented with zinc-diacetate. TDN, CP and zinc contents of the diets were 58.2%, 12.05% and 18.3 mg/kg respectively for R1, 65.05%, 16.9% and 25.6 mg/kg respectively for R2, 66.03%, 16.71% and 29.02 mg/kg respectively for R3 and 66.03%, 16.71% and 60.47 mg/kg respectively for R4. Milk production and body weights were monitored, an energy and protein balance trial conducted, overall glucose kinetics parameters assessed, mammary blood flow (MBF) and metabolite arteriovenous differences (${\Delta}AVs$) measured to get uptake data and mammary performance relationships. Parameters of glucose kinetics at peak lactation or during dry condition were not affected by ration quality. Glucose pool size, space of distribution and flux increased by 61.77, 62.26 and 82.08%, respectively, during lactation compared to the dry period. Mean glucose flux of lactating Bali cows was $5.52mg/min.kgBW^{0.807}$ which resembles the range of values of temperate dairy cows. Calculation showed that glucose requirements for maintenance, milk lactose and fat-glycerol synthesis, and the formation of NADPH reached 461.69 g for a yield of 1 kg/d or equal to 320.62 mg/min, which was less than the average glucose flux of lactating Bali cows of 481.35 mg/min. Mammary blood flow (MBF) values ranged from 56 to 83 l/h for the different treatments and the ratio MBF per kg milk produced improved from av. 1540 l/kg for R1 to av. 967 l/kg for R4 treated cows. Mammary glucose uptake ranged from 6.27 to 12.03 g/h or 120 to 140 g/kg milk. Glucose uptake was mass-wise 2 to 4 times the amount secreted as lactose, which indicated values less than the calculated mammary glucose needs and that little lactose was synthesized. The excess glucose taken-up was used for other metabolic processes. Linear relationships between metabolite ${\Delta}AVs$ and arterial blood plasma concentration [A] showed that in Bali cows triglycerides (TG), phenylalanine (Phe) and tyrosine (Tyr) have high coefficients of determination, i.e. 0.77, 0.81 and 0.69, respectively. For glucose, the relationship is quadratic with an $R^2$ value of 0.49. It was concluded that lactose synthesis was inadequate, which led to a speculation that milk yield could be improved by increased lactose synthesis.

Allium hookeri Extract Improves Type 2 Diabetes Mellitus in C57BL/KSJ Db/db Obese Mouse via Regulation of Hepatic Lipogenesis and Glucose Metabolism (삼채 추출물의 인슐린 저항성 개선 효과 및 기전 탐색)

  • Kim, Ji-Soo;Heo, Jin-Sun;Choi, Jong-Won;Kim, Gun-Do;Sohn, Kie-Ho
    • Journal of Life Science
    • /
    • v.25 no.10
    • /
    • pp.1081-1090
    • /
    • 2015
  • Diabetes has been one of major health risks in industrialized countries. Allium hookeri is a wild herb distributed in India and Myanmar. The root of the plant has been used as food and medicine in Southeast Asia. We investigated Allium hookeri extract improves type 2 diabetes mellitus in C57BL/KSJ db/db obese mouse. C57BL/KSJ db/db obese mouse arise out of Type 2 diabetes and we treated Allium hookeri methanol extract 400 mg/kg (AH 400), 800 mg/kg (AH 800), positive control group (thiazolidinedine;TZDs) were administered orally for 8weeks. AH treated group normalized lipid enzyme system (triglyceride, total cholesterol, HDL-cholesterol and LDL-cholesterol) and serum glucose, HbA1c and plasma insulin level. AH treated group recovered β-cell damage by hyperglycemia and fatty liver disease. AH treated group significantly up regulated expression of Peroxisome proliferator-activated receptor gamma (PPAR-γ), pyruvate dehydrogenase kinase4 (PDK4), Sterol regulatory element-binding protein 1c (SREBP 1) and fork head box O1 (FOX 01) proteins in C57BL/KSJ db/db obese mouse liver. And we found that AH treated group decreased hepatic malondialdehyde formation in C57BL/KSJ db/db obese mouse liver. These results indicate that Allium hookeri methanol extract might be a potential anti-diabetic agent and could be useful in the treatment of type 2 diabetes mellitus.

The Beneficial Effects of Pectin on Obesity In vitro and In vivo (In vitro 및 In vivo에서 펙틴의 비만 억제 효과)

  • Kwon, Jin-Young;Ann, In-Sook;Park, Kun-Young;Cheigh, Hong-Sik;Song, Yeong-Ok
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.34 no.1
    • /
    • pp.13-20
    • /
    • 2005
  • The effects of pectin on obesity was studied using 3T3-L1 pre-adipocytes and rats fed 20% high fat diets. The concentration of leptin released from 3T3-L1 adipocytes in the presence of pectin was significantly decreased by 85% compared to that of the control (p<0.05), however, glycerol concentration was not changed. These data indicate that pectin seems to inhibit lipids accumulation in the adipocytes rather than enhance the lipolytic activity. Forty Sprague Dawley rats were fed 20% high fat diet for 8 weeks to induce obesity and then divided equally into four groups. Experimental groups were normal diet group (ND), high fat diet group (HFD), HDF with 10% pectin group (HFP10), and HDF with 20% pectin group (HFP20). Diet for the each group was prepared to be iso-caloric following AIN-76 guideline. After obesity was induced, rats were placed on an restricted diet for 9 weeks. The body weight of HFD increased 50% (p<0.05) compared to the ND, while it was decreased by 12% and 16% for HFP10 and HFP20, respectively (p<0.05). The relative amount of visceral fats for HFDl0 and HFD20 were decreased by 45% and 59% compared to that of HDF (130%), respectively (p<0.05). Pectin seems to have a greater effect on reducing visceral fats accumulation than weight reduction. Significantly increased level of triglyceride, total cholesterol or LDL-cholesterol in the plasma of HFD was returned to the normal or even below the normal by pectin diet, while the level of HDL-cholesterol increased. Lipid lowering effect was also observed in the liver and heart. These effects of pectin were dosedependent. In conclusion, the beneficial effect of pectin on the obesity was observed from cell culture experiment and animal study in terms of inhibiting the accumulation of lipids in the adipocytes.

The characteristic of InGaN/GaN MQW LED by different diameter in selective area growth method (선택성장영역 크기에 따른 InGaN/GaN 다중양자우물 청색 MOCVD-발광다이오드 소자의 특성)

  • Bae, Seon-Min;Jeon, Hun-Soo;Lee, Gang-Seok;Jung, Se-Gyo;Yoon, Wi-Il;Kim, Kyoung-Hwa;Yang, Min;Yi, Sam-Nyung;Ahn, Hyung-Soo;Kim, Suck-Whan;Yu, Young-Moon;Ha, Hong-Ju
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.22 no.1
    • /
    • pp.5-10
    • /
    • 2012
  • In general, the fabrications of the LEDs with mesa structure are performed grown by MOCVD method. In order to etch and separate each chips, the LEDs are passed the RIE and scribing processes. The RIE process using plasma dry etching occur some problems such as defects, dislocations and the formation of dangling bond in surface result in decline of device characteristic. The SAG method has attracted considerable interest for the growth of high quality GaN epi layer on the sapphire substrate. In this paper, the SAG method was introduced for simplification and fabrication of the high quality epi layer. And we report that the size of selective area do not affect the characteristics of original LED. The diameter of SAG circle patterns were choose as 2500, 1000, 350, and 200 ${\mu}m$. The SAG-LEDs were measured to obtain the device characteristics using by SEM, EL and I-V. The main emission peaks of 2500, 1000, 350, and 200 ${\mu}m$ were 485, 480, 450, and 445 nm respectively. The chips of 350, 200 ${\mu}m$ diameter were observed non-uniform surface and resistance was higher than original LED, however, the chips of 2500, 1000 ${\mu}m$ diameter had uniform surface and current-voltage characteristics were better than small sizes. Therefore, we suggest that the suitable diameter which do not affect the characteristic of original LED is more than 1000 ${\mu}m$.