• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.396-399
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• 2008

In this study, the electric field distributions have been investigated by simulation in accordance with the various shapes of ITO-electrodes. Also we have measured the density of excited Xe atoms in the 1s5 state in discharge cell, where the gap distance of 60 um, gas pressure of 400 Torr, Xe contents of 7%, and sustaining voltage of 200 V are kept in this experiment. The maximum density of excited Xe atoms in the 1s5 state in a discharge cell for the fish-boned, T shaped and squared ITO electrodes have been measured to be $3.01\;{\times}\;10^{13}\;cm^{-3}$, $2.66\;{\times}\;10^{13}\;cm^{-3}$ and $2.06\;{\times}\;10^{13}\;cm^{-3}$, respectively. It is shown that the electric field distribution with different ITO Electrodes is essential factor for these maximum density of excited Xe atoms in discharge cell.

• Journal of Nutrition and Health
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• 제34권4호
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• pp.393-400
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• 2001

We examined the relationship between plasma folate and total homocysteine(Hcy) levels and the distribution of plasma folate and Hcy levels from 204 Korean adults(113 men and 91 women aged between 20yr and 69yr). Plasma folate levels were significantly lower in men(12.2nmol/L) than in women(14.6nmol/L) after controlling for smoking and drinking(p<0.05). Plasma Hcy levels were significantly higher in men(13.9$\mu$mol/L) than in women(11.8$\mu$mol/L) after controlling and drinking. Plasma Hcy levels were more more strongly correlated with plasma folate in women(${\gamma}$=-0.321, p<0.05) than in men(${\gamma}$=-0.202, p<0.05), but the difference between men and women was no longer statistically significant controlling for plasma folate concentration. Prevalence of mild homocysteinemia(plama Hcy>15$\mu$mol/L) was greatest among subjects with lowest folate status. These results indicate a strong association between plasma Hcy concentration and folate status and the poor folate status is the strong causative factor of mild homocysteinemia. (Korean J Nutrition 34(4) : 393~400, 2001)

• 대한기계학회논문집B
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• 제28권5호
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• pp.587-593
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• 2004

In this paper, flow characteristics of plasma flow in a micro-tube were investigated experimentally using micro particle image velocimetry(micro-PIV). For comparison, the experiments were repeated for deionized(DI) wale. instead of plasma. Both velocity profiles of plasma and do-ionized water are well agreed with the theoretical velocity distribution of newtonian fluid. We also carried out generating plasma-in-oil droplet formation at a Y-junction microchannel. In order to clarify the hydrodynamic aspects involved in plasma droplet formation, Rhodamine-B were mixed with plasma only for visualization of plasma droplet. With oil as the continuous phase and plasma as the dispersed phase, plasma droplet can be generated in a continuous phase flow at a Y-junction. For given experimental parameters, regular-sized droplets are reproducibly formed at a uniform flow conditions.

• Applied Science and Convergence Technology
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• 제23권6호
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• pp.357-365
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• 2014

A non-invasive method for ion energy distribution measurement at a RF biased surface is proposed for monitoring the property of ion bombardments in capacitively coupled plasma sources. To obtain the ion energy distribution, the measured electrode voltage is analyzed based on the circuit model which is developed with the linearized sheath capacitance on the assumption that the RF driven sheath behaves like a simple diode for a bias power whose frequency is much lower than the ion plasma frequency. The method is verified by comparing the ion energy distribution function obtained from the proposed model with the experimental result taken from the ion energy analyzer in a dual cathode capacitively coupled plasma source driven by a 100 MHz source power and a 400 kHz bias power.

• 한국진공학회지
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• 제21권3호
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• pp.121-129
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• 2012

진공을 기초로 한 극판 전력이 인가된 유도 결합 플라즈마 소스에 관한 대부분의 연구는 자기 바이어스 효과에만 한정되어 있으며, 다양한 반도체 및 디스플레이 식각 공정에서 공정 결과와 소자 품질에 결정적인 역할을 하는 플라즈마 변수들(전자 온도, 플라즈마 밀도)과 극판 전력의 상관관계에 대한 연구는 거의 없는 실정이다. 본 연구에서는 극판 전력이 플라즈마 변수에 미치는 영향에 관한 내용을 다루고 있으며, 최근의 연구 결과에 대한 리뷰를 포함하고 있다. 플라즈마 밀도는 극판 전력 인가에 의하여 감소 또는 증가하였으며, Fluid global model에 의한 결과와 잘 일치하는 경향을 보였다. 전자 온도는 RF 바이어스에 의하여 증가하였으며, 전자 에너지 분포 측정을 통하여 전자 가열 메커니즘을 관찰하였다. 또한, 플라즈마 밀도의 공간 분포는 극판 전력에 의하여 더욱 균일해짐을 알 수 있었다. 이러한 극판 전력과 플라즈마 변수들의 상관관계와 전자 가열 메커니즘에 대한 연구는 방전 특성의 물리적 이해뿐만 아니라, 반도체 식각 공정에서 소자 품질 및 공정 개선을 위한 최적의 방전조건 도출과 외부 변수 제어에 큰 도움을 주리라 예상된다.

• 한국표면공학회지
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• 제46권3호
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• pp.133-138
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• 2013

We have developed a 2D axi-symmetric numerical model for an inductively coupled plasma system in order to analyze gas mixing effect through a narrow gap shower head. For frictional flow, holes of 0.5 mm diameter and 2 mm length are approximately modeled in 2D. Gas velocity distribution 10 mm below the shower head showed 2 times difference between the center and the edge at 10 mTorr. At 10 mm above the wafer, it was increased to 6 times difference due to the pumping duct effect. The model with a 5 mm height buffer region of a shower head showed reasonable behavior of Ar discharge. The density of Ar metastable showed additional peak inside the buffer region around the edge holes.

• Bulletin of the Korean Chemical Society
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• 제32권11호
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• pp.3967-3972
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• 2011

A whole body physiologically based pharmacokinetic (PBPK) model was applied to investigate absorption, distribution, and physiologic variations on pharmacokinetics of imatinib in human body. Previously published pharmacokinetic data of the drug after intravenous (i.v.) infusion and oral administration were simulated by the PBPK model. Oral dose absorption kinetics were analyzed by adopting a compartmental absorption and transit model in gut section. Tissue/plasma partition coefficients of drug after i.v. infusion were also used for oral administration. Sensitivity analysis of the PBPK model was carried out by taking parameters that were commonly subject to variation in human. Drug concentration in adipose tissue was found to be higher than those in other tissues, suggesting that adipose tissue plays a role as a storage tissue for the drug. Variations of metabolism in liver, body weight, and blood/plasma partition coefficient were found to be important factors affecting the plasma concentration profile of drug in human body.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1844-1847
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• 1996

In the paper, we have obtained electron energy distribution function (EEDF) in plasma by using two differentiators. In addition, we have investigated the comparision of the EEDFs by sawtooth and triangle waveform voltages. It is found that as pressure is decreased, electron density is decreased, and plasma potential is increased. And as the position of probe moves the outer of plasma, plasma potential is decreased, and electron temperature is decreased.

• 한국전기전자재료학회논문지
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• 제24권6호
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• pp.504-509
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• 2011

The conducting current of non-uniform plasma immersed electrode consists of ion current and secondary electron emission current caused by the impinging ion current. The ion current is determined by the ion dose passing through the sheath in front of electrode and the ion distribution in front of the electrode plays an important role in the secondary electron emission. The investigation of the distributed plasma and secondary electron effect on electrode ion current was carried out as the stainless steel electrode plugged with quartz tube was immersed in the inductively coupled Ar plasma using the antenna powered by 1 kw and the density profile was measured. After that, the negative voltage was applied by 1 kV~6 kV to measure the conduction current for the analysis of ion current.

• 한국진공학회지
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• 제8권2호
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• pp.172-179
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• 1999

The axial distributions of plasma density in a helical resonator plasma with the external magnetic field have been measured using Langmuir probes. Net RF power is set to 200W and chamber pressure is varied from 0.4 mTorr to 100mTorr there are three kinds of eternal magnetic field structure applied on the helical resonator plasma. One is a uniform magnetic field, the second is a positive gradient magnetic field and the third is a negative gradient magnetic field. In the three magnetic field structures, the negative gradient magnetic field is found to show the highest increase in plasma density on the substrate compared with other magnetic structures. Plasma density profile in helical resonator is well consistent with electromagnetic field pattern obtained by computer simulation. It is also found that axial magnetic fields do not affect plasma density distribution in the plasma reactor region, but induce the increase of plasma density in the process chamber region. In order to avoid the nonuniformity of radial density profile, weak magnetic fields under 100G are applied.