Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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A Study on the Comparision of Electron Energy Distribution Function measured by sawtooth and triangle waveform probe bias voltages

톱니파 및 삼각파 프로브 bias 전압에 의해 측정된 전자에너지 분포함수의 비교에 관한 연구

  • Kim, D.H. (Department of Electrical Engineering, Pusan National University) ;
  • Shin, J.H. (Department of Electrical Engineering, Dong Eui University) ;
  • Kim, G.S. (Department of Electrical Engineering, Dong Myung Junior Collage) ;
  • Park, Y.C. (Department of Electrical Engineering, Pusan National University) ;
  • Cho, J.S. (Department of Electrical Engineering, Pusan National University) ;
  • Park, C.H. (Department of Electrical Engineering, Pusan National University)
  • Published : 1996.07.22
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Abstract

In the paper, we have obtained electron energy distribution function (EEDF) in plasma by using two differentiators. In addition, we have investigated the comparision of the EEDFs by sawtooth and triangle waveform voltages. It is found that as pressure is decreased, electron density is decreased, and plasma potential is increased. And as the position of probe moves the outer of plasma, plasma potential is decreased, and electron temperature is decreased.

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