• Title/Summary/Keyword: Plasma Oxidation

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Cost-effective surface passication layers by RTP and PECVD (RTP 와 PECVD을 이용한 저가의 표면 passivation 막들의 특성연구)

  • Lee, Ji-Youn;Lee, Soo-Hong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.05a
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    • pp.142-145
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    • 2004
  • In this work, we have investigated the application of rapid thermal processing (RTP) and plasma enhanced chemical vapour deposition (PECVD) for surface passivation. Rapid thermal oxidation (RTO) has sufficiently low surface recombination velocities (SRV) $S_{eff}$ in spite of a thin oxides and short process time. The effective lifetime is increasing with an increase of the oxide thickness. In the same oxide thickness, The effective lifetime is independent on the process temperature and time. $S_{eff,max}$ is exponentially decreased with increasing oxide thickness. $S_{eff,max}$ can be reduced to 200 cm/s with only 10 nm oxide thickness. On the other hand, three different types of SiN are reviewed. SiN1 layer has a thickness of about 72 nm and a refractive index of 2.8. Also, The SiN1 has a high passivation quality. The effective lifetime and SRV of 1 $\Omega$ cm Float zone (FZ) silicon deposited with SiN1 is about 800 s and under 10 cm/s, respectively. The SiN2 is optimized for the use as an antireflection layer since a refractive index of 2.3. The SiN3 is almost amorphous silicon caused by less contents of N2 from total process. The effective lifetime on the FZ 1 ${\Omega}cm$ is over 1000 ${\mu}s$.

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Studies on Chicken Production and Antioxidation Response by Dietary Supplementation of Isoflavone and Antioxidants (사료 내 Isoflavone 및 항산화 물질 첨가에 의한 양계 생산성과 항산화작용에 관한 연구)

  • Baek, Sang-Tae;An, Byeong-Gi;Gang, Chang-Won
    • Proceedings of the Korea Society of Poultry Science Conference
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    • 2005.11a
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    • pp.31-43
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    • 2005
  • Isoflavones are naturally occurring plant chemicals belonging to the 'phytoestrogen' class. The isoflavones are strikingly similar in chemical structure to natural estrogens. The phenolic ring is a key structural element of most compounds that bind to estrogen receptors. Dietary components that recently have received attention for their action as phytoestrogens are soy isoflavones. Soy products are the most significant dietary sources of isoflavones. Recently It is concerned clinical nutrition of isoflavone that is driven by reason of alternative sources of exogenous estrogen are constantly being needed. Estrogen therapy after the menopause offers protection from cardiovascular disease, reduces the extent of osteoporosis and relieves menopausal symptoms. Exogenous estrogen treatment is a fear of possible increased risk of developing breast cancer and because of side effects. Daily intake of soybean or soy food can affirmative effect to disease occurrence, that is based on mechanical investigation, experimental results of animals and human. Research into isoflavone is going on various field to relieve hormone - dependent disease such as cancer, menopausal symptom, cardiovascular disease and osteoporosis. Isoflavone is plenty in soybean meal, soy by-product, but only limited information is available on isoflavone efficacy into animal husbandry. Thus we conducted three experiments to investigate the effects of dietary isoflavone on productivities, antioxidative responses and bone metabolism in poultry. Dietary supplementation of isoflavone resulted in preventing the lipid oxidation of plasma and egg yolk. Dietary isoflavone improved bone development in egg-type growing chicks and broilers in terms of tibial strength. It was suggested that the proper use of feed additives such as isoflavone might provide means of improving antioxidative effect, skeletal strength, egg and eggshell quality.

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Microfabrication of Submicron-size Hole on the Silicon Substrate using ICP etching

  • Lee, J.W.;Kim, J.W.;Jung, M.Y.;Kim, D.W.;Park, S.S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.79-79
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    • 1999
  • The varous techniques for fabrication of si or metal tip as a field emission electron source have been reported due to great potential capabilities of flat panel display application. In this report, 240nm thermal oxide was initially grown at the p-type (100) (5-25 ohm-cm) 4 inch Si wafer and 310nm Si3N4 thin layer was deposited using low pressure chemical vapor deposition technique(LPCVD). The 2 micron size dot array was photolithographically patterned. The KOH anisotropic etching of the silicon substrate was utilized to provide V-groove formation. After formation of the V-groove shape, dry oxidation at 100$0^{\circ}C$ for 600 minutes was followed. In this procedure, the orientation dependent oxide growth was performed to have a etch-mask for dry etching. The thicknesses of the grown oxides on the (111) surface and on the (100) etch stop surface were found to be ~330nm and ~90nm, respectively. The reactive ion etching by 100 watt, 9 mtorr, 40 sccm Cl2 feed gas using inductively coupled plasma (ICP) system was performed in order to etch ~90nm SiO layer on the bottom of the etch stop and to etch the Si layer on the bottom. The 300 watt RF power was connected to the substrate in order to supply ~(-500)eV. The negative ion energy would enhance the directional anisotropic etching of the Cl2 RIE. After etching, remaining thickness of the oxide on the (111) was measured to be ~130nm by scanning electron microscopy.

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Effect of Si3N4 Buffer Layer on Transmittance of TiO2/Si3N4/Ag/Si3N4/TiO2 Multi Layered Structure (TiO2/Si3N4/Ag/Si3N4/TiO2 다층구조에서 Si3N4 버퍼층이 투과율에 미치는 영향)

  • Lee, Seo-Hee;Jang, Gun-Eik
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.1
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    • pp.44-47
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    • 2012
  • The $TiO_2/Si_3N_4/Ag/Si_3N_4/TiO_2$ multi layered structure was designed for the possible application of transparent electrodes in PDP (Plasma Display Panel). Multi layered film was deposited on a glass substrate at room temperature by DC/RF magnetron sputtering system and EMP (Essential Macleod Program) was adopted to optimize the optical characteristics of film. During the deposition process, the Ag layer in $TiO_2/Ag/TiO_2$ became heavily oxidized and the filter characteristic was degraded easily. In thus study, Si3N4 layer was used as a diffusion buffer layer between $TiO_2$ and Ag. in order to prevent the oxidation of Ag layer in $TiO_2/Si_3N_4/Ag/Si_3N_4/TiO_2$ structure. It was confirmed that $Si_3N_4$ layer is one of candidate materials acting as diffusin barrier between $TiO_2/Ag/TiO_2$.

Fabrication of Alloy Target for Formation of Ti-Al-Si-N Composite Thin Film and Their Mechanical Properties (Ti-Al-Si-N 박막 제작을 위한 합금 타겟 제조 및 박막의 기계적 특성)

  • Lee, Han-Chan
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.10
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    • pp.665-670
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    • 2016
  • Prevailing dissemination of machine tools and cutting technology have caused drastic developments of high speed dry machining with work materials of high hardness, and demands on the high-hardness-materials with high efficiency have become increasingly important in terms of productivity, cost reduction, as well as environment-friendly issue. Addition of Si to TiAlN has been known to form nano-composite coating with higher hardness of over 30 GPa and oxidation temperature over $1,000^{\circ}C$. However, it is not easy to add Si to TiAlN by using conventional PVD technologies. Therefore, Ti-Al-Si-N have been prepared by hybrid process of PVD with multiple target sources or PVD combined with PECVD of Si source gas. In this study, a single composite target of Ti-Al-Si was prepared by powder metallurgy of MA (mechanical alloying) and SPS (spark plasma sintering). Properties of he resulting alloying targets were examined. They revealed a microstructure with micro-sized grain of about $1{\sim}5{\mu}m$, and all the elements were distributed homogeneously in the alloying target. Hardness of the Ti-Al-Si-N target was about 1,127 Hv. Thin films of Ti-Al-Si-N were prepared by unbalanced magnetron sputtering method by using the home-made Ti-Al-Si alloying target. Composition of the resulting thin film of Ti-Al-Si-N was almost the same with that of the target. The thin film of Ti-Al-Si-N showed a hardness of 35 GPa and friction coefficient of 0.66.

Central energy metabolism remains robust in acute steatotic hepatocytes challenged by a high free fatty acid load

  • Niklas, Jens;Bonin, Anne;Mangin, Stefanie;Bucher, Joachim;Kopacz, Stephanie;Matz-Soja, Madlen;Thiel, Carlo;Gebhardt, Rolf;Hofmann, Ute;Mauch, Klaus
    • BMB Reports
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    • v.45 no.7
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    • pp.396-401
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    • 2012
  • Overnutrition is one of the major causes of non-alcoholic fatty liver disease (NAFLD). NAFLD is characterized by an accumulation of lipids (triglycerides) in hepatocytes and is often accompanied by high plasma levels of free fatty acids (FFA). In this study, we compared the energy metabolism in acute steatotic and non-steatotic primary mouse hepatocytes. Acute steatosis was induced by pre-incubation with high concentrations of oleate and palmitate. Labeling experiments were conducted using [$U-^{13}C_5$,$U-^{15}N_2$] glutamine. Metabolite concentrations and mass isotopomer distributions of intracellular metabolites were measured and applied for metabolic flux estimation using transient $^{13}C$ metabolic flux analysis. FFAs were efficiently taken up and almost completely incorporated into triglycerides (TAGs). In spite of high FFA uptake rates and the high synthesis rate of TAGs, central energy metabolism was not significantly changed in acute steatotic cells. Fatty acid ${\beta}$-oxidation does not significantly contribute to the detoxification of FFAs under the applied conditions.

Corrosion Charateristics of PEO-treated Ti-6Al-4V Alloy in Solution Containing Si and Mg Ions

  • Park, Seon-Yeong;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.153-153
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    • 2017
  • The application of the coating supports the mechanical characteristics of the implant, and various materials and coatings are currently being used in the implant in a way to accelerate adhesion. Especially, plasma electrolytic oxidation (PEO) coating has been proposed continually with good surface treatment of titanium alloys. Also, the PEO process can incorporate Ca and P ions on the titanium surface through variables varied factor. PEO process for bioactive surface has carried out in electrolytes containing Ca and P ions. Natural bone is composed of mineral elements such as Mg, Si, Zn, Sr, and Mn, etc. Especially, Mg and Si of these elements play role in bone formation and growth after clinical implantation of bio-implants. In this study, corrosion charateristics of PEO-treated Ti-6Al-4V alloy in solution containing Si and Mg ions has been investigated using several experimental techniques. The PEO-treated surfaces were identified by X-ray diffraction, using a diffractometer (XRD, Philips X' pert PRO, Netherlands) with Cu $K{\alpha}$ radiation. The morphology was observed by field-emission scanning electron microscopy (FE-SEM, Hitachi 4800, Japan) and energy-dispersive X-ray spectroscopy (EDX, Oxford ISIS 310, England). The potentiodynamic polarization and AC impedance tests for electrochemical degradations were carried out in 0.9% NaCl solution at similar body temperature using a potentiostat with a scan rate of 1.67mV/s and potential range from -1500mV to + 2000mV.

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Electrochemical characteristics of Ca, P, Sr, and Si Ions from PEO-treated Ti-6Al-4V Alloy Surface

  • Yu, Ji-Min;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2017.05a
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    • pp.154-154
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    • 2017
  • Ti-6Al-4V alloys are widely used as metal-lic biomaterials in dentistry and orthopedics due to its excellent biocompatibility and me-chanical properties. However, because of low biological activity, it is difficult to form bone growth directly on the surface of titanium implants. For this reason, surface treatment of plasma electrolytic oxidation(PEO) was used for dental implants. To enhance bioac-tivity on the surface, strontium(Sr) and sili-con(Si) ions can be added to PEO treated sur-face in the electrolyte containing these ions. The presence of Sr in the coating enhances osteoblast activity and differentiation, where-as it inhibits osteoclast production and prolif-eration. And Si has been found to be essen-tial for normal bone, cartilage growth, and development. In this study, electrochemical characteristics of Ca, P, Sr, and Si ions from PEO-treated Ti-6Al-4V alloy surface was re-searched using various experimental instruments. DC power is used and Ti-6Al-4V al-loy was subjected to a voltage of 280 V for 3 minutes in the electrolyte containing 5, 10, 20M% Sr ion and 5M% Si ion. The morphol-ogies of PEO-treated Ti-6Al-4V alloy by electrochemical anodization were examined by field-emission scanning electron micro-scopes (FE-SEM), energy dispersive x-ray spectroscopy (EDS), x-ray diffraction (XRD) and corrosion analysis using AC impedance and potentiodynamic polarization test in 0.9% NaCl solution at similar body tempera-ture using a potentiostat with a scan rate of 1.67mV/s and potential range from -1500mV to + 2000mV.

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Influence of high energy electron beam treatment on the photocatalytic activity of $TiO_2$ nanoaparticles on carbon fiber

  • Sim, Chae-Won;Kim, Myeong-Ju;Seo, Hyeon-Uk;Kim, Gwang-Dae;;Kim, Dong-Un;Nam, Jong-Won;Jeong, Myeong-Geun;Lee, Byeong-Cheol;Park, Ji-Hyeon;Kim, Yeong-Dok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.441-441
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    • 2011
  • $TiO_2$ nanoparticles were grown on carbon fiber by atomic later deposition (ALD) with TTIP $(Ti(OCH(CH_3)_2)_4$ and $H_2O$ precusors. After sampe surfaces were treated by electron beam (1 MeV, 5 KGy), an improvement in the photocatalytic reacitivity of $TiO_2$ nanoparticles on carbon fiber was observed. An increase in the population of hydroxyl group on $TiO_2$ particles and the oxidation of carbon fiber were found upon e-beam exposure, whereas there was no noticeable changes of their morphology. It implies that those changes in O and C 1s state of $TiO_2$ particles/carbon fiber induced by e-beam treatment could be related to the enhancement of the photocatalytic activity. In contrast, when carbon fiber fully covered with $TiO_2$ thick films was treated with high-energy electron beam under same conditions, the improvement of photocatalytic activity as well as any changes in XPS spectra (Ti 2p, O 1s and C 1s) could not be found.

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Screening of Anticoagulant PoIysaccharides from Edible Plants (식물로 부터 혈액 항응고 활성 다당류의 검색)

  • Kweon, Mee-Hyang;Park, Mee-Kyung;Ra, Kyung-Soo;Sung, Ha-Chin;Yang, Han-Chul
    • Applied Biological Chemistry
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    • v.39 no.2
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    • pp.159-164
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    • 1996
  • Screening of anticoagulant activity was conducted for the hot water extracts of 73 kinds of medicinal herbs, 41 kinds of Korean edible plants, and 5 kinds of sea weeds using plasma recalcification test(Tr). In the first screening several extracts of the plants, Alisma calndiculatum, Corydalis ternata Panax notoginseng, Allium sativum, Ganderma luidum, Codium fragile, showed high activities. When the plants were reextracted with various solvent conditions, acidic water extracts of Codium fragile showed the highest activity in APTT. A crude polysaccharide fraction(CF-1) was prepared by methanol reflux, ethanol precipitation, dialysis and Iyophilization of the acid extracts. CF-1 comprised 80.8% total sugar consisting of arabinose, galactose and glucose as the main monomers, 8.7% protein, and 13.3% sulfate. The anticoagulant activity of CF-1 was not changed by pronase digestion, but decreased by periodate oxidation, and this indicated that the anticoagulant activity was attributed to the polysaccharide portion.

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