• Nuclear Engineering and Technology
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• v.44 no.1
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• pp.9-20
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• 2012

A brief review on the thermal plasma synthesis of nano-sized powders is presented according to the application materials, such as, metals, ceramics, glasses, carbonaceous materials and other functional composites, such as, supported metal catalyst and core-shell structured nano materials. As widely adopted plasma sources available for thermal plasma synthesis of nanosized powders, three kinds of plasma torches, such as transferred and non-transferred DC and RF plasma torches, are introduced with the main features of each torch system. In the basis of the described torch features and the properties of suggested materials, application results including synthesis mechanism are reviewed in this paper.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.242.1-242.1
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• 2014

The electron cyclotron resonance plasma source with a belt-type magnet assembly (BMA) is designed for effective plasma confinements. For characterizing the plasma source, the plasma parameters are measured by Langmuir probe. However, the plasma parameters and the motion of charged particles near the ECR zone are not easy to diagnostics, because of the high plasma density and temperature. Thus, as an alternative method, the electromagnetic simulation of the plasma source has been performed by using three-dimensional particle-in-cell and Monte Carlo collisional (PIC-MCC) simulation codes. For considering the limitation of simulation resources and time, the periodic boundary condition is applied and the coulomb collision is neglected. In this paper, we present the results of 3D PIC simulations of ECR plasmas with BMA and we compare them with the experimental results.

• Transactions on Electrical and Electronic Materials
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• v.2 no.2
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• pp.1-4
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• 2001

Urgency of using plasma-energy technologies in power industry, is outlined, increasing of economical efficiency, decreasing of energy consumption and decreasing of environmental pollution, are shown, scientific and technical bases for plasma-energy technologies of fuel utilisation, are designed, results of theoretical, experimental and rig investigations of processes of plasma ignition, gasification, thermochemical preparation for burning and combined processing of coals, are presented, results of realisation of plasma technologies of residual-oil-free (mazout) pulverised-coal boiler kindling, lighting of torch and stabilisation of luid slagging in furnaces with removal of fluid slag, are described.

• Journal of the Korean institute of surface engineering
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• v.29 no.6
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• pp.857-861
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• 1996

The influence of rf-plasma operation on the thin film formation containing small particles for Al-Li alloys mainly have been studied as a function of Ar gas pressure and plasma power by means of a 200kV transmission electron microscope (TEM). Under the non-plasma operation, the transition from continuous thin films to clusters of grape-like small particles occurred at Ar gas pressures above 20Pa. Particles were single crystals with clear crystal habit planes. Under the plasma operation, the influence of gas pressures on the film formation at a plasma power of 5W was also examined. Thin films containing particles below 30Pa and the films containing mainly particles above 40Pa were formed. The prominent change of the average particle size was not recognized. The increase of the plasma powers at 20Pa, which formed particles under non-plasma, suppressed growth of particles, and homogeneous films containing very small particles were fabricated. The electric conductivity showed slight decrease with an increase of plasma power.

• Proceedings of the Korean Vacuum Society Conference
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• 2003.02a
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• pp.231-231
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• 2003

• Vacuum Magazine
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• v.2 no.4
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• pp.9-15
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• 2015

Nonthermal bio-compatible plasma (bioplasma) sources and their characteristics operating at atmospheric pressure could be used for biological cell interactions, especially for plasma bioscience and medicines. The electron temperatures and plasma densities of this bioplasma are measured to be 0.7 ~ 1.8 eV and $(3-5){\times}10^{14-15}cm^{-3}$, respectively. Herein, we introduced general schematic view of the plasma-initiated ultraviolet photolysis of water inside the biological solutions or living tissue for the essential generation mechanism of the reactive hydroxyl radical [OH] and hydrogen peroxide [$H_2O_2$], which may result in apoptotic cell death in plasma bioscience and medicines. Further, we surveyed the various nonthermal bioplasma sources including plasma jet, micro-DBD (dielectric barrier discharge) and nanosecond discharged plasma. The diseased biological protein, cancer, and mutated cells could be treated by these bioplasma sources or bioplasma activated water to result in their apoptosis for new paradigm of plasma bioscience and medicines.

• Applied Science and Convergence Technology
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• v.23 no.4
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• pp.161-168
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• 2014

A real-time monitoring of immersed antenna type inductively coupled plasma (ICP) was done with a homemade 2 dimensional voltage probe array to check the uniformity of the plasma. Measured voltage values with a high impedance voltmeter are close to the floating potential of the plasma. As the substrate carrier was moving into a magnetron sputtering plasma diffusive from a $125mm{\times}625mm$ size cathode, measured results showed reliably separation of plasma into the upper and lower empty space over the carrier. Infra red thermal imaging camera was used to observe the cross corner effect in situ without eroding a target to the end of the usage. 3 dimensional particle trace model was used to analyze the magnetron discharge's behavior.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.174-174
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• 2012

The nature of feed gas is essential for the active species formed in the nonthermal plasma jets, which would induce various biological phenomena. We investigated the different physiological effects of atmospheric pressure soft-plasma jets on Esherichia coli and blood cells according to the feed gas. Cell death rate, growth curve, membrane molecular changes and induced genes were examined. The relationship between cellular reactions and active species generated by discharge will be discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.406-406
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• 2012

반도체 공정의 대부분은 plasma를 사용한 공정이 주를 이루고 있다. 이러한 공정에서 최근 선폭의 초 미세화가 진행되면서 pulse modulation plasma에 대한 관심을 가지게 되고 있다. Pulse modulation plasma는 RF 인가 시 일정 간격으로 on, off 시켜주게 된다. 이 때, chamber 내부에서 발생하는 plasma역시 on, off 되게 되는데 이러한 현상을 이용하면 plasma 내의 전자온도가 떨어져서 식각 공정 시 선택비의 개선을 기대할 수 있다. 실제 장비회사에서는 pulse를 이용하기 위한 장비개선 연구가 한창이다. 본 연구에서는 유도결합플라즈마 chamber에서 source와 bias에 RF pulse modulation plasma를 발생시켜 기존 CW (Continuous wave) 방전시킨 plasma의 밀도와 전자온도를 측정하여 차이를 비교, 분석 해보았다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.216-216
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• 2011

There have been various direct or indirect methods to measure the characteristics of plasma. Comparing to direct method like Langmuir probe method, indirect measurements which give information as some external parameters like current, voltage, or phase are easier to obtain. In this research, an indirect method to measure averaged plasma density in a transformer coupled plasma(TCP) has been proposed and evaluated. With a simple analytic model connecting electrical characteristics to plasma impedance, direct measurement via double Langmuir probe has been performed. This result may play a meaningful role to diagnose TCP or similar plasma sources