• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.366-370
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• 2022

A 12 ㎛ pixel-sized 360 × 240 microbolometer focal plane array (MBFPA) was fabricated using a complementary metaloxide-semiconductor (CMOS)-compatible process. To release the MBFPA membrane, an amorphous carbon layer (ACL) processed at a low temperature (<400 ℃) was deposited as a sacrificial layer. The thermal time constant of the MBFPA was improved by using serpentine legs and controlling the thickness of the SiNx layers at 110, 130, and 150 nm on the membrane, with response times of 6.13, 6.28, and 7.48 msec, respectively. Boron-doped amorphous Si (a-Si), which exhibits a high-temperature coefficient of resistance (TCR) and CMOS compatibility, was deposited on top of the membrane as an IR absorption layer to provide heat energy transformation. The structural stability of the thin SiNx membrane and serpentine legs was observed using field-emission scanning electron microscopy (FE-SEM). The fabrication yield was evaluated by measuring the resistance of a representative pixel in the array, which was in the range of 0.8-1.2 Mohm (as designed). The yields for SiNx thicknesses of SiNx at 110, 130, and 150 nm were 75, 86, and 86%, respectively.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.14 no.2
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• pp.202-208
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• 2003

In this paper, we proposed a microstrip patch array antenna for DBS reception which had high gain and high tilted angle through mutual coupling driver patch to parasitic patch in H-plane edge and broadside direction in different layers. It was designed and fabricated in 16$\times$8 array by using low cost polyester based copper-clad laminate and foam instead of high cost dielectric substrate. It had gain of 22.9 dBi, beamwidth of 4.6$^{\circ}$, and tilted angle from broadside direction of 43.9$^{\circ}$.

• Journal of Sensor Science and Technology
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• v.19 no.2
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• pp.130-136
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• 2010

The microbolometer array sensor with fine pitch pixel array has been implemented to the released amorphous silicon layer supported by two contact pads. For the design of focal plane mirror with geometrical flatness, the simple beam test structures were fabricated and characterized. As the beam length decreased, the effect of beam width on the bending was minimized, Mirror deformation of focal plane in a real pixel showed downward curvature by residual stress of a-Si and Ti layer. The mirror tilting was caused by the mis-align effect of contact pad and confirmed by FEA simulation results. The properties of bolometer have been measured as such that the NETD 145 mK, the TCR -2 %/K, and thermal time constant 1.99 ms.

• Journal of Biomedical Engineering Research
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• v.22 no.4
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• pp.321-330
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• 2001

In this paper, we propose a new synthetic aperture focusing scheme for improving the lateral resolution which is one of the most important factors determining the quality of ultrasound imaging. The proposed scheme enables full round-trip dynamic focusing with approximately limited property. This properties are obtained through transmitting plane waves of which the traveling angle varies with the receive subaperture position, as opposed to stepping the spherical wave source across an array in other synthetic aperture focusing schemes, and employing dynamic focusing in receive. In this paper, the properties of the proposed scheme is analyzed in which a hypothetical infinite line source is used to transmit the plane waves and verified through computer simulation results. Also, we show that the proposed scheme is realizable with an array transducer with a finite aperture size. In summary, it is shown through comparison between the field contours of the proposed scheme and the conventional scheme that the proposed scheme can improve greatly the lateral resolution of ultrasound imaging.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.25 no.9B
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• pp.1511-1517
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• 2000

A new slot-coupled back-to-back microstrip array antenna is proposed for using in the IMT-2000 base station or repeater antenna. This antenna is composed of symmetrical SSAIP(Strip Slot, Air Inverted Patch) It has bidirectional radiation pattern in horizontal plane and 22.5$^{\circ}$main beam squint in vertical plane. The analysis is based on the cavity model and the design is achieved using Ensemble. Experimental results for the radiation pattern and the return loss have shown that the direction of the main beam is about 21$^{\circ}$and the impedance bandwidth is approximately 22.9% Thus the proposed antenna is able to operate over both uplink and downlink frequencies in IMT-2000.

• Journal of electromagnetic engineering and science
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• v.12 no.4
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• pp.247-253
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• 2012

This study presents a new, simple method for improving the front-to-back (F/B) ratio of a microstrip patch antenna. The back radiation of the microstrip patch antenna is reduced by removing some metallic parts around the ground plane and placing a new soft-surface configuration, consisting of an array of stand-up split-ring resonators on a bare dielectric substrate near the two ground plane edges. Compared to the F/B ratio of a conventional microstrip patch antenna with a full ground plane of the same size, our proposed microstrip patch antenna experimentally achieves an improved F/B ratio of 9.6 dB.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.32 no.5
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• pp.374-381
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• 2008

The correlation coefficient method, which was proposed by our research group, is applied to digital particle holography to locate the focal plane of particles. It uses the fact that the correlation coefficient is maximum at the focal plane. The factors influencing this method are discussed with a numerical simulation of holograms. For real holograms, the Wiener filter was proposed to process both recorded holograms and reconstructed images. The application results using the dot array target showed that the Wiener filter is a very effective tool for processing holography-related images. The effects of the dot size and the object distance on the errors in the determination of the focal plane by the correlation coefficient method were investigated by using the calibration target.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.45-51
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• 2005

We have developed surface micromachined Infrared ray (IR) focal plane array (FPA), in which single $SiO_{2}$ layer works as an IR absorbing plate and $Pb(Zr_{0.3}Ti_{0.7})O_{2}$ thin film served as a thermally sensitive material. There are some advantages of applying $SiO_{2}$ layer as an IR absorbing layer. First of all, the $SiO_{2}$ has good IR absorbance within $8{\sim}12{\mu}m$ spectrum range. Measured value showed about 60% absorbance of incident IR spectrum in the range. $SiO_{2}$ layer has another important merit when applied to the top of Pt/PZT/Pt stack because it works also as a supporting membrane. Consequently, the IR absorbing layer forms one body with membrane structure, which simplifies the whole MEMS process and gives robustness Ito the structure.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.848-851
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• 2002

In this paper, an experimental method using a reference accelerometer has been developed to measure the in-plane vibration intensity of a beam. It has the advantages of reducing accelerometer phase error comparing with the cross spectral intensity measurement technique using an accelerometer array. It needs no measurement of the input force required in the frequency response method using the only one accelerometer This method has been used to measure the in-plane vibration intensity over the beam. The result has been compared with an input power and the vibration intensity obtained with other methods. It showed that the present experimental method can be effectively used to measure the structural in-plane vibration intensity.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.9 no.2
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• pp.415-421
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• 2005

The radiating or receiving characteristics of array elements (i.e., antennas) are changed from those of isolated elements due to mutual coupling effects and the array performance becomes different from those originally designed by assuming isolated elements. The effects of mutual coupling on the performance of a rectangular array with triangular grid geometry of dipoles above a ground plane are discussed with respect to element pattern. The concept of element gain function is used to examine the effects of mutual coupling on the array performance in terms of sidelobe level in the uniformly spaced and space-tapered rectangular arrays with triangular grid geometry of dipoles. It was shown that the sidelobe performance improved in the space-tapered array compared to the uniformly spaced array in the presence of mutual coupling effects. Computer simulation results are presented.