• Steel and Composite Structures
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• 제35권6호
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• pp.779-788
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• 2020

Multi-Walled Carbon nanotubes (MWCNT) coupled with Silicone Rubber (SR) can represent applicable strain sensors with accessible materials, which result in good stretchability and great sensitivity. Employing these materials and given the fact that the combination of these two has been addressed in few studies, this study is trying to represent a low-cost, durable and stretchable strain sensor that can perform excellently in a high number of repeated cycles. Great stability was observed during the cyclic test after 2000 cycles. Ultrahigh sensitivity (GF>1227) along with good extensibility (ε>120%) was observed while testing the sensor at different strain rates and the various number of cycles. Further investigation is dedicated to sensor performance in the detection of human body movements. Not only the sensor performance in detecting the small strains like the vibrations on the throat was tested, but also the larger strains as observed in extension/bending of the muscle joints like knee were monitored and recorded. Bearing in mind the applicability and low-cost features, this sensor may become promising in skin-mountable devices to detect the human body motions.

• 사상체질의학회지
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• 제18권1호
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• pp.118-131
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• 2006

1. Objective Pulse diagnosis is generally applied to Traditional Oriental Medicine but not to Sasang Constitution diagnosis. Recently new pulse analyzer using array piezoresistive sensor and multi-channel robot arm developed. It reflects Oriental Medical Doctors' diagnostic processes, and its reproducibility test was done at Korea Institute of Oriental Medicine. We performed this study to set parameters diagnosing Sasang Constitution. 2. Methods One hundred thirty three subjects participated in this study. They are healty and approved this study. Before being tested with pulse analyzer, they had interview with Sasang Constitution Specialist to diagnose their Sasang Constitution. We established some useful parameters from parameters of pulse analyzer according to the Original Texts of Oriental Medicine and clinical experiences to analyze with clinical data of this study. 3. Results (I) There is a significant difference in pre-dicrotic notch time among all parameters of pulse analyzer in Sasang Constitution groups(P=0.047). (2) There is a significant difference in maximum pulse pressure in 33 to 48 year Sasang Constitution groups(P=0.010). (3) There is a significant difference in frequency width in 17 to 32 year Sasang Constitution groups(P=0.002). (4) There is a significant difference in CFS value in groups which OMD diagnoses; Floating & Sinking pulse(P=0.020). (5) There is a significant difference in pulse rate in groups which OMD diagnoses; Rapid & Slow pulse(P=0.000). (6) There is a significant difference in maximum pulse pressure in groups which OMD diagnoses; Deficient & Solid pulse(P=0.000). 4. Conclusions Analyzing parameters in each Sasang Constitution group, we found it shows significant difference in maximum pulse pressure and corresponding tendency in coefficient of floating & sinking pulse with theories of Sasang Consti-tutional Medicine. As we accumulate more clinical data, we will establish algorithm to diagnose Sasang Constitution using a pulse analyzer.

• 센서학회지
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• 제14권1호
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• pp.1-6
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• 2005

This paper describes a novel concept of a chemically sensitive scanning force microscope (CS-SFM). It consists of the conventional SFM and the time-of-flight mass spectrometer (TOF-MS). A switchable cantilever (SC) fabricated by the micromachining technology combines each advantage of two completely different systems, SFM and TOF-MS. The CS-SFM offers to produce both images of topography and chemical information simultaneously. First we employed a rotatable tip holder based on 4 piezotube actuators for demonstration of the possibility of the CS-SFM concept. Second the CS-SFM concept is optimized with the micromachining technology. The micromachined SC with an integrated bimorph actuator and a piezoresistive strain sensor provides a reasonable switching speed of ${\sim}10$ ms which is very attractive for the CS-SFM application. The SC is currently being integrated in an ultra-high-vacuum system to perform various experiments.

• 전자공학회논문지D
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• 제34D권7호
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• pp.30-36
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• 1997

Bump bonded piezoesistive silicon accelerometer was fabricated by the porous silicon micromachining and th eprocess technique of integrated circuit. The output voltage of the accelerometer fabricated on (111)-oreiented Si substrates with n/n$^{+}$n triple layers showed good linear characteristic of less than 1%. The measured sensitivity and the resonant frequency was about 743 .mu.V/g and 2.04 kHz, respectively. And the transverse sensitivity of 5.2% was measured from the accelerometer. Also, to investigate an influence on the output characteristics of the sensor due to bump bonding, the values of the piezoresistors were measured through thermal-cycling test in the temperature variation form -50 to 120.deg. C. Then, there was 0.014% resistance changes about 3.61 k.ohm., so sthe output charcteristics of the sensor was less affected by bump bonding.g.

• 한국전기전자재료학회논문지
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• 제16권9호
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• pp.790-794
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• 2003

This paper describes the fabrication and characteristics of ceramic thin film type pressure sensors based on Ta-N strain gauges for high temperature applications. Ta-N thin-film strain gauges are deposited onto a thermally oxidized Si diaphragm by RF sputtering in an argon-nitrogen atmos[here($N_2$ gas ratio: 8%, annealing condition: 90$0^{\circ}C$, 1 hr.), patterned on a wheatstone bridge configuration, and used as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is 1.097 ～ 1.21 mV/Vㆍkgf/$\textrm{cm}^2$ in the temperature range of 25 ～ 200 $^{\circ}C$ and the maximum non-linearity resistance), non-linearity than existing Si piezoresistive pressure sensors. The fabricated ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that os operable under high-temperature.

• 센서학회지
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• 제31권3호
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• pp.139-144
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• 2022

Advanced tactile sensors are receiving significant attention in various industries such as extended reality, electronic skin, organic user interfaces, and robotics. The capabilities of advanced tactile sensors require a variety of functions, including position sensing, pressure sensing, and material recognition. Moreover, they should comsume less power and be bio-friendly with human contact. Recently, a tactile sensor based on the triboelectrification effect was developed. Triboelectric tactile sensors have the advantages of wide material availability, simple structure, and low manufacturing cost. Because they generate electricity by contact, they have low power consumption compared to conventional tactile sensors such as capacitive and piezoresistive. Furthermore, they have the ability to recognize the contact material as well as execute position and pressure sensing functions using the triboelectrification effect. The aim of this study is to introduce the progress of research on triboelectrification-based tactile sensors with various functions such as position sensing, pressure sensing and contact material recognition.

• 센서학회지
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• 제5권5호
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• pp.21-29
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• 1996

(111), $n/n^{+}/n$ 3층 구조의 실리콘 기판을 HF 용액 내에서 양극반응시켜 선택확산된 $n^{+}$ 층에 다공질 실리콘층(Porous Silicon Layer : PSL)을 형성한 후, 이를 5% NaOH 수용액에서 식각하여 미세구조를 제조하는 다공질 실리콘 식각법을 이용한 실리콘 미세구조의 제조법으로 8개의 빔을 갖는 압저항형 실리콘 가속도센서를 제조하였다. 제조된 가속도센서의 매스 패드(mass pad)의 반경, 빔 길이, 빔 폭, 그리고 빔 두께는 각각 $700\;{\mu}m$, $50;{\mu}m$, $100\;{\mu}m$, $7\;{\mu}m$ 였다. 자동차의 응용을 위하여 50g 범위의 가속도를 측정할 수 있도록 진동질량은 2 mg으로 제조하였다. 이때, 진동질량을 부가하는 방법은 Pb/Sn/Ag 솔더 페이스트를 매스 패드에 디스펜싱한 후, 3-zone reflow 장치를 사용하여 열처리하였다. 제조된 가속도센서의 충격응답에 대한 감쇠시간은 약 30 ms로 나타났으며, 가산회로로 합한 출력의 감도는 2.9 mV/g이며, 비선형특성은 full scale 출력에서 2%이하로 측정되었다. 그리고 각 브릿지의 편차는 ${\pm}5%$ 미만으로 나타났다. 또한 측정된 타축감도는 약 4% 이하로 나타났으며, 시뮬레이션 결과로 부터 얻은 센서의 공진주파수는 2.15 KHz이었다.

• 한국생산제조학회지
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• 제9권5호
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• pp.105-111
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• 2000

Micronization of sensor is a trend of the silicon sensor development with regard to a piezoresistive silicon pressure sensor, the size of the pressure sensor diaphragm have become smaller year by year, and a microaccelerometer with a size less than 200~300${\mu}{\textrm}{m}$ has been realized. Over the past four or five years, numerical modeling of microsensors and microstructures has gradually been developed as a field of microelectromechanical system(MEMS) design process. In this paper, we study some of the micromachining processes of single crystal silicon(SCS) for the microaccelerometer, and their subsequent processes which might affect thermal and mechanical loads. The finite element method(FEM) has been a standard numerical modeling technique extensively utilized in structural engineering discipline for component design of microaccelerometer. Temperature rise sufficiently low at the suspended beams. Instead, larger temperature gradient can be seen at the bottom of paddle part. The center of paddle part becomes about 5~2$0^{\circ}C$ higher than the corner of paddle and suspended beam edges.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.790-793
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• 2005

In these days, the piezoresistive material has been applied to various sensors in order to measure the change of physical quantities. But the relationship between the sensitivity of a sensor and the position and size of piezoresistor has rarely been studied. Therefore, this paper was focused on the effect of residual stress induced in piezoresistor on the distribution of resistance change ratio and supposed the feasible position of piezoresistor. The resulting are following; The tensile residual stress in the vicinity of piezoresistor decreased the value of resistance change ratio and could not effect on all the area of diaphragm but local area around the piezoresistor. Also, the piezoresistor in the diaphragm type pressure sensor with boss should fabricate in the edge of boss in order to increase the sensitivity of pressure sensor.

• 전기학회논문지
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• 제63권4호
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• pp.495-501
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• 2014

Piezoresistive-type, capacitive-type, and optical-type sensors have mainly been used for measuring a strain. However, in building a sensor network for remote monitoring using these conventional sensors there are disadvantages such as the complexity of a measuring system including wireless communication circuitry and high cost. In this paper, we demonstrates a highly-sensitive surface acoustic wave (SAW) strain sensor which is advantageous to harsh environments and wireless network. We designed and fabricated the SAW strain sensor. The SAW strain sensor attached on a specimen was tested with a tensile tester. The strain on the sensor surface was measured with a commercial strain gauge and compared with that obtained from strain analysis. The central frequency shift of the SAW sensor was measured with a network analyzer. The sensitivity of the SAW strain sensor is 134 $Hz/{\mu}{\varepsilon}$ which is high compared to previous results.