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http://dx.doi.org/10.5369/JSST.2005.14.1.001

A micromachined cantilever for chemically sensitive scanning force microscope applications  

Lee, Dong-Weon (Dept. Mechanical Systems Engineering, Chonnam National University)
Publication Information
Journal of Sensor Science and Technology / v.14, no.1, 2005 , pp. 1-6 More about this Journal
Abstract
This paper describes a novel concept of a chemically sensitive scanning force microscope (CS-SFM). It consists of the conventional SFM and the time-of-flight mass spectrometer (TOF-MS). A switchable cantilever (SC) fabricated by the micromachining technology combines each advantage of two completely different systems, SFM and TOF-MS. The CS-SFM offers to produce both images of topography and chemical information simultaneously. First we employed a rotatable tip holder based on 4 piezotube actuators for demonstration of the possibility of the CS-SFM concept. Second the CS-SFM concept is optimized with the micromachining technology. The micromachined SC with an integrated bimorph actuator and a piezoresistive strain sensor provides a reasonable switching speed of ${\sim}10$ ms which is very attractive for the CS-SFM application. The SC is currently being integrated in an ultra-high-vacuum system to perform various experiments.
Keywords
SFM; TOF-MS; cantilever; bimorph actuator;
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