• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 D
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• pp.2073-2075
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• 2003

This paper presents the active vibration control of flexible cantilever beam using piezoceramic actuators. The transfer function from the force input to the bending displacement was obtained via modal analysis results and piezoelectric constitutive equations. For the active vibration control piezoceramic actuators and sensors were used to construct a flexible smart cantilever beam. To further enhance the sensing and actuation properties of the piezoceramics, a typical interdigitated electrode pattern was fabricated. The PID controller was designed via various simulation and experiment trials. It was shown that the PID controller could suppress vibration of the beam effectively. Simulations and experiments verified good performances of the designed controller.

• 센서학회지
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• 제14권5호
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• pp.302-307
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• 2005

Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown and verified the sinusoidal approximation algorithm that estimates past and coming fringe values. Real-time signal processing program was developed and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below $0.36{\sim}8.6$ nm in the displacement range of $0{\sim}300{\mu}m$ was obtained. The nano-positioner with a piezoelectric actuator and the EFPI sensor system was designed and tested. The positioner successfully reached to the desired destination within 1 nm accuracy.

• 센서학회지
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• 제17권6호
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.350-351
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• 2006

Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, capacitive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. Some elastic materials exhibit a change in bulk resistivity when they are subjected to displacement by an applied pressure. This property is referred to as piezoresistivity and is a major factor influencing the sensitivity of a piezoresistive strain gage. The effect of thick film resistors was first noticed in the early 1970, as described by Holmes in his paper in 1973.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2013년도 추계학술대회 논문집
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• pp.699-705
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• 2013

This paper presents vibration testing, control, and finite element analysis of a piping system, which is subjected to the changes in fluid levels. Nuclear power plants typically employ a cooling system that uses sea water. These systems are subjected to dynamic characteristic changes caused by sea-level variations, which introduces failures of cooling system components. Therefore in this study, analytical and experimental studies were performed to understand the effect of sea-level changes on the dynamic characteristics of piping systems. It was shown that, as the sea-level increases, pipe's natural frequencies decreases in relation to its mode shape. A 1/14 scale model was also built to compare the results obtained by the analytical study. A good agreement between experiment and analytical studies were observed. Finally, an on-line resonant frequency identification system was proposed and developed, which utilizes piezoelectric transducers as sensors and actuators, in order to avoid catastrophic failure of piping systems.

• Advances in robotics research
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• 제1권1호
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• pp.1-19
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• 2014

Microgripper is an essential device in the micro-operation system. It can convert other types of energy into mechanical energy and produce clamp movement with required chucking force, which enables it a broad application prospect in the domain of tiny components' processing and assembly, biomedicine and optics, etc. The performance of a microgripper is dependent on its power supply, type of drive, mechanism structure, sensing components, and controller. This paper presents a state-of-the-art survey of recent development on flexure-based microgrippers. According to the drive type, the existing microgrippers can be mainly classified as electrostatic microgripper, electrothermal microgripper, electromagnetic microgripper, piezoelectric microgripper, and shape memory alloy microgripper. Additionally, some different mechanisms, sensors, and control methods that are used in microgripper system are reviewed. The key issue of how to choose those components in microgripper system design is also addressed.

• International Journal of Precision Engineering and Manufacturing-Green Technology
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• 제5권5호
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• pp.571-581
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• 2018

In the present study, monitoring of elliptical vibration cutting process by utilizing internal data in the ultrasonic elliptical vibration device without external sensors such as a dynamometer and displacement sensor is investigated. The internal data utilized here is the change of excitation frequency, i.e. resonant frequency of the device, voltages applied to the piezoelectric actuators composing the device, and electric currents flowing through the actuators. These internal data change automatically in the elliptical vibration control system in order to keep a constant elliptical vibration against the change of the cutting process. Correlativity between the process and the internal data is described by using a vibration model of ultrasonic elliptical vibration cutting and verified by several experiments, i.e. planing and mirror surface finishing of hardened die steel carried out with single crystalline diamond tools. As a result, it is proved that it is possible to estimate the elements of elliptical vibration cutting process, e.g. tool wear and machining load, which are important for stable cutting in such precision machining.

• 한국정밀공학회지
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• 제13권9호
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• pp.94-103
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• 1996

This paper is concerned with the theroretical and experimental study on the force control of a miniature robotic finger that grasps an object at three other positions with the fingertip. The artificial finger is uniform flexible cantilever beam equipped with a distributed set of compact grasping force secnsors. Control action is applied by a qiexoceramic bimorph strip placed at the base of the finger. The mathematical model of the assembled electro-mechanical system is developed. The distributed sensors are described by a set of concentrated mass-spring system. The formulated equations of motion are then applied to a control problem which the finger is commanded to grasp an object The PID-controller is introduced to drive the finger. The usefulness of the proposed control technique is verified by simulation and experiment.

• 한국음향학회지
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• 제32권1호
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• pp.32-42
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• 2013

일반적인 수중 탐지용 압전 구형 센서는 무지향성이어서 스칼라 양인 수신 음압의 크기만 측정할 뿐 전파 방향은 측정 할 수 없는 한계를 가지고 있다. 본 논문에서는 이러한 구형 센서를 이용해 음파의 크기와 방향을 동시에 찾을 수 있는 방법을 제안한다. 제안한 방법은 구형 센서의 압전 세라믹을 8등분하여 배열한 다음, 각 압전 세라믹 출력전압을 특정한 방법으로 조합하여 음압의 크기와 방향을 파악할 수 있도록 하였다. 또한 압전세라믹 구의 반경과 두께와 같은 구조 변수들의 변화에 따른 감도 변화를 분석하여, 벡터 센서의 감도를 향상 시킬 수 있는 방안을 제시하였다.

• 센서학회지
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• 제23권6호
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• pp.420-424
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• 2014

Aluminum-scandium nitride ($Al_{1-x}Sc_xN$) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 50% $N_2$/Ar. The effect of Sc-doping on the structure and piezoelectric properties of AlN films has been investigated using SEM, XRD, surface profiler and pressure-voltage measurements. The as-deposited AlN films showed polycrystalline phase, and the Sc-doped AlN film, the peak of AlN (002) plane and the crystallinity became very strong. With Sc-doping, the crystal size of AlN film was grown from ~20 nm to ~100 nm. The output signal voltage of AlN sensor showed a linear behavior between 15~65 mV, and output signal voltage of Sc-doped AlN sensor was increased over 7 times. The pressure-sensing sensitivity of AlN film was calculated about 10.6mV/MPa, and $Al_{0.88}Sc_{0.12}N$ film was calculated about 76 mV/MPa.