• 한국재료학회지
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• 제9권12호
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• pp.1263-1269
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• 1999

본 실험에서는 반사층(reflector)을 이용한 FBAR (Film Bulk Acoustic Resonator) 즉, SMR (Solidly Mounted Resonator) 제조에 필요한 재료들의 최적 증착 조건을 설정하여, 이를 바탕으로 제조한 SMR의 특성을 보여주었다. SMR은 상하부 전극층, 압전 박막층, 반사층, 기판으로 구성된다. 상하부 전극으로 알루미늄(Al) 금속 박막을 사용하였고 압전 박막층으로 산화아연(ZnO) 박막을 사용하였다. 실리콘(Si) 기판과 하부 전극 사이에 위치하는 반사층은 5층의 이산화규소 ($Si_2$)와 텅스텐(W) 박막으로 구성되었다. 상하부 전극은 dc 스퍼터링 방법으로 증착아였으며 반사층과 압전 박막층은 rf 스퍼터링 방법으로 증착하였다. 최적 증착 조건에서 증착된 산화아연 (ZnO) 박막은 rocking curve에서 표준편차가 $2.17^{\circ}$의 우수한 c축 우선배향성, 비저항은 $10^4\;{\Omega}cm$이상, 막 표면 거칠기(rms roughness)는 10.6${\AA}$의 특성을 나타내었다. 최적 증착 조건에서 증착된 텅스텐(W)과 이산화규소($Si_2$) 박막의 특성은 박막 거칠기 (rms roughness)가 각각 16 ${\AA}$, 33 ${\AA}$을 나타내었다. 또한 증착된 알루미늄 금속 박막의 비저항은 $5.1{\times}10^{-6}\;{\Omega}cm$이었다. 반도체 기본 공정을 이용하여 면적 $250{\times}250\;{\mu}m^2$의 SMR 소자를 만들고, 네트웍 분석기로 SMR 소자의 공진 특성을 분석하였다. 공진특성은 1.244 GHz에서 직렬공진, 1.251 GHz에서 병렬공진을 나타내었다. SMR 소자의 공진특성에서 공진기의 Q값은 1200이었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1594-1596
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• 2004

Film bulk acoustic resonator (FBAR) devices which adopt a membrane-type configuration are fabricated by a novel process. In contrast to the conventional FBAR structure, the newly fabricated resonator doesn't employ any supporting layer below or above it, so that the properties of piezoelectric layer are not influenced by the bottom electrode material. FBAR devices with Mo/AlN/Metal configuration are also fabricated. The frequency response characteristics ($S_{11}$) of the devices fabricated using the proposed process are compared with those of the conventional devices. The return losses are also estimated, in terms of the kind and thickness of bottom electrode materials.

• 한국음향학회:학술대회논문집
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• 한국음향학회 2000년도 하계학술발표대회 논문집 제19권 1호
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• pp.275-278
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• 2000

In this study, the acoustic transducer of a thin circular disc-type with PZT/Metal was designed. The dielectric and piezoelectric properties of $0.5wt\%$ $MnO_2$ and NiO doped 0.1Pb($Mg_{1/3}$$Nb_{2/3}$)$O_3$-$0.45PbTiO_3$-$0.45PbZrO_3$ ceramics were investigated aiming at acoustic transducer applications. The vibration characteristics for the laminated circular plate was analyzed for the various thickness and diameter of the piezoceramic layer and metal layer. The acoustic characteristics which is radiated from the acoustic transducer within the finite space was simulated using the finite element method. It has been observed that the characteristics of the sound pressure ard impedance response calculated for the various models of the size and geometry of acoustic transducer.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2005년도 춘계학술발표대회 논문집
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• pp.1-4
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• 2005

A higher order zig-zag shell theory is developed to refine accurately predict deformation and stress of smart shell structures under the mechanical, thermal, and electric loading. The displacement fields through the thickness are constructed by superimposing linear zig-zag field to the smooth globally cubic varying field. Smooth parabolic distribution through the thickness is assumed in the transverse deflection in order to consider transverse normal deformation. The mechanical, thermal, and electric loading is applied in the sinusoidal distribution function in the in-surface direction. Thermal and electric loading is given in the linear variation through the thickness. Especially, in electric loading case, voltage is only applied in piezo-layer. The layer-dependent degrees of freedom of displacement fields are expressed in terms of reference primary degrees of freedom by applying interface continuity conditions as well as bounding surface conditions of transverse shear stresses. In order to obtain accurate transverse shear and normal stresses, integration of equilibrium equation approach is used. The numerical examples of present theory demonstrate the accuracy and efficiency of the proposed theory. The present theory is suitable for the predictions of behaviors of thick smart composite shell under mechanical, thermal, and electric loadings combined.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.51-54
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• 2008

A novel stereolithography method using evanescent light has been proposed as a means to realize 100-nanometer resolution. An in-process measurement system with high accuracy has been introduced to the nanostereolithography apparatus. Specifically, an optical microscopic system was developed to monitor the exposure process and a confocal positioning system was established to improve the longitudinal positioning accuracy in the layer-by-layer process. A high-power objective lens, a tube lens, and a charge coupled device (CCD) were included in the optical microscopic system, whereas a laser, a high-power objective lens, a piezoelectric (PZT) stage, a condenser lens, a pinhole, and a photomultiplier (PMT) made up the confocal microscopic system. Two verification experiments were conducted, and the results indicated that the optical microscopic system had a horizontal resolution of 200 nm and that the confocal positioning system provided a depth resolution of 30.8 nm. These results indicate that nanostereolithography can be successfully performed with this system.

• Advances in nano research
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• 제9권4호
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• pp.237-250
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• 2020

An accurate plate theory for assessing sandwich structures is of interest in order to provide precise results. Hence, this paper develops Layer-Wise (LW) theory for reaching precise results in terms of buckling and vibration behavior of Functionally Graded Carbon Nanotube-Reinforced Composite (FG-CNTRC) annular nanoplates. Furthermore, for simulating the structure much more realistic, its edges are elastically restrained against in-plane and transverse displacement. The nano structure is integrated with piezoelectric layers. Four distributions of Single-Walled Carbon Nanotubes (SWCNTs) along the thickness direction of the core layer are investigated. The Differential Quadrature Method (DQM) is utilized to solve the motion equations of nano structure subjected to the electric field. The influence of various parameters is depicted on both critical buckling load and frequency of the structure. The accuracy of solution procedure is demonstrated by comparing results with classical edge conditions. The results ascertain that the effects of different distributions of CNTs and their volume fraction are significant on the behavior of the system. Furthermore, the amount of in-plane and transverse spring coefficients plays an important role in the buckling and vibration behavior of the nano-structure and optimization of nano-structure design.

• E2M - 전기 전자와 첨단 소재
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• 제10권2호
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• pp.126-133
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• 1997

In order to apply for the gas sensing layer and the piezoelectric thin film devices, we studied the effects of magnetron sputtering conditions and annealing temperature on the electrical and structual characteristics of the ZnO thin film. The optimal deposition conditions, in order to obtain a c axis of the ZnO (002) phase thin film which is perpendicular to SiO$_{2}$/Si substrate, were like these ; substrate temperature 150.deg. C, chamber pressure 2 mtorr, R.F. power 300 watts, gas flow ratio 0.4[O$_{2}$(Ar + $O_{2}$)]. When the ZnO thin film was annealed in 600.deg. C, $O_{2}$ gas ambient for 1 hr, the resistivity was 2.6 x 10$^{2}$.ohm.cm and the grain size of ZnO thin film was less than 1 .mu.m. So the ZnO thin film acquired from above conditions can apply for the gas sensing layer which require a c axis perpendicular to the substrate surface.

• Advances in nano research
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• 제13권1호
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• pp.29-45
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• 2022

The optimization for dynamic response associated with a cylindrical shell which is made of laminated composites embedded in a piezoelectric layer which is subjected to temperature rises and is resting on an elastic foundation is investigated for the first time. The first shear order theory (FSDT) is utilized in order to obtain the strain relations of the shell. Then, using the energy method, the equations of motions as well as boundary condition of the problem are attained. The formulation of this study together with the solution procedure which is a numerical solution method, differential quadrature method (DQM) is validated using other researches. This paper presents a thorough study on the parameters which impacts the vibration frequency of the laminated shell. The results of this paper shows that any type of laminated composite shell can reduce the vibration frequency providing that the angle related to layer are higher than 85 degrees. Also, in order to reduce the effect of temperature rises, the laminated composites instead of orthotropic one can be used.

• ETRI Journal
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• 제24권4호
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• pp.270-279
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• 2002

We present a self-consistent numerical method for calculating the conduction-band profile and subband structure of AlGaN/GaN single heterojunctions. The subband calculations take into account the piezoelectric and spontaneous polarization effect and the Hartree and exchange-correlation interaction. We calculate the dependence of electron sheet concentration and subband energies on various structural parameters, such as the width and Al mole fraction of AlGaN, the density of donor impurities in AlGaN, and the density of acceptor impurities in GaN, as well as the electron temperature. The electron sheet concentration was sensitively dependent on the Al mole fraction and width of the AlGaN layer and the doping density of donor impurities in the AlGaN. The calculated results of electron sheet concentration as a function of the Al mole fraction are in excellent agreement with some experimental data available in the literature.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2001년도 춘계학술발표대회 논문집
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• pp.114-117
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• 2001

A higher order zig-zag plate theory is developed to refine accurately predict fully coupled of the mechanical, thermal, and electric behaviors. Both the displacement and temperature fields through the thickness are constructed by superimposing linear zig-zag field to the smooth globally cubic varying field. Smooth parabolic distribution through the thickness is assumed in the transverse deflection in order to consider transverse normal deformation. Linear zig-zag form is adopted in the electric field. The layer-dependent degrees of freedom of displacement and temperature fields are expressed in terms of reference primary degrees of freedom by applying interface continuity conditions as well as bounding surface conditions of transverse shear stresses and transverse heat flux The numerical examples of coupled and uncoupled analysis are demonstrated the accuracy and efficiency of the present theory. The present theory is suitable for the predictions of fully coupled behaviors of thick smart composite plate under mechanical, thermal, and electric loadings.