• 제목/요약/키워드: Piezoelectric layer

검색결과 352건 처리시간 0.024초

이동통신용 표면탄성파 필터의 내전력 특징 (Power Durability Properties of Surface Acoustic Wave Filters for Mobile Telecommunications)

  • 남효덕;김동수;김흥락;김광일
    • 센서학회지
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    • 제9권4호
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    • pp.327-333
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    • 2000
  • 중심주파수가 340MHz이고 $1.435{\mu}m$의 IDT 전극 폭과 간격을 가진 양방향 전송형 SAW필터를 LN $128^{\circ}$ Y-X 웨이퍼의 압전기판으로 제작하였다. 전력 내구성을 개선시키기 위한 방안으로 Al에 비해 밀도가 크고, 열팽창계수가 작으며 접착력이 좋은 Ti를 압전체기판과 전극물질인 Al 사이에 증착시켰다. Ti의 두께 및 열처리 온도가 내전력 특성에 미치는 영향을 분석하였는데, Ti층이 두꺼울수록 내전력이 개선되었으며, 특히 $300^{\circ}C$에서 열처리하였을 때 가장 우수하였다.

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Vibration control, energy harvesting and forced vibration of the piezoelectric NEMS via paradox-free local/nonlocal theory

  • Zohre Moradi;Farzad Ebrahimi;Mohsen Davoudi
    • Advances in nano research
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    • 제14권4호
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    • pp.335-353
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    • 2023
  • The possibility of energy harvesting as well as controlled vibration of a three-layered beam consisting of two piezoelectric layer and one core layer made of nonpiezoelectric material is investigated using paradox-free local/nonlocal theory. The three-layered nanobeam is resting on an elastic foundation and subjected to a blast load. Also, the core layer is made of Nano-composites reinforced by CNTs and carbon fibers (MHCD). Governing equations as well as boundary conditions are obtained using Hamilton,s principle. The equations discretized by Generalized Differential Quadrature Method (GDQM) and solved by Newmark beta method. In addition, two differential and integral gains are employed for controlling the forced vibration. The size-dependency of the elastic foundation is considered using two-phase elasticity. The effect of elastic foundation, control gains, nonlocal factor, as well as parameters affecting the core material on the forced vibration and energy harvesting is investigated in detail. The equations as well as solution procedure is validated utilizing some compassion studies. This work can be a basis for future studies on energy harvesting and controlled vibration in small scales.

유한요소 해석을 이용한 적층 압전 세라믹 액츄에이터의 응력 특성 (Stress Properties in Multilayer Piezoelectric Ceramic Actuators using Finite Element Analysis)

  • 홍재일
    • 한국전기전자재료학회논문지
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    • 제11권11호
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    • pp.963-968
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    • 1998
  • The stress distribution in multilayer piezoelectric ceramic actuators was investigated by Finite element analysis. The y direction stress was concentrated at electrode tip. The y direction maximum stress was decreased to 4.9$\times10^ 7 N/m^2$ with internal electrode gap(a) until 0.4 mm and was not much difference with external electrode thickness(c). The stress distribution with internal layers was almost same and the stress distribution of load condition was higher than that of no load condition The y direction maximum stress increased with the number of layer and saturated at 260 layers. In the case of defective actuator, the stress distribution was disconnected around the defect and larger than that of normal actuator.

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와이어 본딩용 압전 액츄에이터의 진동 특성 (Vibration Characteristics of a Wire-Bonding Piezoelectric Actuator)

  • 김영우;김경업;이승엽
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2007년도 추계학술대회논문집
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    • pp.578-582
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    • 2007
  • In this paper, vibration modes and frequencies of a ring-type stacked piezoelectric actuator for a wire bonding transducer system are analyzed using FEM simulations. We implement experiments using a commercial product model of the actuator PZT module which consists of 6 layer ring-type PZT and 7 electrodes, combined bolts, nut and tinut. There are two main results: One is that FEM analysis should consider the effect the harmonic voltage input in order to meet the experimental results. The other is that the current wire bonder using exciting frequency of 136 kHz should be modified in order to improve the actuator and bonding performance because the actuator module has the main longitudinal mode of 145 kHz.

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PMN-PZ-PT 세라믹스를 이용한 적층형 액츄에이터의 변위특성 (Electric-Field-Induced Strain Properties of Multi Layer Ceramic Actuator Using PMN-PZ-PT Ceramics)

  • 하문수;정순종;고중혁;송재성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.620-623
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    • 2003
  • Non-linear behaviors of multilayer piezoelectric ceramic actuator (MCA) were investigated under electrical and mechanical stress. DC 100 V bias was applied to the MCA to obtain displacement. Laser vibrometer, which using Doppler effect, was employed to characterize displacement caused by $d_{33}$ mode of MCA. To understand this non-linear behavior of MCA, displacement was measured and compared under different load states. By increasing load, electric field-induced strain and piezoelectric constant($d_{33}$) of MCA was decreased. We attribute this phenomenon to the domain wall motion and depoling of MCA under heavy load.

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AlN 압전 진동형 마이크로 에너지 하베스터 설계 및 분석 (Design and Analysis of AlN Piezoelectric Micro Energy Harvester Based on Vibration)

  • 이병철;정귀상
    • 한국전기전자재료학회논문지
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    • 제23권5호
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    • pp.424-428
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    • 2010
  • This paper describes the design and analysis of AlN piezoelectric micro energy harvester. The harvester was designed to convert ambient vibration energy to electrical power as a AlN piezoelectric material compatible with CMOS (complementary metal oxide semiconductor) process. To cut off the leakage current, AlN was used as the insulating layer. Also, Mo was used for the excellent c-axis crystal growth as the bottom electrode. The AlN harvester which it has the low operating frequency was designed by using the ANSYS FEA (finite element analysis). From the simulation results, the resonance frequency of designed model is about 360 Hz and analyzed the bending mode, displacement and expectation output.

Crack Problem at Interface of Piezoelectric Strip Bonded to Elastic Layer Under Anti-Plane Shear

  • Lee, Kang-Yong;Kwon, Jong-Ho
    • Journal of Mechanical Science and Technology
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    • 제15권1호
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    • pp.61-65
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    • 2001
  • Using the theory of linear piezoelectricity, the problem of two layered strip with a piezoelectric ceramic bonded to an elastic material containing a finite interface crack is considered. The out-of-plane mechanical and in-plane electrical loadings are simultaneously applied to the strip. Fourier transforms are used to reduce the problem to a pair of dual integral equations, which is then expressed in terms of a Fredholm integral equation of the second kind. The stress intensity factor is determined, and numerical analyses for several materials are performed and discussed.

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압전재료와 점탄성재료를 이용한 평판진동 음장의 능동제어 (Active control of sound fields from vibrating plates using piezoelectric and viscoelastic material)

  • 강영규;김재환;최승복
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2002년도 춘계학술대회논문집
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    • pp.311-315
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    • 2002
  • The coupled finite/boundary element method is used in numerical analysis for acoustic radiation from the vibration of rectangular composite plate which is simply supported. This analysis is validated using the Wallace equation for an isotropic plate. Active control of sound fields has been carried out using 3 pairs of piezoelectric sensor/actuator and a pair of viscoelastic material by passive constrained layer damping treatment. The results show that the optimal placement of piezoelectric sensor/actuator and VE patch is required to control the sound fields from a vibrating composite plate.

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고온용 압전 레벨 스위치 개발 (Development of Piezoelectric Level Switch for High Temperature)

  • 김나리;이영진
    • 한국전기전자재료학회논문지
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    • 제28권12호
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    • pp.802-807
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    • 2015
  • This paper describes the development of a piezoelectric level switch, which aims to effectively monitor the level status in high ambient temperatures. In order to adjust the impedance near the resonant frequency and temperature characteristics, the effect of the case and backing layer materials on its performance was analyzed using the finite element method (FEM). The suggested prototype new level switch has three heat-sink plates attached to SUS bar of 230 mm long, and case of PEEK which contains PZT sensing part. To illustrate the validity of this level switch, 10 samples are prepared and investigated the sensing performance through the high and low temperature ambient.

면외 충격하중을 받는 3층 압전 복합재료내의 가장자리 균열거동 (Edge Crack Behavior in a Three Layered Piezoelectric Composite Under Anti-Plane Impact Loads)

  • 권순만;손명섭;이강용
    • 대한기계학회논문집A
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    • 제26권10호
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    • pp.2172-2179
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    • 2002
  • In this paper, we examine the dynamic electromechanical behavior of an edge crack in a piezoelectric ceramic layer bonded between two elastic layers under the combined anti-plane mechanical shear and in-plane electric transient loadings. We adopted both the permeable and impermeable crack boundary conditions. Fourier transforms are used to reduce the problem to the solution of two pairs of dual integral equations, which are then expressed to a Fredholm integral equation of the second kind. Numerical values on the dynamic energy release rate are presented to show the dependences upon the geometry, material combination, electromechanical coupling coefficient and electric field.