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http://dx.doi.org/10.4313/JKEM.2010.23.5.424

Design and Analysis of AlN Piezoelectric Micro Energy Harvester Based on Vibration  

Lee, Byung-Chul (School of Electrical Engineering, University of Ulsan)
Chung, Gwiy-Sang (School of Electrical Engineering, University of Ulsan)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.23, no.5, 2010 , pp. 424-428 More about this Journal
Abstract
This paper describes the design and analysis of AlN piezoelectric micro energy harvester. The harvester was designed to convert ambient vibration energy to electrical power as a AlN piezoelectric material compatible with CMOS (complementary metal oxide semiconductor) process. To cut off the leakage current, AlN was used as the insulating layer. Also, Mo was used for the excellent c-axis crystal growth as the bottom electrode. The AlN harvester which it has the low operating frequency was designed by using the ANSYS FEA (finite element analysis). From the simulation results, the resonance frequency of designed model is about 360 Hz and analyzed the bending mode, displacement and expectation output.
Keywords
Vibration energy; Energy harvesting; AlN; FEA;
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