• 한국전기전자재료학회논문지
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• 제21권6호
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• pp.556-561
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• 2008

This paper reports the characteristics of piezoelectric microspeakers that are audible in open air with high quality piezoelectric AlN thin film according to the materials properties. When we use a tensile-stressed silicon nitride diaphragm as a supporting layer, the Sound Pressure Level (SPL) is relatively small and constant at low frequency region and shows about 70 dB at 10 kHz. However, in case of a compressively stressed composite diaphragm, the SPL of the fabricated microspeakers shows higher output pressure than those of a tensile-stressed diaphragm. It produces more than 66 dB from 100 Hz to 15 kHz and the highest SPL is about 100 dB at 9.3 kHz with $20V_{peak-to-peak}$, sinusoidal input biases and at 10 mm distances from the fabricated microspeakers to the reference microphone. From the experimental results, it is superior to have a compressively composite diaphragm in order to produce a high SPL in piezoelectric microspeaker.

• Smart Structures and Systems
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• 제4권1호
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• pp.67-84
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• 2008

The present contribution is concerned with the static and dynamic stability of a piezo-laminated Bernoulli-Euler beam subjected to an axial compressive force. Recently, an inconsistent derivation of the equations of motions of such a smart structural system has been presented in the literature, where it has been claimed, that an axial piezoelectric actuation can be used to control its stability. The main scope of the present paper is to show that this unfortunately is impossible. We present a consistent theory for composite beams in plane bending. Using an exact description of the kinematics of the beam axis, together with the Bernoulli-Euler assumptions, we obtain a single-layer theory capable of taking into account the effects of piezoelectric actuation and buckling. The assumption of an inextensible beam axis, which is frequently used in the literature, is discussed afterwards. We show that the cited inconsistent beam model is due to inadmissible mixing of the assumptions of an inextensible beam axis and a vanishing axial displacement, leading to the erroneous result that the stability might be enhanced by an axial piezoelectric actuation. Our analytical formulations for simply supported Bernoulli-Euler type beams are verified by means of three-dimensional finite element computations performed with ABAQUS.

• 한국전기전자재료학회논문지
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• 제19권12호
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• pp.1099-1105
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• 2006

In this paper, the equivalent circuit model of a Rosen-type multilayer piezoelectric transformer(MPT) has been proposed based on the Mason's equivalent circuit model and the principle of single layer piezoelectric plate. From the piezoelectric direct and converse effects, the symbolic expressions between the electric inputs and outputs of the MPT have been derived from the equivalent circuit model. A simplified equivalent circuit model of the MPT whose driving part has a single input form has been proposed. The symbolic expressions of the driving part have been derived from the simplified equivalent circuit model and the model was compared with the multi-input equivalent circuit model through the simulation. In the comparisons between the simulation results and the experimental data, output voltage is 630 Vp-p in case of 11-layered MPT and 670 Vp-p for 13-layered MPT over the experiment range. As the load resistance increases, output voltage increases and saturates over $300k{\Omega}$ and the resonant frequency changes from 102 kHz to 103 kHz. The simulation and the experimental results agree well over different load resistances and frequencies.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.222-223
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• 2008

Recently, piezoelectric transformer is applied to wide fields. Multi layer piezoelectric transformer has the advantage of high step up ratio, high electromechanical coupling coefficient(Kp) and high mechanical quality factor(Qm), however it shows the peeling-phenomenon of electrode, and high price due to high sintering temperature. Therefore this study focus on the method for fabrication of high power rosen type piezoelectric transformers. The composition of $0.01Pb(Ni_{1/3}Nb_{2/3)O_3$ - 0.08Pb$(Mn_{1/3}Nb_{2/3})O_3$-0.91Pb$(Zr_{0.505}Ti_{0.495})O_3$(abbreviated as PNN-PMN-PZT) ceramics is employed for this study.

• 대한기계학회논문집A
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• 제31권8호
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• pp.870-879
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• 2007

In this study, various damage modes in bending unimorph piezoelectric composite actuators with a thin sandwiched PZT plate during bending fracture tests have been evaluated by monitoring acoustic emission (AE) signals in terms of waveform and peak frequency as well as AE parameters. Three kinds of actuator specimens consisting of woven fabric fiber skin layers and a PZT ceramic core layer are loaded with a roller and an AE activity from the specimen is monitored during the entire loading using an AE transducer mounted on the specimen. AE characteristics from a monolithic PZT ceramic with a thickness of $250{\mu}m$ are examined first in order to distinguish different AE signals from various possible damage modes in piezoelectric composite actuators. Post-failure observations and stress analyses in the respective layers of the specimens are conducted to identify particular features in the acoustic emission signal that correspond to specific types of damage modes. As a result, the signal classification based on waveform and peak frequency analyses successfully describes the failure process of the bending piezoelectric composite actuator exhibiting diverse failure mechanisms. Furthermore, it is elucidated that when the PZT ceramic embedded actuators are loaded mechanical bending loads, the failure process of actuator specimens with different lay-up configurations is almost same irrespective of their lay-up configurations.

• 정보저장시스템학회논문집
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• 제3권1호
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• pp.47-53
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• 2007

In this paper, a thermo-piezoelectric mechanism with integrated heaters and piezoelectric sensors has been studied for low power probe-based data storage. Silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been developed to improve the uniformity of cantilevers. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. And, the $34\times34$ probe array integrated with CMOS circuits has been successfully developed by simple one-step bonding process. The process can simplify the process step and reduce tip wear using silicon nitride tip.

• 한국전기전자재료학회논문지
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• 제17권2호
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• pp.184-189
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• 2004

The effects of $Y_2$ $O_3$-substitution on the piezoelectric properties of Pb[(N $i_{1}$3/N $b_{2}$3/)$_{0.15}$(Z $r_{1}$2/ $Ti_{1}$2/)$_{0.85}$] $O_3$ceramics were investigated. It was found that $Y^{3+}$ ions incorporate into Pb-sites of the ceramics, resulting in a increased lattice anisotropy and formation of Pb-vacancies. As a result, an orthorhombic-tetragonal phase transition was induced when $\chi$>0.005. At the morphotropic phase boundary of x=0.005, piezoelectric constants( $k_{p}$, $k_{33}$, and $d_{33}$) showed maximum values of 0.53, 0.58, and 350pC/N, respectively. A 30-layer actuator fabricated with the above material showed a maximum strain of 0.12％ under 100V DC bias.

• 한국전기전자재료학회논문지
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• 제24권10호
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• pp.803-806
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• 2011

1 mol% $Li_2O$ excess $0.9(Na_{0.52}K_{0.48})NbO_3-0.1LiTaO_3$ lead-free piezoelectric multilayer ceramic actuators were investigated to determine their aging properties. To reduce the thermal aging behavior, we applied a rectified unipolar electric field of 5 kV/mm to the specimen to accelerate the electric aging behavior. By employing a rectified unipolar electric field for the piezoelectric actuators, we could remove undesirable heating from the relaxation current in the motion of the ferroelectric domain. To accelerate the aging test, the applied electric fields had a frequency of 900 Hz. To have enough time for charging and discharging, we employed an accurate time constant to design the equivalent circuit model for the aging tester. To extract exact aging behavior, we measured the pseudo-piezoelectric coefficient before and after the aging process. We also measured the electro-mechanical coupling coefficient, the frequency-dependent dielectric permittivity, and the impedance to compare with fresh and aged specimen.

• Smart Structures and Systems
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• 제24권4호
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• pp.435-446
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• 2019

The existing piezoelectric spherical transducers with fixed prescribed dynamic characteristics limit their application in scenarios with multi-frequency or frequency variation requirement. To address this issue, this work proposes an improved design of piezoelectric spherical transducers using the resistance tuning method. Two piezoceramic shells are the functional elements with one for actuation and the other for tuning through the variation of load resistance. The theoretical model of the proposed design is given based on our previous work. The effects of the resistance, the middle surface radius and the thickness of the epoxy adhesive layer on the dynamic characteristics of the transducer are explored by numerical analysis. The numerical results show that the multi-frequency characteristics of the transducer can be obtained by tuning the resistance, and its electromechanical coupling coefficient can be optimized by a matching resistance. The proposed design and derived theoretical solution are validated by comparing with the literature given special examples as well as an experimental study. The present study demonstrates the feasibility of using the proposed design to realize the multi-frequency characteristics, which is helpful to improve the performance of piezoelectric spherical transducers used in underwater acoustic detection, hydrophones, and the spherical smart aggregate (SSA) used in civil structural health monitoring, enhancing their operation at the multiple working frequencies to meet different application requirements.

• Structural Engineering and Mechanics
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• 제85권2호
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• pp.247-263
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• 2023

The paper deals with the study of the mechanical time-harmonic forced vibration of the hydro-piezoelectric system consisting of the piezoelectric plate and compressible viscous fluid with finite depth. The exact equations of motion of the theory of linear electro-elasticity for piezoelectric materials are employed for describing the plate motion, however, the fluid flow is described by employing the linearized Navier-Stokes equations for a compressible (barotropic) viscous fluid. The plane-strain state in the plate and the plane flow of the fluid are considered and the corresponding mathematical problems are solved by employing the Fourier transform with respect to the space coordinate which is on the coordinate axis directed along the platelying direction. The expressions of the corresponding Fourier transform are determined analytically, however, the inverse transforms are found numerically. Numerical results on the interface pressure and the electrical potential are obtained for various PZT materials and these results are discussed. According to these results, in particular, it is established that the electromechanical coupling effect can significantly decrease the interface pressure.