• Korean Journal of Materials Research
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• v.9 no.12
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• pp.1263-1269
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• 1999

An FBAR(Solidly Mounted Resonator) was fabricated using reflector layers which prohibit the penetration of bulk acoustic wave into substrate. The SMR consisted of top and bottom electrodes(Al films), a piezoelectric layer (ZnO film), reflector layers(W/$Si_2$ films) and Si substrate. The electrodes were deposited by dc sputtering. The piezoelectric layer and the reflector layers were deposited by rf magnetron sputtering. The control of crystallinity, microstructures and electric properties of each layer was essential for attaining the optimum FBAR characteristics. Under the best deposition conditions for FBAR devices, the ZnO films had highly c-axis preferred orientation(${\sigma}=2.17^{\circ}$), resistivity of $10^4\;{\omega}cm$, and surface roughness of 10.6 ${\AA}$. On the other hand, the surface roughness of W and $Si_2$ films was 16 ${\AA}$ and 33 ${\AA}$, respectively, and the resistivity of Al film was $5.1{\times}10^{-6}\;{\Omega}cm$. The SMR devices were fabricated by the conventional semiconductor processes. In the resonance conditions of the SMR, the series resonance frequency (fs) and the parallel resonance frequency(fp) were 1.244 GHz and 1.251 GHz, respectively and the quality factor(Q) was 1200.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1594-1596
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• 2004

Film bulk acoustic resonator (FBAR) devices which adopt a membrane-type configuration are fabricated by a novel process. In contrast to the conventional FBAR structure, the newly fabricated resonator doesn't employ any supporting layer below or above it, so that the properties of piezoelectric layer are not influenced by the bottom electrode material. FBAR devices with Mo/AlN/Metal configuration are also fabricated. The frequency response characteristics ($S_{11}$) of the devices fabricated using the proposed process are compared with those of the conventional devices. The return losses are also estimated, in terms of the kind and thickness of bottom electrode materials.

• Proceedings of the Acoustical Society of Korea Conference
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• spring
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• pp.275-278
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• 2000

In this study, the acoustic transducer of a thin circular disc-type with PZT/Metal was designed. The dielectric and piezoelectric properties of $0.5wt\%$ $MnO_2$ and NiO doped 0.1Pb($Mg_{1/3}$$Nb_{2/3}$)$O_3$-$0.45PbTiO_3$-$0.45PbZrO_3$ ceramics were investigated aiming at acoustic transducer applications. The vibration characteristics for the laminated circular plate was analyzed for the various thickness and diameter of the piezoceramic layer and metal layer. The acoustic characteristics which is radiated from the acoustic transducer within the finite space was simulated using the finite element method. It has been observed that the characteristics of the sound pressure ard impedance response calculated for the various models of the size and geometry of acoustic transducer.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2005.04a
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• pp.1-4
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• 2005

A higher order zig-zag shell theory is developed to refine accurately predict deformation and stress of smart shell structures under the mechanical, thermal, and electric loading. The displacement fields through the thickness are constructed by superimposing linear zig-zag field to the smooth globally cubic varying field. Smooth parabolic distribution through the thickness is assumed in the transverse deflection in order to consider transverse normal deformation. The mechanical, thermal, and electric loading is applied in the sinusoidal distribution function in the in-surface direction. Thermal and electric loading is given in the linear variation through the thickness. Especially, in electric loading case, voltage is only applied in piezo-layer. The layer-dependent degrees of freedom of displacement fields are expressed in terms of reference primary degrees of freedom by applying interface continuity conditions as well as bounding surface conditions of transverse shear stresses. In order to obtain accurate transverse shear and normal stresses, integration of equilibrium equation approach is used. The numerical examples of present theory demonstrate the accuracy and efficiency of the proposed theory. The present theory is suitable for the predictions of behaviors of thick smart composite shell under mechanical, thermal, and electric loadings combined.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.3
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• pp.51-54
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• 2008

A novel stereolithography method using evanescent light has been proposed as a means to realize 100-nanometer resolution. An in-process measurement system with high accuracy has been introduced to the nanostereolithography apparatus. Specifically, an optical microscopic system was developed to monitor the exposure process and a confocal positioning system was established to improve the longitudinal positioning accuracy in the layer-by-layer process. A high-power objective lens, a tube lens, and a charge coupled device (CCD) were included in the optical microscopic system, whereas a laser, a high-power objective lens, a piezoelectric (PZT) stage, a condenser lens, a pinhole, and a photomultiplier (PMT) made up the confocal microscopic system. Two verification experiments were conducted, and the results indicated that the optical microscopic system had a horizontal resolution of 200 nm and that the confocal positioning system provided a depth resolution of 30.8 nm. These results indicate that nanostereolithography can be successfully performed with this system.

• Advances in nano research
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• v.9 no.4
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• pp.237-250
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• 2020

An accurate plate theory for assessing sandwich structures is of interest in order to provide precise results. Hence, this paper develops Layer-Wise (LW) theory for reaching precise results in terms of buckling and vibration behavior of Functionally Graded Carbon Nanotube-Reinforced Composite (FG-CNTRC) annular nanoplates. Furthermore, for simulating the structure much more realistic, its edges are elastically restrained against in-plane and transverse displacement. The nano structure is integrated with piezoelectric layers. Four distributions of Single-Walled Carbon Nanotubes (SWCNTs) along the thickness direction of the core layer are investigated. The Differential Quadrature Method (DQM) is utilized to solve the motion equations of nano structure subjected to the electric field. The influence of various parameters is depicted on both critical buckling load and frequency of the structure. The accuracy of solution procedure is demonstrated by comparing results with classical edge conditions. The results ascertain that the effects of different distributions of CNTs and their volume fraction are significant on the behavior of the system. Furthermore, the amount of in-plane and transverse spring coefficients plays an important role in the buckling and vibration behavior of the nano-structure and optimization of nano-structure design.

• Electrical & Electronic Materials
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• v.10 no.2
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• pp.126-133
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• 1997

In order to apply for the gas sensing layer and the piezoelectric thin film devices, we studied the effects of magnetron sputtering conditions and annealing temperature on the electrical and structual characteristics of the ZnO thin film. The optimal deposition conditions, in order to obtain a c axis of the ZnO (002) phase thin film which is perpendicular to SiO$_{2}$/Si substrate, were like these ; substrate temperature 150.deg. C, chamber pressure 2 mtorr, R.F. power 300 watts, gas flow ratio 0.4[O$_{2}$(Ar + $O_{2}$)]. When the ZnO thin film was annealed in 600.deg. C, $O_{2}$ gas ambient for 1 hr, the resistivity was 2.6 x 10$^{2}$.ohm.cm and the grain size of ZnO thin film was less than 1 .mu.m. So the ZnO thin film acquired from above conditions can apply for the gas sensing layer which require a c axis perpendicular to the substrate surface.

• Advances in nano research
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• v.13 no.1
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• pp.29-45
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• 2022

The optimization for dynamic response associated with a cylindrical shell which is made of laminated composites embedded in a piezoelectric layer which is subjected to temperature rises and is resting on an elastic foundation is investigated for the first time. The first shear order theory (FSDT) is utilized in order to obtain the strain relations of the shell. Then, using the energy method, the equations of motions as well as boundary condition of the problem are attained. The formulation of this study together with the solution procedure which is a numerical solution method, differential quadrature method (DQM) is validated using other researches. This paper presents a thorough study on the parameters which impacts the vibration frequency of the laminated shell. The results of this paper shows that any type of laminated composite shell can reduce the vibration frequency providing that the angle related to layer are higher than 85 degrees. Also, in order to reduce the effect of temperature rises, the laminated composites instead of orthotropic one can be used.

• ETRI Journal
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• v.24 no.4
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• pp.270-279
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• 2002

We present a self-consistent numerical method for calculating the conduction-band profile and subband structure of AlGaN/GaN single heterojunctions. The subband calculations take into account the piezoelectric and spontaneous polarization effect and the Hartree and exchange-correlation interaction. We calculate the dependence of electron sheet concentration and subband energies on various structural parameters, such as the width and Al mole fraction of AlGaN, the density of donor impurities in AlGaN, and the density of acceptor impurities in GaN, as well as the electron temperature. The electron sheet concentration was sensitively dependent on the Al mole fraction and width of the AlGaN layer and the doping density of donor impurities in the AlGaN. The calculated results of electron sheet concentration as a function of the Al mole fraction are in excellent agreement with some experimental data available in the literature.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2001.05a
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• pp.114-117
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• 2001

A higher order zig-zag plate theory is developed to refine accurately predict fully coupled of the mechanical, thermal, and electric behaviors. Both the displacement and temperature fields through the thickness are constructed by superimposing linear zig-zag field to the smooth globally cubic varying field. Smooth parabolic distribution through the thickness is assumed in the transverse deflection in order to consider transverse normal deformation. Linear zig-zag form is adopted in the electric field. The layer-dependent degrees of freedom of displacement and temperature fields are expressed in terms of reference primary degrees of freedom by applying interface continuity conditions as well as bounding surface conditions of transverse shear stresses and transverse heat flux The numerical examples of coupled and uncoupled analysis are demonstrated the accuracy and efficiency of the present theory. The present theory is suitable for the predictions of fully coupled behaviors of thick smart composite plate under mechanical, thermal, and electric loadings.