• 한국멀티미디어학회논문지
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• 제25권9호
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• pp.1307-1315
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• 2022

In this paper, we proposed and developed a new portable skin elasticity measuring device based on the indentation method using piezoelectric effect. The proposed device is designed to minimize the uncertainty caused by the layer structure of the skin when measuring the elasticity of the skin. And, we developed a piezoelectric-based thin-film pressure sensor that can measure quantitatively and quickly during repeated measurement as a device sensor. To confirm the effectiveness of the proposed measuring device, it was compared with the experimental results of the conventional measuring devices under the same experimental conditions, and statistical correlation analysis was performed between the experimental data of the proposed measuring device and the experimental data of the conventional measuring devices. As a result of the correlation analysis, it was confirmed that the proposed measuring device had a high correlation with the conventional measuring devices. Therefore, it was confirmed that the proposed skin elasticity measuring device was effective.

• 센서학회지
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• 제31권5호
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• pp.293-300
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• 2022

Flexible, wearable, and implantable electronic sensors have started to gain popularity in improving the quality of life of sick and healthy people, shifting the future paradigm with high sensitivity. However, conventional technologies with a limited lifespan occasionally limit their continued usage, resulting in a high cost. In addition, traditional battery technologies with a short lifespan frequently limit operation, resulting in a substantial challenge to their growth. Subsequently, utilizing human biomechanical energy is extensively preferred motion for biologically integrated, self-powered, functioning devices. Ideally suited for this purpose are piezoelectric energy harvesters. To convert mechanical energy into electrical energy, devices must be mechanically flexible and stretchable to implant or attach to the highly deformable tissues of the body. A systematic analysis of piezoelectric nanogenerators (PENGs) for personalized healthcare is provided in this article. This article briefly overviews PENGs as self-powered sensor devices for energy harvesting, sensing, physiological motion, and healthcare.

• 한국전기전자재료학회논문지
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• 제15권12호
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• pp.1060-1064
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• 2002

We have studied the effect of crystallization temperature, composition and film thickness, which are the fundamental processing parameters of lead zirconate titanate(PZT) thin film fabrication, in the respect of the piezoelectric properties by our pneumatic loading method(PLM). A great deal of research has been done in the field of characterization for piezoelectric thin films after the first report on the measurement for the piezoelectric coefficient of thin films in 1990. Even though the piezoelectric properties of thin films are very critical factors in the micro-electro mechanical system(MEMS) and thin film sensor devices, a few reports for the piezoelectric characterization are provided for the last decade unlikely the bulk piezoelectric devices. We have found that the piezoelectric properties of thin films are improved as the increase of crystallization temperature up to 750$\^{C}$ and this behavior can be also explained by the analysis of dielectric polarization hysteresis loop, X-ray diffraction and scanning electron microscopy. The effect of Zr/Ti composition has been also studied. This gives us the fact that the maximum piezoelectricity is found near Morphotropic Phase Boundary(MPB) as bulk PZT system does.

• 한국전기전자재료학회논문지
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• 제34권6호
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• pp.487-494
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• 2021

Piezoelectric generators use direct piezoelectric effects that convert mechanical energy into electrical energy. Many studies were attempted to fabricate piezoelectric generators using piezoelectrics such as ZnO, PZT, PVDF. However, these various inorganic/organic piezoelectric materials are not suitable for bio-implantable devices due to problems such as brittleness, toxicity, bio-incompatibility, bio-degradation. Thus, in this paper, piezoelectric generators were prepared using a silk fibroin film which is bio-compatible by dip-coating method. The silk fibroin films are a mixed state of silk I and silk II having stable β-sheet type structures and shows the d₃₃ value of 8~10 pC/N. There was a difference in output voltages according to the thickness. The silk fibroin generators, coated 10 times and 20 times, revealed the power density of 16.07 μW/cm² and 35.31 μW/cm² using pushing tester, respectively. The silk fibroin generators are sensitive to various pressure levels, which may arise from body motions such as finger tapping, foot pressing, wrist shaking, etc. The silk fibroin piezoelectric generators with bio-compatibility shows the applicability as a low-power implantable piezoelectric generator, healthcare monitoring service, and biotherapy devices.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.37-38
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• 2007

This paper reports the characteristics of piezoelectric microspeakers that are audible in open air with high quality piezoelectric AlN thin film according to the materials properties. When we use a tensile-stressed silicon nitride diaphragm as a supporting layer, the Sound Pressure Level (SPL) is relatively small. However, the SPL of the fabricated microspeakers that have compressive-stressed composite diaphragm show higher output pressure than those of tensile-stressed diaphragm. It produces more than 60dB from 100Hz to 15kHz and the highest SPL is about 100dB at 9.3kHz with 20 Vpeak-to-peak sinusoidal input biases and at 10 mm distances from the fabricated microspeakers to the reference microphone.

• 동력기계공학회지
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• 제18권1호
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• pp.14-21
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• 2014

Piezoelectric fans are thin elastic beams whose vibratory motion is actuated by means of a piezoelectric material bonded to the beam. These fans have found use as a means to enhance convective heat transfer while requiring only small amounts of power. This study presents new types of models with heat sink having air passage and investigates experimentally their heat transfer characteristics. From the comparison results for four models, the heat transfer coefficients of model 1 are approximately 44~66% higher than those of the reference model 0. The model 1 show the best overall performance about heat transfer and cooling capability. As shown in above results, it is necessary to design the heat sink with air pass for cooling of electronic devices, in order to increase the convective heat transfer coefficient of a piezoelectric fan for electronic cooling.

• 소성∙가공
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• 제11권7호
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• pp.569-574
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• 2002

Recently, thick PZT films are required for the cases of micro piezoelectric devices with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Microstructures, and electrical properties of films were investigated by XRD, FESEM, impedance analyzer, and P-E hysteresis. PZT films with 2.7$mu extrm{m}$ to 4.4${\mu}{\textrm}{m}$ thickness were fabricated. Dielectric constant, loss, remnant polarization and coercive field of them were 880~1650 at 1kHz, 2~3% at 1kHz, 26~32 $\mu$C/$ extrm{cm}^2$, and 33~60kV/cm, respectively. Also a transverse piezoelectric coefficient $(e_{31,f})$ measurement system was fabricated and tested for thick film samples.

• 한국재료학회지
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• 제15권12호
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• pp.756-759
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• 2005

A lead free piezoelectric material, bismuth sodium barium titanate $(Bi_{0.5}Na_{0.5})_{0.94}Ba_{0.06}TiO_3$ (BNBT), was considered as an environment-friendly alternatives for the current PZT system. A perovskite BNBT was synthesized by conventional bulk ceramic processing technique. In order to improve piezoelectric properties, $La_2O_3$ as a dopant was incorporated into the BNBT system up to 0.025 moi, ana the effects on subsequent the piezoelectric ana dielectric properties were systematically investigated. With increasing $La_2O_3$ contents, the equilibrium grain shape was remarkably evidenced and sintered density was increased. Piezoelectric and dielectric properties were s]town to have maximum values at the $La_2O_3$ contents of 0.02 mol. $La^{3+}$ ions seemed to act as a softener in the BNBT system and to enhance dielectric and piezoelectric properties in this study.

• Journal of Periodontal and Implant Science
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• 제42권6호
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• pp.243-247
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• 2012

Purpose: The effects of magnetostrictive and piezoelectric devices on tooth surfaces seem to differ with regard to the root surface roughness they produce. This study aimed to compare the results of scaling using magnetostrictive and piezoelectric devices on extracted teeth. Methods: Forty-four human extracted teeth were assigned to four study groups (n=11). In two groups (C100 and C200), the teeth were scaled using a magnetostrictive device and two different lateral forces: 100 g and 200 g, respectively. In the other two groups (P100 and P200), the teeth were scaled with a piezoelectric device with 100 g and 200 g of lateral force, respectively. The teeth were scaled and the data on the duration of scaling and the amount of surface were collected and analyzed using the t-test. Results: The mean time needed for instrumentation for the piezoelectric and magnetostrictive devices was 50:54 and 41:10, respectively, but their difference was not statistically significant (P=0.171). For root surface roughness, we only found a statistically significantly poorer result for the C200 group in comparison to the P200 group (P=0.033). Conclusions: This study revealed that applying a piezoelectric scaler with 200 g of lateral force leaves smoother surfaces than a magnetostrictive device with the same lateral force.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.261-261
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• 2007

Wearable and ubiquitous micro systems will be greatly growing and their related devices should be self-powered in order to avoid the replacement of finite power sources, for example, by scavenging energy from the environment. With ever reducing power requirements of both analog and digital circuits, power scavenging approaches are becoming increasingly realistic. One approach is to drive an electromechanical converter from ambient motion or vibration. Vibration-driven generators based on electromagnetic, electrostatic and piezoelectric technologies have been demonstrated. Among various generator types proposed so far, piezoelectric generator possesses considerable potential in micro system. To overcome low mechanical-to- electric energy conversion, the piezoelectric device should activate in resonance mode in response to external vibration. Normally, the external vibration excretes at low frequency ranging 0.1 to 200 Hz, whereas the resonant frequencies of the devices are fixed as constant. Therefore, keeping their resonant mode in varying external vibration can be one of important points in enhancing the conversion efficiency. We investigated the possibility of use of multi-bender type piezoelectric devices. To match the external vibration frequency with the device resonant frequency, the various devices with different resonant frequency were chosen. Under an external vibration acceleration of 0.1G at 120 Hz, the device exhibited a peak-to-peak voltage of 2.8 V and a power of 0.5 mw in resonance mode.