• Proceedings of the KIEE Conference
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• 2003.07d
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• pp.2073-2075
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• 2003

This paper presents the active vibration control of flexible cantilever beam using piezoceramic actuators. The transfer function from the force input to the bending displacement was obtained via modal analysis results and piezoelectric constitutive equations. For the active vibration control piezoceramic actuators and sensors were used to construct a flexible smart cantilever beam. To further enhance the sensing and actuation properties of the piezoceramics, a typical interdigitated electrode pattern was fabricated. The PID controller was designed via various simulation and experiment trials. It was shown that the PID controller could suppress vibration of the beam effectively. Simulations and experiments verified good performances of the designed controller.

• Journal of Sensor Science and Technology
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• v.14 no.5
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• pp.302-307
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• 2005

Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown and verified the sinusoidal approximation algorithm that estimates past and coming fringe values. Real-time signal processing program was developed and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below $0.36{\sim}8.6$ nm in the displacement range of $0{\sim}300{\mu}m$ was obtained. The nano-positioner with a piezoelectric actuator and the EFPI sensor system was designed and tested. The positioner successfully reached to the desired destination within 1 nm accuracy.

• Journal of Sensor Science and Technology
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• v.17 no.6
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.350-351
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• 2006

Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, capacitive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. Some elastic materials exhibit a change in bulk resistivity when they are subjected to displacement by an applied pressure. This property is referred to as piezoresistivity and is a major factor influencing the sensitivity of a piezoresistive strain gage. The effect of thick film resistors was first noticed in the early 1970, as described by Holmes in his paper in 1973.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.10a
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• pp.699-705
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• 2013

This paper presents vibration testing, control, and finite element analysis of a piping system, which is subjected to the changes in fluid levels. Nuclear power plants typically employ a cooling system that uses sea water. These systems are subjected to dynamic characteristic changes caused by sea-level variations, which introduces failures of cooling system components. Therefore in this study, analytical and experimental studies were performed to understand the effect of sea-level changes on the dynamic characteristics of piping systems. It was shown that, as the sea-level increases, pipe's natural frequencies decreases in relation to its mode shape. A 1/14 scale model was also built to compare the results obtained by the analytical study. A good agreement between experiment and analytical studies were observed. Finally, an on-line resonant frequency identification system was proposed and developed, which utilizes piezoelectric transducers as sensors and actuators, in order to avoid catastrophic failure of piping systems.

• Advances in robotics research
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• v.1 no.1
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• pp.1-19
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• 2014

Microgripper is an essential device in the micro-operation system. It can convert other types of energy into mechanical energy and produce clamp movement with required chucking force, which enables it a broad application prospect in the domain of tiny components' processing and assembly, biomedicine and optics, etc. The performance of a microgripper is dependent on its power supply, type of drive, mechanism structure, sensing components, and controller. This paper presents a state-of-the-art survey of recent development on flexure-based microgrippers. According to the drive type, the existing microgrippers can be mainly classified as electrostatic microgripper, electrothermal microgripper, electromagnetic microgripper, piezoelectric microgripper, and shape memory alloy microgripper. Additionally, some different mechanisms, sensors, and control methods that are used in microgripper system are reviewed. The key issue of how to choose those components in microgripper system design is also addressed.

• International Journal of Precision Engineering and Manufacturing-Green Technology
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• v.5 no.5
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• pp.571-581
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• 2018

In the present study, monitoring of elliptical vibration cutting process by utilizing internal data in the ultrasonic elliptical vibration device without external sensors such as a dynamometer and displacement sensor is investigated. The internal data utilized here is the change of excitation frequency, i.e. resonant frequency of the device, voltages applied to the piezoelectric actuators composing the device, and electric currents flowing through the actuators. These internal data change automatically in the elliptical vibration control system in order to keep a constant elliptical vibration against the change of the cutting process. Correlativity between the process and the internal data is described by using a vibration model of ultrasonic elliptical vibration cutting and verified by several experiments, i.e. planing and mirror surface finishing of hardened die steel carried out with single crystalline diamond tools. As a result, it is proved that it is possible to estimate the elements of elliptical vibration cutting process, e.g. tool wear and machining load, which are important for stable cutting in such precision machining.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.9
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• pp.94-103
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• 1996

This paper is concerned with the theroretical and experimental study on the force control of a miniature robotic finger that grasps an object at three other positions with the fingertip. The artificial finger is uniform flexible cantilever beam equipped with a distributed set of compact grasping force secnsors. Control action is applied by a qiexoceramic bimorph strip placed at the base of the finger. The mathematical model of the assembled electro-mechanical system is developed. The distributed sensors are described by a set of concentrated mass-spring system. The formulated equations of motion are then applied to a control problem which the finger is commanded to grasp an object The PID-controller is introduced to drive the finger. The usefulness of the proposed control technique is verified by simulation and experiment.

• The Journal of the Acoustical Society of Korea
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• v.32 no.1
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• pp.32-42
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• 2013

Typical underwater piezoelectric spherical sensors are omni-directional, thus can measure the scalar quantity sound-pressure-magnitude only with the limitation not being able to measure the direction of the incoming wave. This paper proposes a method to simultaneously measure both the magnitude and direction of the sound wave with the spherical sensor. The method divides the piezoceramic sphere of the sensor into eight elements, and distinguishes the magnitude and direction of the sound pressure by combining the output voltage of the elements in a particular manner. Further, through the analysis of the sensitivity variation in relation to the structural parameters like radius and thickness of the piezoceramic sphere, we have suggested the way to improve the sensitivity of the vector sensor.

• Journal of Sensor Science and Technology
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• v.23 no.6
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• pp.420-424
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• 2014

Aluminum-scandium nitride ($Al_{1-x}Sc_xN$) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 50% $N_2$/Ar. The effect of Sc-doping on the structure and piezoelectric properties of AlN films has been investigated using SEM, XRD, surface profiler and pressure-voltage measurements. The as-deposited AlN films showed polycrystalline phase, and the Sc-doped AlN film, the peak of AlN (002) plane and the crystallinity became very strong. With Sc-doping, the crystal size of AlN film was grown from ~20 nm to ~100 nm. The output signal voltage of AlN sensor showed a linear behavior between 15~65 mV, and output signal voltage of Sc-doped AlN sensor was increased over 7 times. The pressure-sensing sensitivity of AlN film was calculated about 10.6mV/MPa, and $Al_{0.88}Sc_{0.12}N$ film was calculated about 76 mV/MPa.