• Smart Structures and Systems
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• 제6권8호
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• pp.975-989
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• 2010

Based on the theory of piezo-elasticity, the paper obtains the exact solutions of functionally graded piezoelectric hollow cylinders with different piezoelectric parameter $g_{31}$. Two kinds of piezoelectric hollow cylinders are considered herein. One is a multi-layered cylinder with different parameter $g_{31}$ in different layers; the other is a continuously graded cylinder with arbitrarily variable $g_{31}$. By using the Airy stress function method with plane strain assumptions, the exact solutions of the mechanic and electrical components of both cylinders are obtained when they are subjected to external voltage (actuator) and pressure (sensor), simultaneously. Furthermore, good agreement is achieved between the theoretical and numerical results, and useful conclusions are given.

• 센서학회지
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• 제23권6호
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• pp.420-424
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• 2014

Aluminum-scandium nitride ($Al_{1-x}Sc_xN$) thin films with a TiN buffer layer have been fabricated on SUS430 substrate by RF reactive magnetron sputtering at room temperature under 50% $N_2$/Ar. The effect of Sc-doping on the structure and piezoelectric properties of AlN films has been investigated using SEM, XRD, surface profiler and pressure-voltage measurements. The as-deposited AlN films showed polycrystalline phase, and the Sc-doped AlN film, the peak of AlN (002) plane and the crystallinity became very strong. With Sc-doping, the crystal size of AlN film was grown from ~20 nm to ~100 nm. The output signal voltage of AlN sensor showed a linear behavior between 15~65 mV, and output signal voltage of Sc-doped AlN sensor was increased over 7 times. The pressure-sensing sensitivity of AlN film was calculated about 10.6mV/MPa, and $Al_{0.88}Sc_{0.12}N$ film was calculated about 76 mV/MPa.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.1808-1813
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• 2005

In this paper, we present the finger tip tactile sensor which can detect contact normal force as well as slip. The developed sensor is made of two different materials, such as polyvinylidene fluoride(PVDF) that is known as piezoelectric polymer and pressure variable resistor ink. In order to detect slip to surface of object, a PVDF strip is arranged along the normal direction in the robot finger tip and the thumb tip. The surface electrode of the PVDF strip is fabricated using silk-screening technique with silver paste. Also a thin flexible force sensor is fabricated in the form of a matrix using pressure variable resistor ink in order to sense the static force. The developed tactile sensor is physically flexible and it can be deformed three-dimensionally to any shape so that it can be placed on anywhere on the curved surface. In addition, we developed a tactile sensing system by miniaturizing the charge amplifier, in order to amplify the small signal from the sensor, and the fast signal processing unit. The sensor system is evaluated experimentally and its effectiveness is validated.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.118-118
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• 2009

Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of $Pb(ZrTi)O_3$ (PZT) thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The results showed that the fabrication method is very suitable for pressure sensor applications. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• 대한인간공학회지
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• 제11권2호
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• pp.23-33
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• 1992

The distribution of the pressure between the sole of a feet and a supporting surface can reveal the information about the structure and fonction of the foot and the posural control of the whole body. In particular, the measurement of the vertical contact forces between the plantar surface of the foot and the shoe insole is of great importance to reveal the loading distributio patterns incurred from a particular shoe midsole design. In order to investigate the plantar surface pressure distribution, an insole-type sensor with a piezoelectric material is developed and tested. The present paper describes a new method to completely reduce both the shear force and pyroelectric effects that are normally caused from piezoelectric materials.

• 한국음향학회지
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• 제31권8호
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• pp.569-579
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• 2012

압전 세라믹을 이용한 전형적인 Tonpilz형 수중 음향센서는 외부에서 들어오는 음향 신호를 이에 상응하는 전압으로 변환해 스칼라 양인 음압의 크기만 측정할 뿐 외부에서 들어오는 신호의 방향은 파악할 수 없는 한계가 있다. 이와 같은 문제점을 해결하고자 본 논문에서는 Tonpilz형 트랜스듀서를 이용해 단일 센서만으로도 음압의 크기와 방위각 방향을 동시에 분석해 낼 수 있는 새로운 벡터 센서 구조를 제안하고, 제안된 구조의 타당성을 수식 및 유한요소해석을 통해 검증하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1529-1531
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• 2003

Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, piezocapastive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. The screen printing technique has been used to fabricate the pressure sensors on alumina substrate($Al_2O_3$). Thick film capacitive of strain sensing characteristics are reported and dielectric paste based on (Ti+Ba) materials. The electric property of dielectric paste has been studied and exhibit good properly with good gage factor comparable to piezoresistive strain gage. New piezocapacitive strain sensor was designed and tested. The output of capacitive value was good characteristics.

• 한국음향학회지
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• 제32권1호
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• pp.32-42
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• 2013

일반적인 수중 탐지용 압전 구형 센서는 무지향성이어서 스칼라 양인 수신 음압의 크기만 측정할 뿐 전파 방향은 측정 할 수 없는 한계를 가지고 있다. 본 논문에서는 이러한 구형 센서를 이용해 음파의 크기와 방향을 동시에 찾을 수 있는 방법을 제안한다. 제안한 방법은 구형 센서의 압전 세라믹을 8등분하여 배열한 다음, 각 압전 세라믹 출력전압을 특정한 방법으로 조합하여 음압의 크기와 방향을 파악할 수 있도록 하였다. 또한 압전세라믹 구의 반경과 두께와 같은 구조 변수들의 변화에 따른 감도 변화를 분석하여, 벡터 센서의 감도를 향상 시킬 수 있는 방안을 제시하였다.

• 한국군사과학기술학회지
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• 제10권3호
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• pp.208-216
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• 2007

As the propellant mass is being accelerated out of the gun chamber along with the projectile, a continuous pressure gradient exists between the end of chamber and the base of the projectile. For this reason, the base pressure-travel curve is very important to design a conventional gun barrel in the interior ballistics, but it is not obtained briefly by empirical or theoretical method. In this paper, a simple relation between chamber pressure and base pressure was determined by the factor of base pressure(Cb) obtained from the experimental method. The simple relation gives a reasonable prediction for the reduction of pressure between the breech and the base of projectile owing to the axial gradient in the gun tube. The predictions have been validated by the infrared screen sensor and the PRODAS(PROjectile Design and Analysis System) for interior ballistic systems. Therefore, the base pressure-travel curve could be calculated from the chamber pressure measured by piezoelectric sensor. The base pressure-travel curve obtained from the simple relation offers initial information to gun barrel designer and is used for calculation of muzzle velocity.

• 전기학회논문지
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• 제56권8호
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• pp.1430-1435
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• 2007

We developed a 440MHz surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ID tag. Two piezoelectric substrates were bonded, in which ${\sim}150\;{\mu}m$ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high S/N ratio, small signal attenuation, and small spurious peaks were observed. All the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10mW RF power from the network analyzer, a ${\sim}1$ meter readout distance was observed. Eight sharp ON reflection peaks were observed for ID tag. Temperature sensor was characterized from $20^{\circ}C$ to $200^{\circ}C$. A large phase shift per unit temperature change was observed. The evaluated sensitivity was ${\sim}10^{\circ}/^{\circ}C$.