The Transactions of The Korean Institute of Electrical Engineers (전기학회논문지)

The Korean Institute of Electrical Engineers (대한전기학회)
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Development of Batteryless SAW-based Integrated Microsensor and Wireless Measurement Technique

무전지 SAW 기반 마이크로 통합센서 및 무선 측정기술 개발

  • 오해관 (아주대학교 대학원 전자공학과) ;
  • 김태현 (아주대학교 전자공학과) ;
  • 왕웬 (아주대학교 전자공학과) ;
  • 양상식 (아주대학교 전자공학과) ;
  • 이기근 (아주대학교 전자공학과)
  • Published : 2007.08.01
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Abstract

We developed a 440MHz surface acoustic wave (SAW) microsensor integrated with pressure-temperature sensors and ID tag. Two piezoelectric substrates were bonded, in which ${\sim}150\;{\mu}m$ cavity was structured. Four sides were completely sealed by JSR photoresist (PR). Pressure sensor was placed on the top substrate, whereas ill tag and temperature sensor were placed on the bottom substrate. Using network analyzer, the developed microsensor was wirelessly tested. Sharp reflection peaks with high S/N ratio, small signal attenuation, and small spurious peaks were observed. All the reflection peaks were well matched with the coupling of mode (COM) simulation results. With a 10mW RF power from the network analyzer, a ${\sim}1$ meter readout distance was observed. Eight sharp ON reflection peaks were observed for ID tag. Temperature sensor was characterized from $20^{\circ}C$ to $200^{\circ}C$. A large phase shift per unit temperature change was observed. The evaluated sensitivity was ${\sim}10^{\circ}/^{\circ}C$.

Keywords

References

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