• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.489.2-489.2
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• 2014

The planar type flexible piezoelectric energy harvesters (PEH) based on PbZr0.52Ti0.48O3 (PZT) thin films on the flexible substrates are demonstrated to convert mechanical energy to electrical energy. The planar type energy harvesters have been realized, which have an electrode pair on the PZT thin films. The PZT thin films were deposited on double side polished sapphire substrates using conventional RF-magnetron sputtering. The PZT thin films on the sapphire substrates were transferred by PDMS stamp with laser lift-off (LLO) process. KrF excimer laser (wavelength: 248nm) were used for the LLO process. The PDMS stamp was attached to the top of the PZT thin films and the excimer laser induced onto back side of the sapphire substrate to detach the thin films. The detached thin films on the PDMS stamp transferred to adhesive layer coated on the flexible polyimide substrate. Structural properties of the PZT thin films were characterized using X-ray diffraction (XRD) and scanning electron microscopy (SEM). To measure piezoelectric power generation characteristics, Au/Cr inter digital electrode (IDE) was formed on the PZT thin films using the e-beam evaporation. The ferroelectric and piezoelectric properties were measured by a ferroelectric test system (Precision Premier-II) and piezoelectric force microscopy (PFM), respectively. The output signals of the flexible PEHs were evaluated by electrometer (6517A, Keithley). In the result, the transferred PZT thin films showed the ferroelectric and piezoelectric characteristics without electrical degradation and the fabricated flexible PEHs generated an AC-type output power electrical energy during periodically bending and releasing motion. We expect that the flexible PEHs based on laser transferred PZT thin film is able to be applied on self-powered electronic devices in wireless sensor networks technologies. Also, it has a lot of potential for high performance flexible piezoelectric energy harvester.

• 한국전기전자재료학회논문지
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• 제31권4호
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• pp.216-220
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• 2018

The piezoelectric properties of $0.65Pb(Zr_{1-x}Ti_x)O_3-0.35Pb(Zn_{1/6}Ni_{1/6}Nb_{2/3})O_3$ ($PZT_x-PZNN$) ceramics with $0.530{\leq}x{\leq}0.555$ were investigated for application to piezoelectric energy harvesters. Although a morphotropic phase boundary (MPB) was found at approximately x = 0.545, the ceramic with the highest figure of merit (FOM) ($d_{33}{\times}g_{33}$) was observed at a composition of x = 0.540. Values of this figure of merit, $d_{33}{\times}g_{33}$, of $19.6pm^2/N$ and $20.2pm^2/N$ were obtained from $PZT_{0.540}-PZNN$ ceramics sintered at $920^{\circ}C$ and $950^{\circ}C$, respectively. A high output power of $937{\mu}W$ and a high power density of $3.3mW/cm^3$ were obtained from unimorph-type piezoelectric energy harvesters fabricated using $PZT_{0.540}-PZNN$ ceramic sintered at $920^{\circ}C$ for 4h.

• 센서학회지
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• 제33권1호
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• pp.34-39
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• 2024

Energy harvesting technology that converts the wasted energy resources into electrical energy is emerging as a semipermanent power source for self-powered electronics and wireless low-power sensor systems. Among the various energy conversion techniques, flexible piezoelectric energy harvesters (f-PEHs), using materials with piezoelectric effects, have attracted significant interest because they can harvest a small mechanical energy into electrical signals without constraints of time and space in various environments. In this study, we used a flexible piezoelectric composite film fabricated by dispersing BaHf_xTi_(1-x)O₃ (x = 0, 0.01, 0.05, 0.1) piezoelectric powders inside a polymeric matrix to facilitate f-PEHs. The fabricated f-PEH with optimal Hf contents (x = 0.05) generated a maximum output voltage of 0.95 V and current signal of 130 nA with stable electrical/mechanical disabilities under periodically bending deformations. In addition, we demonstrated a cantilever-type f-PEH and investigated its potential as a sensor by characterizing the output performance under mechanical vibrations at various frequencies. This study provides the breakthrough for realizing self-powered energy harvesting and sensing systems by adopting the lead-free piezoelectric composites under vibrational environments.

• The Korean Journal of Ceramics
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• 제1권1호
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• pp.13-20
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• 1995

Effects of thermal annealing on the dielectric/piezoelectric properties of $Pb(Zn, Mg)_{1/3}Nb_{2/3}O_3-PbTiO_3$ ceramics (PZMNPT) with Zn/Mg=6/4) were examined across the rhombohedral/tetragonal morphotropic phase boundary (MPB). Both the relative dielectric permittivity ($\varepsilon$r)and the piezoelectric constant($d_33$)/electromechanical coupling constant ($k_p$)were increased by thermal annealing ($800^{\circ}$~$900^{\circ}C$) after sintering at $1150^{\circ}C$ for 1 hr. Based on the dielectric analysis using the series mixing model and the concept of a random distribution of the local Curie points, the observed improvements in the dielectric and piezoelectric properties of PZMN-PT were interpreted in terms of the elimination of PbO-rich amorphous intergranular layers(~1nm) induced by thermal annealing. A concrete evidence of the presence of amorphous grain-boundary layers in the unannealed (as-sintered) specimen was obtained by examining the structure of intergranular region using a TEM.

• 한국전기전자재료학회논문지
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• 제25권6호
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• pp.435-438
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• 2012

As lead-free piezoelectric materials, $Ag_2O$ doped $0.95(K_{0.5}Na_{0.5})NbO_3-0.05LiNbO_3+x$ mol% (where x = 0, 0.5, 1, 1.5, 2, 2.5 and 3, respectively) ceramics were fabricated by a conventional sintering process. The doping effects on the microstructure and electrical properties of the $0.95(K_{0.5}Na_{0.5})NbO_3-0.05LiNbO_3$ ceramics were systematically investigated. When the 3 mol % $Ag_2O$ doped $0.95(K_{0.5}Na_{0.5})NbO_3-0.05LiNbO_3$ samples were sintered at $1,080^{\circ}C$ for 5 hrs in air, these ceramics showed excellent values of density=4.20 $g/cm^3$, piezoelectric constant ($d_{33}$)=174 pC/N and phase transition temperature$(T_c)=421.6^{\circ}C$, respectively.

• 한국전기전자재료학회논문지
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• 제25권4호
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• pp.286-289
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• 2012

In this paper, we have proposed piezoelectric energy harvester employing the pillar structure with the diameter size of 500 um. So we have selected the Su-8 photo-resist and modified lithography process to manufacture the pillar structure with height above the $500{\mu}m$. Simultaneously, we tried to make a comparative study to use ceramic bulk - polymer structure In this paper, we will report the process and properties of micro pillar structure based on the PMN-PZT ($Pb(Mg_{1/3}Nb_{2/3})O_3-PbZrTiO_3$) materials. Finally, We will propose a method for generating electrical energy with a piezoelectric element using vibration, an energy source can be obtained from the "clean" energy.

• 한국전기전자재료학회논문지
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• 제27권1호
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• pp.18-21
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• 2014

Because the Pb-based piezoelectric materials showed problems such as an environmental pollution. lead-free $O_3$ materials were studied in the present study. The $O_3$ thin films were deposited at $640^{\circ}C$ on $Pt/Ti/SiO_2$ substrate by pulsed laser deposition (PLD) and were annealed for 5 min at $750^{\circ}C$ using rapid thermal annealing (RTA) in nitrogen atmosphere. Samples annealed at $750^{\circ}C$ showed a smooth morphology and an improvement of the dielectric and leakage properties, as compared with as-grown samples. However, electrical properties of the $O_3$ thin films obtained in the present study should be improved for piezoelectric applications.

• Composites Research
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• 제27권4호
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• pp.141-145
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• 2014

본 논문은 충격 센서로써 압전 페인트 센서를 사용해 구조물 건전성 모니터링을 수행하였다. 본 연구에 적용된 압전 페인트는 페인트 형태의 압전 재료로 물체에 얇게 코팅할 수 있고, 추가적인 외부 전원 필요 없이 충격 센서로 사용할 수 있다는 장점을 지닌다. 본 논문에서는 복합재 시편에 압전 페인트 센서를 네 부분으로 구분하여 도포한 후 충격 실험을 수행하였다. 압전 페인트 센서의 감도는 충격 힘에 따른 출력 전압을 측정하여 구하였고, 감도 측정과 더불어, 시편에 충격이 가해진 경우 압전 페인트 센서의 출력 신호를 비교하여 충격 위치도 추정하였다.

• Composites Research
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• 제29권6호
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• pp.379-387
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• 2016

본 논문에서 전자기장과 열 하중을 받는 복합재료 평판에 대하여 압전재료를 이용한 압전제어를 수행하였다. 구조물에 가해지는 전자기장과 열 하중, 그리고 구성방정식에서 고려되는 압전효과가 모두 포함된 지배방정식을 FSDT 판 이론에 기초하여 Hamilton 원리에 의하여 유도하였다. 평판의 경계면에서 발생하는 제어력과 제어 모멘트는 비례제어 및 속도제어 로직에 의하여 적용되었다. 전자기장과 열 하중, 그리고 압전효과가 복합재료 평판의 동특성에 미치는 영향에 대하여 고찰하고, 압전효과 및 복합재료의 섬유각 변화를 통하여 복합재 구조물의 동특성을 효과적으로 제어 가능함을 확인하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.827-830
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• 2006

With recent advanced in portable electric devices, wireless sensor, MEMS and bio-Mechanics device, the new typed power supply, not conventional battery but self-powered energy source is needed. Particularly, the system that harvests from their environments are interests for use in self powered devices. For very low powered devices, environmental energy may be enough to use power source. In the generality of cases, these energy harvesting systems are used in the piezoelectric materials as mechanisms to convert mechanical vibration energy into electric energy. Through the piezoelectric materials, the ambient vibration energy could be used to prolong the power supply or in the ideal case provide endless energy f9r the devices. Therefore, the piezoelectric power harvesting cantilever beam is developed. Also, the output voltage and power are predicted in this study. We also discuss the developing system of the piezoelectric energy scavenger. An experimental verification of the model is also performed to ensure its accuracy.