• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.23 no.4
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• pp.361-367
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• 2014

Ultra-precision positioning plays a crucial role in emerging technologies such as electronics, bioengineering, optics, and various nanofabrication technologies. As a result, various nanopositioning methods have been presented. In particular, nanopositioning using a flexure mechanism and piezo-electric actuator is one of the most valuable methods because of its friction-free motion and subnanometer-scale motion resolution. In this study, a rotational nanoactuator based on a right-circular flexure mechanism and piezo-electric actuator was developed through a consideration of the kinematics and structural deformation. An experimental setup was constructed to verify the performance expectation. Consequently, it was demonstrated that the developed system had a maximum rotational angle of about 0.01 rad, as well as sufficient linearity with respect to the input voltage.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.57-58
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Smart Structures and Systems
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• v.25 no.1
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• pp.37-45
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• 2020

This paper aims at enlightening the properties, computational and implementation issues related to Kalman filter based state estimation algorithms and sliding mode observers, by applying them for estimating the states of a smart structure system. The Kalman based estimators considered in this work are Kalman filter and information filter and, the sliding mode observers considered are Utkin observer and higher order sliding mode observer. A fourth order linear time invariant model of a piezo actuated beam is used in this work. This structure is embedded with four number of piezo patches, of which two act as sensors, one as disturbance actuator and the other as control actuator. The performance of the state estimation algorithms is evaluated through simulation, for the first two vibrating modes of the piezo actuated structure, when the structure is maintained at first mode and second mode resonance.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.33 no.4
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• pp.276-280
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• 2020

A linear piezoelectric actuator that utilizes the elliptical motion of the two tips of the actuator is proposed. This device is easy to fabricate owing to its simple structure, consisting of three piezo ceramic benders and is suitable for use in micro robotic applications. A π-shaped structure, which was composed of four piezo ceramic benders, was constructed. Two of the benders were positioned on the center of the actuator, and the joints were attached at the ends of the cantilever. The other two benders were positioned on the side of the actuator and were attached between the joint and the tips. The actuator structure was designed to obtain the first bending mode of the horizontal vibration and the vertical vibration at the same frequency, resulting in elliptical motions at the tips. When two sinusoidal wave voltages with a 90-degree phase difference were applied to the two pairs of the actuator benders, elliptical motions were obtained at the tips. The driving characteristics of the prototype actuator were then measured using a laser doppler vibrometer.

• International Journal of Aeronautical and Space Sciences
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• v.16 no.4
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• pp.520-528
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• 2015

The piezoelectric-hydraulic actuator is a hybrid device that consists of a hydraulic pump driven by a piezo-stack coupled to a conventional hydraulic cylinder. The actuator is of compact size, but can produce a moderate energy output. Such hybrid actuators are currently being researched and developed in many industrialized countries due to the requirement for high performance and compact flight systems. In a previous study, we designed and manufactured a unidirectional hybrid actuator. However, the blocking force was not as high as expected. Therefore, in this study, we redesigned the pump chamber and hydraulic cylinder and also improved the system by removing the air bubbles. Two different types of piezo-stacks were used. In order to achieve bidirectional capabilities in the actuator, commercial solenoid valves were used to control the direction of the output cylinder. Experimental testing of the actuator in unidirectional and bidirectional modes was performed to examine performance issues related to driving frequency, bias pressure, reed valve thickness, etc. The results showed that the maximum blocking force was measured as 970.2N when the frequency was 185Hz.

• Journal of Mechanical Science and Technology
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• v.19 no.5
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• pp.1194-1205
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• 2005

The common-rail injection systems, as a new diesel injection system for passenger car, have more degrees of freedom in controlling both the injection timing and injection rate with the high pressure. In this study, a piezo-driven injector was applied to a high pressure common-rail type fuel injection system for the control capability of the high pressure injector's needle and firstly examined the piezo-electric characteristics of a piezo-driven injector. Also in order to analyze the effect of injector's needle response driven by different driving method on the injection, we investigated the diesel spray characteristics in a constant volume chamber pressurized by nitrogen gas for two injectors, a solenoid-driven injector and a piezo-driven injector, both equipped with the same injection nozzle with sac type and 5-injection hole. The experimental method for spray visualization was based on back-light photography technique by utilizing a high speed framing camera. The macroscopic spray propagation was geometrically measured and characterized in term of the spray tip penetration, spray cone angle and spray tip speed. For the evaluation of the needle response of the above two injectors, we indirectly estimated the needle's behavior with an accelerometer and injection rate measurement employing Bosch's method was conducted. The experimental results show that the spray tip penetrations of piezo­driven injector were longer, on the whole, than that of the solenoid-driven injector. Besides we found that the piezo-driven injector have a higher injection flow rate by a fast needle response and it was possible to control the injection rate slope in piezo-driven injector by altering the induced current.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.26 no.5
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• pp.546-551
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• 2016

The objective of this study is to investigate the response delays between piezo-stack actuator and the displacement magnifier of jetting dispenser and to reduce its falling time in terms of displacement optimization. The dispenser is driven by the dual piezo-stack actuators with a hinge lever mechanism to precisely control flow rate of the working fluid (3000 cP). It is commonly found that piezo actuator-driven jetting dispensers involving viscous working fluids have displacement optimization problem for ideal performance. The response delay of the system is caused by the phenomenon that the displacement magnifier cannot exactly follow the motion of the piezo actuators. The response delay may lower the performance of the system due to the inaccurate discharge of working fluid or even damages to the system itself due to inharmonious motion of piezo actuators with lever system. To reduce its response delay, a new displacement profile obtained from displacement optimization is suggested; its performance is tested through finite element analysis; and experiments are carried out to verify the performance of the obtained displacement profile.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.200.2-200.2
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• 2005