• Title/Summary/Keyword: Physical cleaning

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Particle Removal on Buffing Process After Copper CMP (구리 CMP 후 버핑 공정을 이용한 연마 입자 제거)

  • Shin, Woon-Ki;Park, Sun-Joon;Lee, Hyun-Seop;Jeong, Moon-Ki;Lee, Young-Kyun;Lee, Ho-Jun;Kim, Young-Min;Cho, Han-Chul;Joo, Suk-Bae;Jeong, Hae-Do
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.1
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    • pp.17-21
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    • 2011
  • Copper (Cu) had been attractive material due to its superior properties comparing to other metals such as aluminum or tungsten and considered as the best metal which can replace them as an interconnect metal in integrated circuits. CMP (Chemical Mechanical Polishing) technology enabled the production of excellent local and global planarization of microelectronic materials, which allow high resolution of photolithography process. Cu CMP is a complex removal process performed by chemical reaction and mechanical abrasion, which can make defects of its own such as a scratch, particle and dishing. The abrasive particles remain on the Cu surface, and become contaminations to make device yield and performance deteriorate. To remove the particle, buffing cleaning method used in post-CMP cleaning and buffing is the one of the most effective physical cleaning process. AE(Acoustic Emission) sensor was used to detect dynamic friction during the buffing process. When polishing is started, the sensor starts to be loaded and produces an electrical charge that is directly proportional to the applied force. Cleaning efficiency of Cu surface were measured by FE-SEM and AFM during the buffing process. The experimental result showed that particles removed with buffing process, it is possible to detect the particle removal efficiency through obtained signal by the AE sensor.

A Study on the Removal of Cu and Fe Impurities on Si Substrate (Si 기판에서 구리와 철 금속불순물의 제거에 대한 연구)

  • Choi, Baik-Il;Jeon, Hyeong-Tag
    • Korean Journal of Materials Research
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    • v.8 no.9
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    • pp.837-842
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    • 1998
  • As the size of the integrated circuit is scaled down the importance of Si cleaning has been emphasized. One of the major concerns is abut the removal of metallic impurities such as Cu and Fe on Si surface. In this study, we intentionally contaminated Cu and Fe on the Si wafers and cleaned the wafer by cleaning splits of the chemical mixture of $\textrm{H}_2\textrm{O}_2$ and HF and the combination of HF treatment with UV/$\textrm{O}_3$ treatment. The contamination level was monitored by TXRF. Surface microroughness of the Si wafers was measured by AFM. The Si wafer surface was examined by SEM. AES analysis was carried out to analyze the chemical composition of Cu impurities. The amount of Cu impurities after intentional contamination was abut the level of $\textrm{10}^{14}$ atoms/$\textrm{cm}^2$. The amount of Cu was decreased down to the level of $\textrm{10}^{10}$ atoms/$\textrm{cm}^2$ by cleaning splits. The repeated treatment exhibited better Cu removal efficiency. The surface roughness caused by contamination and removal of Cu was improved by repeated treatment of the cleaning splits. Cu were adsorbed on Si surface not in a thin film type but in a particle type and its diameter was abut 100-400${\AA}$ and its height was 30-100${\AA}$. Cu was contaminated on Si surface by chemical adsorption. In the case of Fe the contamination level was $\textrm{10}^{13}$ atoms/$\textrm{cm}^2$ and showed similar results of above Cu cleaning. Fe was contaminated on Si surface by physical adsorption and as a particle type.

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Experimental Study of Removing Epoxy Resin from Iron Object using Nd:YAG Laser Cleaning System (철제유물에 사용된 에폭시수지 제거를 위한 Nd:YAG 레이저 클리닝 실험 연구)

  • Lee, Hye-Youn;Cho, Nam-Chul;Lee, Jong-Myoung;Yu, Jae-Eun
    • Journal of Conservation Science
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    • v.27 no.3
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    • pp.301-312
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    • 2011
  • Epoxy resin has superior durability and adhesive strength and proper physical strength so that it is used to diversity materials for multi-purposes. However epoxy resin is hardly removed after hardening specially once it is applied to artefacts, it is difficult to remove them under re-conservation. This paper is an experimental study on removing epoxy resin applied to iron objects using Nd:YAG laser cleaning system. Tests conducted in this study investigated how increasing laser energy and pulses would give effect on samples. The samples were prepared in a way that epoxy resin, itself pure and one which was mixed with pigment and they were applied to iron coupons and corroded iron coupons respectively. As a result of experiment, pure epoxy resin applied to corroded iron coupons was ablated at high laser energy but epoxy resin applied to iron coupons and mixing with pigment were not ablated but discolored and bubbled due to laser-induced heat generation. Results of FT-IR showed no component alteration of shifted resins and no residues on the surfaces ablated by laser irradiation. From SEM-EDS for removed surfaces, the debris from epoxy resin and melting iron was observed. Therefore, this study demonstrated the possibilities and limitations for laser cleaning to remove epoxy resin from iron objects.

Present Deterioration Situation and Study on the Cleaning of the Surface of the Octagonal nine storied pagoda of Woljeongsa Temple (월정사팔각구층석탑의 손상현황과 표면오염물 제거연구)

  • Hwang, Jeong Eun;Kim, Sa Dug;Jung, Hee Soo
    • 보존과학연구
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    • s.33
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    • pp.125-148
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    • 2012
  • The Octagonal nine storied pagoda of Woljeongsa Temple consists mainly of granite with the rockforming minerals quartz, plagioclase, microcline, and biotite. The surface of the stone stupa is light brown that has been discolored by the rust from the metal ornament and aids. The surface of the stylobate and roof stone is colonized by biological contaminants. Therefore, a comprehensive deterioration diagnosis was carried out in this study, and conservation treatment was conducted. It was proven that the $Fe^{2+}$ yield increases depending on the count of poultice used with oxalic acid, but the $Mg^{2+}$, $Al^{3+}$, and $Ca^{2+}$ yields were marginal following the preliminary test. Therefore, the use of poultice is an effective way of removing the rust, and only marginally influences the rock. The biological contaminants were removed through dry cleaning, and the soil located under the contaminants was removed through wet cleaning. Based on this, the dry and wet cleaning of all the biological contaminants, and the use of poultice with oxalic acid, were done to remove the rust. For the conservation treatment of the metal ornament, the rust was removed through physical cleaning, and anticorrosion treatment was performed on the iron ornament using Renaissance wax and copper ornament by BTA.

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A Study on the Representation Experiment for a Proposed Conservation Technique - Focused on Removing Surface Stains of Myazedi Quadrilingual Stone of Myanmar - (보존처리 기술 방법론 제언을 위한 재현 실험 연구 - 미얀마 미야제디 석주 중심으로 -)

  • Kim, Jin Hyoung;Lee, Myeung Seung
    • Journal of Conservation Science
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    • v.34 no.6
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    • pp.525-538
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    • 2018
  • Myazedi Quadrilingual Stone Inscription of Myanmar, inscribed to the World Heritage List in 2015, is a rare historical artifact which has an exact date of inscription. It is a written record that displays the history, religion, and culture of Myanmar. Since the surface of the Stone Inscription has been rubbed with ink many times during the process of making printed copies for interpretation and academic research, it has developed a serious stain problem. Therefore, scientific analysis of the stain and research on the treatment for its removal have been conducted. In particular, an experiment was conducted on stain removal using laser cleaning and chemical treatment. The stains are mostly ink dirt, which accumulated from previous ink-rubbing processes. In order to conduct the experiment under similar conditions, a sample with similar stain has been reproduced, and a set of different conditions for treatment was applied to the sample to determine an effective solution. Laser cleaning was found to be effective in removing stains from most samples. However, chemical treatment showed different results. The physical friction method using ethanol provided the best result. In conclusion, laser cleaning is an effective universally-applicable technique but chemical treatment with laser cleaning can be considered an alternative method in certain situations.

Analysis of Buried-Fabrics from the Tomb of Kim HeumJo by Physical Chemical and Biological Methods (김흠조 분묘 출토직물의 보존처리를 위한 물리.화학.생물학적 분석)

  • 이미식;박명자;배순화;이연희
    • Journal of the Korean Society of Clothing and Textiles
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    • v.23 no.6
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    • pp.809-819
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    • 1999
  • The scientific analysis of buried fabrics from the 16th century tomb of Kim HeumJo was conducted focusing on the conservation of fabrics, In order to find out the appropriate cleaning solvent and detergent for historical textiles physical chemical and biological analysis was conducted. The following results are obtained from this study : 1, The buried fabrics from the tomb of Kim HeumJo were composed of cotton silk and ramie. Most of fabrics had lost their original colors faded to brown. It was revealed variations in weaves and patterns were very developed at that times. 2. The chemical components of soils are hydrocarbons alkyl alcohols nitrogen compounds aromatic organic acid which is supposed to be from a human body microorganisms and their by-products. 3. Seven kinds of fungi Actinomycetes Corynebacterium spp Micrococcus luteus Bacillus Clostridium were isolated from the fabrics. The most common fungus was Bacillus.

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A Study on the Preferences of the Kindergarten Uniform Design for the Parents (학부모의 유치원복 디자인에 대한 선호 경향 - 부산지역을 중심으로 -)

  • Moon, Myeng-Ok;Ham, Youn-Ja
    • Fashion & Textile Research Journal
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    • v.13 no.5
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    • pp.686-694
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    • 2011
  • The purpose of this study was to understand the preferences of the uniform design for the preschool student's parents. 97 parents became subjects for the research and questionaries were analysed by distribution of frequency and percentage using SPSS V. 18.0. The results of this study could be summarized as followings. First, most of the parents preferred to wearing preschool uniform and expected further improvement in function, material and design. Second, the preferred form was semi formal style consisting of shirt, knit vest, knit cardigan, and coat. Third, the preferred colors were the mixing together bright colors and quiet colors in vivid and pastel tone. Fourth, functional materials to comfort in children's physical activities and to serve convenience in cleaning were preferred. In Conclusion, the preferred design characteristics were combined function to enhance comfort and convenience in children's physical activities with esthetics to present loveliness and modesty as preschool students.

Types and Characteristics of Lubricant Filters (윤활유 필터의 종류 및 특징)

  • Sung-Ho Hong;Ju-Yong Shin;Tae-Sung Park;Sang-Hoo Lee
    • Tribology and Lubricants
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    • v.39 no.4
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    • pp.133-138
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    • 2023
  • This paper presents a discussion on lubricating oil filters. The maintenance of lubricating oil filters can improve the performance of mechanical systems and extend the service life of the lubricating oil. Therefore, the effective management of the lubricating oil can extend the service life of the machine and reduce maintenance costs. A representative method for managing lubricating oil is filtering the lubricating oil using a lubricant filter. However, effectively managing a lubricating oil using a lubricant filter requires an understanding of the related knowledge. In this paper, we present the definition, classification, characteristics, specifications, performance, and self-cleaning function of lubricating oil filters. The lubricant filters are classified based on the filter material, filtering method, filtering location, and amount of filtered fluid. Cellulose and glass fiber materials are conventionally used as materials for lubricant filters, and recently, metal materials, which show excellent durability, are being increasingly adopted. The filtering methods can be classified into physical, chemical, magnetic, and electric field methods, and the lubricant filters can be classified according to their location in the lubrication system. The beta ratio and efficiency of the lubricant filter can be determined based on the performance of the filter. Finally, there are many products or technologies that add a self-cleaning function to the filter to remove foreign substances or contaminants for efficient management.

Incidence of Nonfatal Unintentional Injuries among Students, and Compensation Payment for Five Years (2000~2004) in School, Seoul (서울시 초.중.고등학교에서 5년간(2000~2004년) 발생한 학생의 비의도적 손상 및 보상급여비 현황)

  • Shin, Sun-Mi;Lee, Hee-Woo
    • Journal of the Korean Society of School Health
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    • v.24 no.1
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    • pp.12-22
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    • 2011
  • Purpose: The purpose of this study was to identify incidence of nonfatal unintentional injuries (accidents) among students, and to investigate compensation payment for five years (2000~2004) in schools located in Seoul. Methods: Subjects were 14,783 students injured among elementary, middle and high school students. The accumulated data for 5 years (2000~2004) was from the Seoul School Safety and Insurance Association. Chi-square, ttest, logistic regression, and MANCOVA were conducted. Results: The most frequent accidents occurred among males (73.2%), and in special school students (3.86 per 1,000) followed by middle school students (3.05 per 1,000), in May (0.25 per 1,000) followed by June and October, in physical education classes (0.73 per 1,000) followed by special activities (0.40 per 1,000), recess (0.31 per 1,000) and lunch (0.29 per 1,000). Fractures (0.86 per 1,000) were followed by mild injuries (0.39 per 1,000), joint and ligament injuries (0.31 per 1,000), and teeth injuries (0.26 per 1,000). After adjusting for potential confounding variables, the highest means of final compensation payment was for burns (810 thousand KRW) followed by the teeth injuries (506 thousand KRW), cleaning injuries (550 thousand KRW) followed by injuries incurred during special activities (510 thousand KRW) and injuries incurred at special schools (556 thousand KRW). Conclusion: In school, the highest incidences of nonfatal unintentional injuries were in special schools, among males, fractures and physical education. However, the highest compensation payments were for burns, and injuries taking place at special schools and during cleaning hour. Proper health education including teaching healthy habits for safety/injury prevention is needed to prevent injuries and decrease compensation.

Peripheral Vestibular Syndrome in a Cat with Foreign Body Otitis Media/Interna

  • Gu, Su-Hyun;Jung, Dong-In;Kang, Byeong-Teck;Kim, Ju-Won;Yoo, Jong-Hyun;Park, Chul;Park, Hee-Myung
    • Journal of Veterinary Clinics
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    • v.25 no.3
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    • pp.192-194
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    • 2008
  • A 15-month-old, intact male, domestic short hair cat was presented with ataxia, protrusion of the right third eyelid, and anorexia. Clinical signs were firstly noted after ear cleaning at home. Symptoms of the Homer's syndrome were evident. However, postural and proprioceptive reaction deficits were not detected on neurologic examination. Otoscopic examination revealed foreign body in right ear canal. A diagnosis of peripheral vestibular syndrome was made based on results of physical examination including neurologic and otic examination, blood work, and magnetic resonance imaging (MRI). Based on these examinations, the present patient was definitely diagnosed as otitis medial interna induced by foreign body. The vestibular signs were resolved 10 days after removal of cotton tips in right ear canal. This case report indicates that home-care cotton swab can iatrogenically induce otitis media/interna in cats.