• 한국세라믹학회지
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• 제44권3호
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• pp.157-161
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• 2007

Line width under $100\;{\mu}m$ with good resolution is difficult to achieve using conventional thick-film process utilizing screen printing method. However combined with lithography technology finer line and space for miniaturization and highly integrated package is achievable. In this study, photosensitive Ag paste of optimum formulation used for thick film lithography technology was fabricated by various Ag powder, glass powder and additives. As the result, line width of $30\;{\mu}m$ with good definition and reduced mismatch during co-firing with LTCC substrate was acquired. Formulated Ag paste was used to pattern embedded fine line inductor with over 90% yield.

• Journal of Information Display
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• 제7권2호
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• pp.6-11
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• 2006

New photopolymers were designed and prepared using the photosensitive polymer binders. Holographic gratings were successfully fabricated in these photopolymer samples by a conventional optical interference method. We also investigated the effect of photocrosslink in the polymer binder on the diffraction behavior of a new photopolymer. The dynamic behavior of the grating formation was monitored by changing exposure intensity in terms of the diffraction efficiency. Particularly, we focused our efforts in observing the variation of diffraction efficiency during a post UV curing process. The surface topographical change of photopolymer layer before and after Vis/UV light exposure was observed by atomic force microscope (AFM). We inscribed the gratings of the glass diffuser on the surface of the photopolymer and investigated their diffusing properties. The diffusers with photopolymer with the main chain polymer binder showed relatively good viewing angle of around ${\pm}30{\circ}$. Two kinds of photopolymer showed similar uniformity of around 47-54%.

• 폴리머
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• 제31권5호
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• pp.442-446
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• 2007

알칼리 가용성, 광경화형 폴리에스터를 합성하기 위해 플루오렌형 에폭시 아크릴레이트에 다양한 산 2 무 수물을 반응시켰다. LCD (liquid crystal display) 컬러 필터용 블랙매트릭스를 제조하기 위해서 합성된 폴리에스터와 카본블랙 등을 혼합하여 포토레지스트 용액을 조제한 후 리소그래피 공정을 통해 유리 기판 위에 블랙매트릭스패턴을 형성하였다. 합성된 다양한 폴리에스터의 특성과 리소그래피 패턴을 비교 조사하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.368-368
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• 2007

Zinc oxide (ZnO) has drawn much interest as a potential transparent conducting oxide (TCO) for applying to solar cell and front electrode of electro-luminescent devices. For the enhancement of electrical property of TCOs, dopant introduction and hybridization with conductive nanoparticles have been investigated. In this work, ZnO films were formed on glass substrate by using photochemical solution deposition of Ag nanoparticles dispersed or various metal (Ag, Cd, In, or Sn) contained photosensitive ZnO solutions. The usage of photosensitive solution permits us to obtain a micron-sized direct patterning of ZnO film without using conventional dry etching procedure. The structural, optical, and electrical characteristics of ZnO films with the introduction of metal dopants with/without Ag nanoparticles have been investigated to check whether there is a combined effect between metal dopants and Ag nanoparticles on the characteristics of ZnO film. The phase formation and crystallinity of ZnO film were monitored with X-ray diffractometer. The optical transmittance measurement was carried out using UV-VIS-NIR spectrometer and the electrical properties such as sheet resistance and conductivity were observed by using four-point probe.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.963-966
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• 2000

Plasma display panel (PDP) is a type of flat panel display utilizing the light emission that is produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalk from adjacent sub-pixels. Mold for forming barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing process such as screen printing, sand-blasting and photosensitive glass methods. Mold for PDP barrier ribs have stripes of micro grooves transferring stripes of glass-material wall. In this paper. Stripes of grooves of which width 48 um, depth 124um, pitch 274um was acquired by machining the material of WC with dicing saw blade. Maximum roughness of the bottom and sidewall of the grooves was respectively 120 nm, 287 nm. Maximum tilt angle caused by difference between upper-most width and lower-most width was 2$^{\circ}$. Maximum Radius of curvature of bottom was 7.75 ${\mu}{\textrm}{m}$. This results meets the specification for barrier ribs of 50 inch XGA PDP. Forming the glass paste will be followed by using mold in the near future.

• 대한기계학회논문집B
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• 제33권12호
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• pp.939-946
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• 2009

Wettability is a critical parameter in micro-scale two-phase system. Several previous results indicate that wettability has influential affect on two-phase flow pattern in a microchannel. However, previous studies conducted using circular microtube, which was made by conventional fabrication techniques. Although most applications for micro thermal hydraulic system has used a rectangular microchannel, data for the rectangular microchannel is totally lack. In this study, a hydrophilic rectangular microchannel was fabricated using a photosensitive glass. And a hydrophobic rectangular microchannel was prepared using silanization of glass surfaces with OTS (octa-dethyl-trichloro-siliane). Experiments of two-phase flow in the hydrophilic and the hydrophobic rectangular microchannels were conducted using water and nitrogen gas. Visualization of twophase flow pattern was carried out using a high-speed camera and a long distance microscope. Visualization results show that the wettability was important for two-phase flow pattern in rectangular microchannel. In addition, two-phase frictional pressure drop was highly related with flow patterns. Finally, Two-phase frictional pressure drop was analyzed with flow patterns.

• 한국가시화정보학회지
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• 제9권2호
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• pp.34-39
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• 2011

This paper presents a novel direct fabrication method of the thin metal film RTD temperature sensor array on an arbitrary curved surface by using MEMS technology to measure a distributed temperature field up to $300^{\circ}C$ without disturbing a fluid flow. In order to overcome the difficulty in the three dimensional photography of sensor patterning, the UV pre-irradiated photosensitive dry film resist technology has been developed newly. This method was applied to the fabrication of the temperature sensor array on a glass tube, which is arranged parallel and transverse to a main flow. Gold was used as a temperature sensing material. The resistance change was measured in a thermally controlled oven by increasing the environmental temperature. The linear increase in resistance change and a constant slope were obtained. Also, the sensitivity of each RTD temperature sensor was evaluated.

• 한국정밀공학회지
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• 제19권6호
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• pp.176-183
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• 2002

Plasma Display Panel(PDP) is a type of flat panel display utilizing the light emission produced by gas discharge. Barrier Ribs of PDP separating each sub-pixel prevents optical and electrical crosstalks from adjacent sub-pixels. The mold for forming the barrier ribs has been newly researched to overcome the disadvantages of conventional manufacturing processes such as screen printing, sand-blasting and photosensitive glass methods. The mold for PDP barrier ribs have stripes of micro grooves transferring glass-material wall. In this paper , Stripes of grooves of which width 48$\mu$m, depth 124$\mu$m , pitch 274$\mu$m was acquired by machining of single crystal silicon with dicing saw blade. Maximum roughness of the bottom of the grooves was 59.6 nm Ra in grooving Si. Barrier ribs were farmed with silicone rubber mold, which is transferred from grooved Si forming hard mold. Silicone rubber mold has the elasticity, which enable to accommodate the waviness of lower glass plate of PDP. The methods assisted by the microwave and UV was adopted for reducing the forming time of glass paste.

• 센서학회지
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• 제16권5호
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• pp.325-330
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• 2007

For the application to optic devices, wafer level package including spacer with particular thickness according to optical design could be required. In these cases, the uniformity of spacer thickness is important for bonding strength and optical performance. Packaging process has to be performed at low temperature in order to prevent damage to devices fabricated before packaging. And if photosensitive material is used as spacer layer, size and shape of pattern and thickness of spacer can be easily controlled. This paper presents polymer bonding using thick, uniform and patterned spacing layer of SU-8 2100 photoresist for wafer level package. SU-8, negative photoresist, can be coated uniformly by spin coater and it is cured at $95^{\circ}C$ and bonded well near the temperature. It can be bonded to silicon well, patterned with high aspect ratio and easy to form thick layer due to its high viscosity. It is also mechanically strong, chemically resistive and thermally stable. But adhesion of SU-8 to glass is poor, and in the case of forming thick layer, SU-8 layer leans from the perpendicular due to imbalance to gravity. To solve leaning problem, the wafer rotating system was introduced. Imbalance to gravity of thick layer was cancelled out through rotating wafer during curing time. And depositing additional layer of gold onto glass could improve adhesion strength of SU-8 to glass. Conclusively, we established the coating condition for forming patterned SU-8 layer with $400{\mu}m$ of thickness and 3.25 % of uniformity through single coating. Also we improved tensile strength from hundreds kPa to maximum 9.43 MPa through depositing gold layer onto glass substrate.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.II
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• pp.1466-1469
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• 2005

We report effects of electrical aging on the emission stability of carbon nanotube (CNT) paste for low cost and high low-cost and large area field emission devices or displays. Photosensitive carbon nanotube paste was formulated by using of spin on glass (SOG) as an inorganic binder and investigated emission properties and stability depending on electrical aging condition.