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http://dx.doi.org/10.5407/JKSV.2011.9.2.034

Fabrication and Performance Evaluation of Thin Film RTD Temperature Sensor Array on a Curved Glass Surface  

Ahn, Chul-Hee (부산대학교 기계공학부)
Kim, Hyoung-Hoon (부산대학교 기계공학부)
Park, Sang-Hu (부산대학교 기계공학부)
Son, Chang-Min (부산대학교 기계공학부)
Go, Jeung-Sang (부산대학교 기계공학부)
Publication Information
Journal of the Korean Society of Visualization / v.9, no.2, 2011 , pp. 34-39 More about this Journal
Abstract
This paper presents a novel direct fabrication method of the thin metal film RTD temperature sensor array on an arbitrary curved surface by using MEMS technology to measure a distributed temperature field up to $300^{\circ}C$ without disturbing a fluid flow. In order to overcome the difficulty in the three dimensional photography of sensor patterning, the UV pre-irradiated photosensitive dry film resist technology has been developed newly. This method was applied to the fabrication of the temperature sensor array on a glass tube, which is arranged parallel and transverse to a main flow. Gold was used as a temperature sensing material. The resistance change was measured in a thermally controlled oven by increasing the environmental temperature. The linear increase in resistance change and a constant slope were obtained. Also, the sensitivity of each RTD temperature sensor was evaluated.
Keywords
RTD; Temperature sensor; Dry film resist; Curved surface; Photolithography;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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